- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/02 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof Details
Patent holdings for IPC class H01J 37/02
Total number of patents in this class: 340
10-year publication summary
|
31
|
21
|
35
|
23
|
17
|
23
|
22
|
20
|
27
|
22
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| ASML Netherlands B.V. | 7493 |
63 |
| Hitachi High-Tech Corporation | 5411 |
21 |
| Varian Semiconductor Equipment Associates, Inc. | 1231 |
18 |
| FEI Company | 965 |
18 |
| Applied Materials, Inc. | 19005 |
12 |
| Carl Zeiss SMT GmbH | 3038 |
9 |
| Axcelis Technologies, Inc. | 427 |
9 |
| Hermes Microvision Incorporated B.V. | 124 |
9 |
| NuFlare Technology, Inc. | 867 |
8 |
| Tokyo Electron Limited | 13008 |
7 |
| Lam Research Corporation | 5326 |
7 |
| Hitachi High-Tech Science Corporation | 285 |
6 |
| Carl Zeiss MultiSEM GmbH | 142 |
6 |
| Applied Materials Israel, Ltd. | 616 |
5 |
| Carl Zeiss Microscopy GmbH | 1223 |
5 |
| Samsung Electronics Co., Ltd. | 148077 |
4 |
| Howard Hughes Medical Institute | 229 |
4 |
| KLA Corporation | 1619 |
4 |
| ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | 157 |
3 |
| JEOL Ltd. | 597 |
3 |
| Other owners | 119 |