|
2025
|
G/S
|
Semiconductor manufacturing machines; Semiconductor substrates manufacturing machines; Semiconduc... |
|
|
G/S
|
Semiconductor manufacturing machines; semiconductor
substrates manufacturing machines; semicondu... |
|
|
G/S
|
Recorded computer simulation software for modeling semiconductor manufacturing; Recorded computer... |
|
2024
|
Invention
|
Substrate processing aparatuses with rotating mechanisms including shafts with gas flow paths.
A... |
|
|
Invention
|
Nucleation-free deposition.
Provided herein are methods of depositing tungsten (W) films without... |
|
|
Invention
|
Electrochemical deposition system including optical probes.
An electrochemical deposition system... |
|
|
Invention
|
Sensor data compression in a plasma tool.
Systems and methods for compressing data are described... |
|
|
Invention
|
Bottom and middle edge rings.
A bottom ring is configured to support a moveable edge ring that i... |
|
|
Invention
|
Wafer placement correction in indexed multi-station processing chambers.
Systems and techniques ... |
|
|
Invention
|
Metal deposition.
Various showerheads and methods are provided. A showerhead may include a facep... |
|
|
Invention
|
Radio frequency power generator having multiple output ports.
A radio frequency (RF) power gener... |
|
|
Invention
|
Rf tuning systems including tuning circuits having impedances for setting and adjusting parameter... |
|
|
Invention
|
Joining techniques for composite ceramic bodies.
In joining composite ceramic bodies, at least o... |
|
|
Invention
|
Dry development of resists.
Dry development of resists can be useful, for example, to form a pat... |
|
|
Invention
|
Matchless plasma source for semiconductor wafer fabrication.
A matchless plasma source is descri... |
|
|
Invention
|
In-situ sensor-fusion with artificial intelligence.
In one embodiment, the disclosed apparatus i... |
|
|
G/S
|
Pure non-metallic silicon sold in ingots, slices, loose
aggregate chunks; silicon; silicon carbi... |
|
|
Invention
|
Use of synthetic photo-realistic images for semiconductor. In accordance with some embodiments, m... |
|
|
Invention
|
Multi plenum showerhead without faceplate. A showerhead includes a plate and a baffle. The plate ... |
|
|
Invention
|
Cooling plate with aperiodic organic reticulated cooling passage pattern. Cooling plates are desc... |
|
|
Invention
|
Selectivity in thermal etch processes through surface passivation. a method for processing a semi... |
|
|
Invention
|
Coils for generating radio frequency fields. According to some embodiments, a coil for generating... |
|
|
Invention
|
Methods and apparatuses using tunable reactive gas source. Photon-activated species such as react... |
|
|
Invention
|
Chemical sensor for automatic flow compensation of mass flow controller. Examples are disclosed t... |
|
|
Invention
|
Circulation of non-pfas fluids in liquid and supercritical fluid states through substrate process... |
|
|
Invention
|
Selective removal of redeposited carbon masks during etch. A method of etching recessed features ... |
|
|
Invention
|
Selective etch of stack below metal mask using oxygen and fluorine. A method of etching recessed ... |
|
|
Invention
|
Pretreating substrate for selective deposition. One example provides a method for processing a su... |
|
|
Invention
|
Reconfigurable advanced modular precursor delivery system (ampds). A precursor delivery apparatus... |
|
|
Invention
|
Systems and methods for regulating power output from a matchless plasma source. Systems and metho... |
|
|
Invention
|
Correction of deposition process drift. Disclosed herein is a method comprising performing a cham... |
|
|
Invention
|
Showerhead having components removably coupled to one another. A showerhead faceplate for semicon... |
|
|
Invention
|
Chemical vapor deposition-enhanced atomic layer deposition. Examples are disclosed that relate to... |
|
|
Invention
|
Reclamation of hydrogen halides in dry development of photoresists. Methods and apparatuses for t... |
|
|
Invention
|
Integrated multi-ported valve assembly. A multiport valve assembly for a substrate processing sys... |
|
|
Invention
|
Integrated capacitively coupled plasma and remote inductively coupled plasma. A plasma processing... |
|
|
G/S
|
Chemicals for use in industry and science; chemicals for use
in the semiconductor industry; chem... |
|
|
G/S
|
Chemicals for use in industry and science; Chemicals for use in the semiconductor industry; Chemi... |
|
2023
|
G/S
|
Computer services, namely, providing on-line facilities for
real-time interaction with other com... |
|
|
G/S
|
Recorded computer software comprising a library of 3d models
and design tools for computer aided... |
|
|
G/S
|
Consultation services in the field of software for designing
and manufacturing semiconductors an... |
|
|
G/S
|
Computer hardware and recorded software systems for the installation, operation, maintenance, and... |
|
|
G/S
|
Ceramic parts for machines; parts for machines for the
deposition of materials; ceramic tools fo... |
|
|
G/S
|
Recorded virtual reality and augmented reality software for the design, development, manufacture,... |
|
|
G/S
|
Computer services, namely, providing on-line facilities for real-time interaction with other comp... |
|
|
G/S
|
Recorded computer software for designing and manufacturing semiconductors and micro-electro- mech... |
|
|
G/S
|
Consultation services in the field of software for designing and manufacturing semiconductors and... |
|
|
Invention
|
Reduced temperature etching of doped silicon oxide.
Examples are disclosed that relate to etchin... |
|
|
Invention
|
Throttle valve for substrate processing systems.
A valve of a substrate processing system includ... |
|
|
G/S
|
Ceramic tools for semiconductor manufacturing machines, semiconductor substrates manufacturing ma... |
|
|
Invention
|
Thin film growth modulation using wafer bow.
A process chamber and method of modulating thin fil... |
|
|
Invention
|
Rf power path symmetry.
In some examples, a multi-station process tool comprises a plurality of ... |
|
|
Invention
|
Apparatuses for backside wafer processing with edge-only wafer contact.
Semiconductor processing... |
|
2022
|
Invention
|
Systems and methods for central frequency tuning.
Systems and methods for central frequency tuni... |
|
|
Invention
|
Method to control etch profile by rf pulsing.
A method for performing a plasma etch process is p... |
|
|
G/S
|
Components for pulsed laser deposition machines for use in the manufacture of semiconductors, nam... |
|
|
Invention
|
Undercoating coverage and resistance control for escs of substrate processing systems.
An electr... |
|
|
Invention
|
Composition mixture control of efem environment.
A composition mixture control system for an equ... |
|
|
Invention
|
Methods and formulations for sacrificial bracing, surface protection, and queue-time management u... |
|
|
Invention
|
Atomic layer etching using boron trichloride.
Methods and apparatuses for etching materials usin... |
|
|
Invention
|
Electrode-dielectric nozzle for plasma processing.
Systems and device for removing edge bead acc... |
|
|
Invention
|
Compact gas separator devices co-located on substrate processing systems.
A gas separator device... |
|
|
Invention
|
Apparatuses for radiative heating of an edge region of a semiconductor wafer.
Provided herein ar... |
|
|
Invention
|
Transformer coupled plasma source design for thin dielectric film deposition.
An apparatus, comp... |
|
|
Invention
|
Monitoring and control of plasma-based processes.
An apparatus comprises a vacuum chamber with a... |
|
|
Invention
|
High selectivity doped hardmask films.
The present disclosure relates to high selectivity doped ... |
|
|
G/S
|
Components for semiconductor manufacturing machines, namely,
electrodes, calibrators, actuators,... |
|
2021
|
G/S
|
Components of equipment for the manufacture, processing, and
fabrication of semiconductors, name... |
|
|
Invention
|
Inlet adapter component |
