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2025
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G/S
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Providing an online non-downloadable software suite for automating and optimizing manufacturing o... |
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G/S
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Providing online non-downloadable software for managing, coordinating, monitoring, updating, and ... |
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G/S
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Semiconductor manufacturing equipment used to densify materials on wafers |
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G/S
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Semiconductor wafer processing equipment and components, namely, chemical mechanical polishers an... |
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G/S
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Optical defect inspection equipment in the nature of an optical microscope used for inspecting an... |
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G/S
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Semiconductor wafer processing equipment used for implanting different materials into wafers. |
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G/S
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Operational software for the quality control, and measurement of semiconductor materials, namely,... |
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G/S
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Semiconductor manufacturing machines used for digital
lithography-based patterning. Recorded sof... |
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Invention
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Substrate measurement subsystem.
An identification feature of a substrate in a substrate measure... |
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G/S
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Semiconductor manufacturing equipment used to densify
materials on wafers. |
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Invention
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Methods of depositing silicon-containing dielectric layers for semiconductor devices.
Methods of... |
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Invention
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Method for cmp temperature control.
A chemical mechanical polishing system includes a platen to ... |
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Invention
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Auto fine-tuner for desired temperature profile.
Embodiments disclosed herein include a method o... |
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G/S
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Semiconductor wafer processing chamber for depositing
dielectric materials. |
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G/S
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semiconductor wafer processing chamber for depositing dielectric materials |
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G/S
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Semiconductor manufacturing machines used for digital lithography-based patterning Recorded softw... |
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G/S
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O-rings, non-metal gaskets, non-metal seals, and elastomer
seals for use in semiconductor manufa... |
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Invention
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Paddle configuration for a particle coating reactor.
A reactor for coating particles includes a ... |
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Invention
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Methods and mechanisms for adjusting process chamber parameters during substrate manufacturing.
... |
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G/S
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O-rings, non-metal gaskets, non-metal seals, and elastomer seals for use in semiconductor manufac... |
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G/S
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Analytical equipment used for material metrology and
inspection in the field of semiconductor wa... |
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Invention
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Self-aligning backside gate connection.
Embodiments of the present disclosure relate to a method... |
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2024
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G/S
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Analytical equipment used for material metrology and inspection in the field of semiconductor waf... |
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Invention
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Air-core coil in analog circuit filters for plasma processing. A system includes a processing cha... |
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Invention
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Method and apparatus of substrate support repair and refurbishment. Methods of refurbishing ceram... |
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Invention
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Gas delivery system.
A gas delivery system includes a substrate. The substrate includes a first ... |
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Invention
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Selective deposition of capping layer. Provided are methods of forming a semiconductor device. Th... |
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Invention
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Real-time measurement of microwave resonators as plasma diagnostics for process monitoring. Embod... |
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Invention
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Direct applied interposer for co-packaged optics. A method of forming a packaged multichip module... |
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Invention
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Process chamber gas supply improvement. A process chamber is provided including: a chamber body a... |
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Invention
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Stress layer modification using energetic beam processing through photoresist mask. A method may ... |
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Invention
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Multimode dose compensation system. A method, a system and computer program product for controlli... |
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Invention
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Substrate stress management using direct selective area processing. A method may include providin... |
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Invention
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High conformal coating on textured surface of processing chamber component. A plasma processing c... |
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G/S
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Machines for the design and manufacture of OLED display
substrates using semiconductor evaporato... |
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Invention
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Nanocrystalline diamond and ultra-nanocrystalline diamond films by catalytic cvd. A hot wire chem... |
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Invention
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Atomic layer etching of silicon oxide at cryogenic temperature. Embodiments of the disclosure inc... |
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G/S
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Semiconductor evaporator processing equipment for the design and manufacture of OLED display subs... |
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Invention
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Plasma injection configurations for processing chambers, and related apparatus, chamber kits, and... |
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Invention
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Esc design with enhanced tunability for wafer far edge plasma profile control. A substrate suppor... |
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G/S
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Machines for use in the manufacture of electrical and
electronic circuitry. Optical defect inspe... |
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Invention
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Rf blocker for uniformity control. A semiconductor processing system with improved plasma density... |
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G/S
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Machines for use in the manufacture of electrical and electronic circuitry Optical defect inspect... |
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Invention
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Constructing a substrate topology map based on measured properties. A system includes a displacem... |
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G/S
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Semiconductor manufacturing equipment, namely, systems
comprised of semiconductor manufacturing ... |
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G/S
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Semiconductor manufacturing equipment, namely, systems comprised of semiconductor manufacturing m... |
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G/S
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Software-controlled systems used in the semiconductor manufacturing industry, namely, recorded so... |
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G/S
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Semiconductor wafer processing equipment. |
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Invention
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Treating silicon nitride based dielectric films. The present disclosure provides methods of gap f... |
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G/S
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Semiconductor wafer inspection system used to inspect wafers
for darkfield defects, including pa... |
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G/S
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Inspection machines for the inspection of semiconductor wafers to inspect darkfield defects, name... |
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G/S
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Semiconductor wafer and glass panel process and processing
equipment. OLED based display devices... |
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G/S
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Semiconductor wafer processing equipment including equipment for manufacturing OLED (Organic ligh... |
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G/S
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Semiconductor manufacturing equipment used to deposit metal
on wafers. |
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G/S
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Semiconductor manufacturing equipment used to deposit
materials on substrates. |
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G/S
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Providing non-downloadable electronic publications featuring
information about the environment, ... |
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G/S
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Eco-efficient semiconductor wafer processing equipment. Software-controlled, eco-efficient system... |
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G/S
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Optical devices for high performance photonic applications. |
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G/S
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Equipment for testing chemical delivery systems including
ampoules or containers. Downloadable a... |
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G/S
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Downloadable and/or recordable software for creating
semiconductor fabrication recipes. |
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G/S
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Equipment for delivery systems, namely, containers made of
metal for storing and delivering chem... |
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G/S
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Recorded computer software used for running, tracking, and
providing feedback for on-tool metrol... |
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G/S
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Semiconductor wafer processing equipment used for implanting
different materials into wafers. |
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G/S
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Semiconductor wafer processing equipment used for implanting different materials into wafers |
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G/S
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Semiconductor manufacturing equipment used to remove
material from substrates. |
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G/S
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Semiconductor manufacturing software used to provide wafer
doping uniformity. |
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G/S
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Semiconductor wafer processing equipment for modifying film
properties of substrates. |
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G/S
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Semiconductor manufacturing machines used to deposit metal
on wafers. |
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G/S
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Semiconductor processing equipment components, namely,
chambers used to deposit materials on sub... |
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Invention
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Manifold for material removal system.
A system includes a material removal apparatus including a... |
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2023
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Invention
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System and process for post-chemical mechanical polishing cleaning.
A substrate cleaning system ... |
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Invention
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Real-time measurement of microwave resonators as plasma diagnostics for process monitoring.
Embo... |
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Invention
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Selective deposition of capping layer.
Provided are methods of forming a semiconductor device. T... |
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|
Invention
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Rf blocker for uniformity control.
A semiconductor processing system with improved plasma densit... |
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Invention
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Substrate stress management using direct selective area processing.
A method may include providi... |
|
|
Invention
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Stress layer modification using energetic beam processing through photoresist mask.
A method may... |
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|
Invention
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Process chamber gas supply improvement.
A process chamber is provided including: a chamber body ... |
|
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Invention
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Air-core coil in analog circuit filters for plasma processing.
A system includes a processing ch... |
|
|
Invention
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Treating silicon nitride based dielectric films.
The present disclosure provides methods of gap ... |
|
|
Invention
|
Constructing a substrate topology map based on measured properties.
A system includes a displace... |
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|
Invention
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Multimode dose compensation system.
A method, a system and computer program product for controll... |
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Invention
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Method and apparatus of substrate support repair and refurbishment.
Methods of refurbishing cera... |
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Invention
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Isolation formation method in high-aspect ratio cmos stacked devices.
A system and method for fo... |
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Invention
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Endpoint detection by generating synthetic sensor data.
A method includes providing, to a traine... |
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Invention
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Electron-stimulated etching of silicon.
Methods and apparatus for processing a substrate which i... |
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Invention
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Direct applied interposer for co-packaged optics.
A method of forming a packaged multichip modul... |
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Invention
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Atomic layer etching of silicon oxide at cryogenic temperature.
Embodiments of the disclosure in... |
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Invention
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Modular processing chambers and related heating configurations, methods, apparatus, and modules f... |
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Invention
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Bottom-up dielectric gap-fill for device isolation during source/drain epitaxy in cfet.
A system... |
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Invention
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Electrode configurations and magnet configurations for processing chambers, and related methods a... |
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Invention
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Electrode and coil configurations for processing chambers and related chamber kits, apparatus, an... |
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2022
|
Invention
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Methods and apparatuses for identifying defective electrical connections of a substrate.
A metho... |
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Invention
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Method and apparatus for testing a packaging substrate.
A method of testing a packaging substrat... |
