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2025
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G/S
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Optical defect inspection equipment in the nature of an optical microscope used for inspecting an... |
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G/S
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Semiconductor wafer processing equipment used for implanting different materials into wafers. |
|
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G/S
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Operational software for the quality control, and measurement of semiconductor materials, namely,... |
|
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G/S
|
Semiconductor manufacturing machines used for digital
lithography-based patterning. Recorded sof... |
|
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G/S
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Semiconductor manufacturing equipment used to densify
materials on wafers. |
|
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G/S
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Semiconductor wafer processing chamber for depositing
dielectric materials. |
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G/S
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semiconductor wafer processing chamber for depositing dielectric materials |
|
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G/S
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Semiconductor manufacturing equipment used to densify materials on wafers |
|
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G/S
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Semiconductor manufacturing machines used for digital lithography-based patterning Recorded softw... |
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G/S
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O-rings, non-metal gaskets, non-metal seals, and elastomer
seals for use in semiconductor manufa... |
|
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G/S
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O-rings, non-metal gaskets, non-metal seals, and elastomer seals for use in semiconductor manufac... |
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G/S
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Analytical equipment used for material metrology and
inspection in the field of semiconductor wa... |
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2024
|
Invention
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Substrate support designs for a deposition chamber.
The present disclosure generally relates to ... |
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G/S
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Analytical equipment used for material metrology and inspection in the field of semiconductor waf... |
|
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Invention
|
Processing chamber deposition confinement.
Exemplary semiconductor processing systems may includ... |
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Invention
|
Apparatus, systems, and methods of using atomic hydrogen radicals with selective epitaxial deposi... |
|
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G/S
|
Machines for the design and manufacture of OLED display
substrates using semiconductor evaporato... |
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G/S
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Semiconductor evaporator processing equipment for the design and manufacture of OLED display subs... |
|
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G/S
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Machines for use in the manufacture of electrical and
electronic circuitry. Optical defect inspe... |
|
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G/S
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Machines for use in the manufacture of electrical and electronic circuitry Optical defect inspect... |
|
|
Invention
|
High speed substrate sorter.
Disclosed herein are a substrate sorter, an inspection and sorting ... |
|
|
Invention
|
Methods for forming euv resist underlayer.
The present disclosure generally relates to semicondu... |
|
|
Invention
|
Methods for treatment of high-k materials to reduce leakage current and increase capacitance.
Im... |
|
|
Invention
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Apparatus and method to achieve low loss pvd sink with cmos beol compatible thermal budget. Embod... |
|
|
Invention
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Enhanced heat transfer coefficient (htc) between web and the "roto-static" drum in a roll-to-roll... |
|
|
Invention
|
Multizone reflector for temperature planar non-uniformity. Vapor deposition processing chamber te... |
|
|
Invention
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Vented semiconductor processing chamber. Embodiments of the present disclosure relate to an appar... |
|
|
Invention
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Releasing separate color conversion layer on micro-led display backplane. Embodiments of the pres... |
|
|
Invention
|
Ceramic coated heat exchanging drum with nozzles, non-sealing and sealing mesas. The present disc... |
|
|
Invention
|
Plasma process control using fluorine radical concentrations. A system includes a remote plasma s... |
|
|
Invention
|
3d memory cell array word line connect area. This specification describes technologies for creati... |
|
|
Invention
|
3d memory cell array word line connect area.
This specification describes technologies for creat... |
|
|
Invention
|
System for adjusting process chamber component temperature.
In one or more embodiments, a semico... |
|
|
Invention
|
Chlorine-free removal of molybdenum oxides from substrates. m4-m4-m, wherein m is an integer from... |
|
|
Invention
|
Using deep reinforcement learning for substrate dispatching management at a substrate fabrication... |
|
|
Invention
|
System for adjusting process chamber component temperature. In one or more embodiments, a semicon... |
|
|
Invention
|
Heaters, and related chamber kits and processing chambers, for semiconductor manufacturing.
The ... |
|
|
Invention
|
Heaters, and related chamber kits and processing chambers, for semiconductor manufacturing. The p... |
|
|
Invention
|
Auxiliary flow plate for thickness and concentration uniformity and adjustability. The present di... |
|
|
Invention
|
Transfer tool configuration for safe transfer of lithium onto a substrate. In one embodiment, a f... |
|
|
G/S
|
Semiconductor manufacturing equipment, namely, systems
comprised of semiconductor manufacturing ... |
|
|
G/S
|
Semiconductor manufacturing equipment, namely, systems comprised of semiconductor manufacturing m... |
|
|
G/S
|
Software-controlled systems used in the semiconductor manufacturing industry, namely, recorded so... |
|
|
G/S
|
Semiconductor wafer processing equipment. |
|
|
Invention
|
Passivation apparatus and method for lithium metal anode. A method and apparatus for passivation ... |
|
|
Invention
|
Plasma process control using fluorine radical concentrations.
A system includes a remote plasma ... |
|
|
Invention
|
Engineering epi stacks for extreme wafer thinning.
Embodiments of the present disclosure include... |
|
|
G/S
|
Semiconductor wafer inspection system used to inspect wafers
for darkfield defects, including pa... |
|
|
Invention
|
Apparatus and method of in-situ film thickness measurement during display deposition process. A p... |
|
|
G/S
|
Semiconductor wafer inspection system used to inspect wafers for darkfield defects, including par... |
|
|
G/S
|
Semiconductor wafer and glass panel process and processing
equipment. OLED based display devices... |
|
|
G/S
|
Semiconductor wafer and glass panel process and processing equipment OLED based display devices a... |
|
|
Invention
|
Methods and apparatus for anisotropic film growth, and related device. The present disclosure rel... |
|
|
Invention
|
Optically active showerhead for process chamber. A showerhead for a process chamber is provided i... |
|
|
Invention
|
Optically active showerhead for process chamber.
A showerhead for a process chamber is provided ... |
|
|
G/S
|
Semiconductor manufacturing equipment used to deposit metal
on wafers. |
|
|
G/S
|
Semiconductor manufacturing equipment used to deposit
materials on substrates. |
|
|
Invention
|
Lift pins including opening, and related components and chamber kits, for processing chambers. Th... |
|
|
Invention
|
Heat transfer jackets and sensor assemblies, and related methods and processing chambers, for sem... |
|
|
Invention
|
Pre-heat rings, heating systems, and processing chambers including carbon heaters. The present di... |
|
|
G/S
|
Providing non-downloadable electronic publications featuring
information about the environment, ... |
|
|
Invention
|
Fin structures, plate apparatus, and related methods, process kits, and processing chambers for g... |
|
|
Invention
|
Pre-heat rings, heating systems, and processing chambers including carbon heaters.
The present d... |
|
|
G/S
|
Eco-efficient semiconductor wafer processing equipment. Software-controlled, eco-efficient system... |
|
|
G/S
|
Optical devices for high performance photonic applications. |
|
|
G/S
|
Equipment for testing chemical delivery systems including
ampoules or containers. Downloadable a... |
|
|
G/S
|
Downloadable and/or recordable software for creating
semiconductor fabrication recipes. |
|
|
G/S
|
Equipment for delivery systems, namely, containers made of
metal for storing and delivering chem... |
|
|
G/S
|
Recorded computer software used for running, tracking, and
providing feedback for on-tool metrol... |
|
|
G/S
|
Semiconductor wafer processing equipment used for implanting
different materials into wafers. |
|
|
G/S
|
Semiconductor wafer processing equipment used for implanting different materials into wafers |
|
|
G/S
|
Semiconductor manufacturing equipment used to remove
material from substrates. |
|
|
G/S
|
Semiconductor manufacturing software used to provide wafer
doping uniformity. |
|
|
G/S
|
Semiconductor wafer processing equipment for modifying film
properties of substrates. |
|
|
G/S
|
Semiconductor manufacturing machines used to deposit metal
on wafers. |
|
|
G/S
|
Semiconductor processing equipment components, namely,
chambers used to deposit materials on sub... |
|
|
G/S
|
Semiconductor manufacturing machines used to remove material
from wafers. |
|
|
G/S
|
Semiconductor wafer processing equipment, namely, semiconductor processing chamber used to deposi... |
|
|
G/S
|
Recorded semiconductor manufacturing software used to provide wafer doping uniformity |
|
2023
|
Invention
|
Virtual metrology for enhanced window temperature control.
Embodiments of the disclosure relate ... |
|
|
Invention
|
Metal oxide conversion for meol and beol applications.
A method of capping a metal layer include... |
|
|
Invention
|
Determining tilt angle of substrate structures utilizing angular fourier decomposition of scatter... |
|
|
Invention
|
Lift pins including opening, and related components and chamber kits, for processing chambers.
T... |
|
|
Invention
|
Methods and apparatus for anisotropic film growth, and related devices.
The present disclosure r... |
|
|
Invention
|
Chlorine-free removal of molybdenum oxides from substrates.
Methods of removing molybdenum oxide... |
|
|
Invention
|
Auxiliary flow plate for thickness and concentration uniformity adjustability.
The present discl... |
|
|
Invention
|
Multizone reflector for temperature planar non-uniformity.
Vapor deposition processing chamber t... |
|
|
Invention
|
Method for testing a packaging substrate, and apparatus for testing a packaging substrate. A meth... |
|
|
Invention
|
Actively controlled window for epitaxial deposition process temperature control.
A window compon... |
|
|
Invention
|
Showerhead design for plasma-enhanced deposition.
Showerhead assemblies for semiconductor manufa... |
|
|
Invention
|
Oligomer film for bottom-up gap fill processes.
Embodiments of the disclosure relate to methods ... |
|
2022
|
Invention
|
Selective etching of scandium-doped aluminum nitride.
Exemplary substrate processing methods are... |
|
|
Invention
|
Substrate support for a substrate processing chamber |
