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2024
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Invention
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Liquid metal alloy feed materials for ion implantation.
Liquid metal alloy precursor composition... |
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Invention
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Liquid metal alloy feed materials for ion implantation. Liquid metal alloy precursor compositions... |
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Invention
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System and method for dynamic loadlock pressure control. A workpiece processing system has a proc... |
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Invention
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Wafer alignment, cleanliness, and surface quality verification using laser light scattering.
A s... |
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Invention
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System and method for dynamic loadlock pressure control.
A workpiece processing system has a pro... |
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Invention
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High-efficiency target for an ion source. 233 and may be fabricated using additive manufacturing. |
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Invention
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Multifaceted target for an ion source. A target body includes a plurality of wave-shaped layers s... |
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Invention
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Multifaceted target for an ion source.
A target body includes a plurality of wave-shaped layers ... |
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Invention
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System and method of verifying workpiece alignment. A workpiece processing system and method are ... |
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Invention
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High-efficiency target for an ion source.
A target body can define a central bore along a centra... |
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Invention
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System and method of verifying workpiece alignment.
A workpiece processing system and method are... |
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Invention
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Electrostatic chuck with controllable temperature, ion implantation system using the same as well... |
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Invention
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Large range heated electrostatic chuck.
A clamping system has a workpiece clamp having a platen ... |
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Invention
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High bandwidth variable dose ion implantation system and method. An ion implantation system 100 i... |
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Invention
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Backside implant for wafer curvature control.
A method for controlling workpiece deformation pre... |
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Invention
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Fixed position filament.
A cathode filament device for an indirectly heated cathode has a first ... |
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Invention
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Deposition monitor for semiconductor manufacturing system. An ion implantation system includes a ... |
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Invention
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High bandwidth variable dose ion implantation system and method.
An ion implantation system incl... |
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Invention
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Apparatus and method for two-dimensional ion beam profiling. cdd. A rotary input apparatus (240) ... |
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Invention
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Apparatus and method for two-dimensional ion beam profiling.
A profiling apparatus has a hollow ... |
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Invention
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Deposition monitor for semiconductor manufacturing system.
An ion implantation system includes a... |
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Invention
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Apparatus and methods for maintaining vacuum checking force on semiconductor substrates under abn... |
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Invention
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Actively heated target to generate an ion beam. An arc chamber for an ion source defines a chambe... |
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Invention
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Actively heated target to generate an ion beam.
An arc chamber for an ion source defines a chamb... |
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Invention
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Twist and tilt verification using diffraction patterns. A light source directs an incident beam a... |
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Invention
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Twist and tilt verification using diffraction patterns.
A light source directs an incident beam ... |
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Invention
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High energy implanter with small footprint. A high-energy ion implantation system 100 has an ion ... |
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Invention
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Multi-cathode ion source with feedback control. An ion source having a thermionically-emitting ca... |
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Invention
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Dual cathode temperature-controlled multi-cathode ion source.
An ion source having a thermionica... |
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Invention
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Ion beam profiling using optical tomography.
An ion beam characterization system has one or more... |
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2023
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Invention
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Wire or rod shaped extraction electrode optics. An electrode apparatus for an ion implantation sy... |
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Invention
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Dual source injector with switchable analyzing magnet. An ion implantation system has a mass anal... |
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Invention
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High energy implanter with small footprint.
A high-energy ion implantation system has an ion sou... |
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Invention
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Magnetic focusing device low energy ion beams.
A magnetic focusing apparatus for focusing an ion... |
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Invention
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Ion implantation system and method for implanting aluminum using non-fluorine-containing halide s... |
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Invention
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Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to ge... |
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Invention
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Hydraulic feed system for an ion source. An ion source has an arc chamber defining an arc chamber... |
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Invention
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Hydraulic feed system for an ion source. An ion source 110 has an arc chamber 116 defining an arc... |
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2022
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Invention
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High incidence angle graphite for particle control with dedicated low sputter yield ion beam.
An... |
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Invention
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High incidence angle graphite for particle control with dedicated low sputter yield ion beam. An ... |
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Invention
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Wire or rod shaped extraction electrode optics.
An electrode apparatus for an ion implantation s... |
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Invention
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Shielded gas inlet for an ion source.
An ion source has arc chamber having one or more radiation... |
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Invention
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Shielded gas inlet for an ion source. An ion source has arc chamber having one or more radiation ... |
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Invention
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Charge filter magnet with variable achromaticity. An ion implantation systemlOO has an ion source... |
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Invention
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Method for setting gap between cathode and filament.
A cathode apparatus for an ion source has a... |
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2021
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Invention
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Charge filter magnet with variable achromaticity.
An ion implantation system has an ion source t... |
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2000
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G/S
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Electrical equipment, in particular thermal processors, photoresist processors, ashers, photostab... |
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G/S
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electrical equipment, namely, thermal processors, photoresist processors, ashers, photostabilizer... |
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G/S
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Semiconductor manufacturing equipment including thermal processing equipment, photresist processi... |
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G/S
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electrical equipment, namely, thermal processors, photoresist processors, ashers, photostablizers... |
