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2025
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P/S
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Rental of semiconductor manufacturing machines; rental of semiconductor substrates manufacturing ... |
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P/S
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Semiconductor manufacturing machines; semiconductor
substrates manufacturing machines; semicondu... |
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P/S
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Semiconductor manufacturing machines; Semiconductor substrates manufacturing machines; Semiconduc... |
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Invention
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Rf pulsing within pulsing for semiconductor rf plasma processing.
A system and method for genera... |
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Invention
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Method of cleaning chamber components with metal etch residues.
A method of cleaning residue con... |
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Invention
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Methods and systems for managing byproduct material accumulation during plasma-based semiconducto... |
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Invention
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Coolant channel with internal fins for substrate processing pedestals.
A baseplate for a substra... |
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Invention
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Downstream exhausting of gases during maintenance of substrate processing chambers. An exhaust sy... |
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Invention
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Reactive ion beam etch to reduce line-space pattern line width roughness and photoresist loss. Me... |
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Invention
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Systems and methods for recovering rf energy using modular resonant circuits. Systems and methods... |
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Invention
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Molybdenum deposition. Methods and related apparatus for deposition of molybdenum-containing film... |
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Invention
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Rotational indexers with wafer centering capability. Rotational indexers are provided that allow ... |
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Invention
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Selective etch of stack using a hydrogen chloride gas and fluorine containing gas. A method of et... |
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Invention
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Liquid sensors for substrate processing systems. A sensor includes a first layer of a first insul... |
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Invention
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Multizone showerhead for semiconductor processing. Multi-zone showerheads featuring multiple gas ... |
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Invention
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Coolant flow control system for substrate supports. A system comprises a substrate support compri... |
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Invention
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Etching of a bottle-shaped feature. One example provides a method of etching a feature a material... |
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Invention
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Systems and methods for creating an iedf using a non-sinusoidal generator. An ion energy distribu... |
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Invention
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Hybrid plasma chamber with split top electrode to reduce ion tilting and plasma non-uniformity. A... |
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Invention
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Cyclic directional/isotropic etch. Examples are disclosed that relate to controlling a width of a... |
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Invention
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Fluidic disconnect for semiconductor processing. Fluidic disconnects and apparatuses are provided... |
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Invention
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Process navigator for doe results checking in virtual fabrication platform. Techniques for viewin... |
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Invention
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Conversion of organometal films using oxidants for beol metallization. Methods and apparatuses fo... |
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Invention
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Etch and deposition of substrate bevel edge region by tuning gas introduction via pez rings. A fi... |
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Invention
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Reacting radical species with undeposited film precursor. Examples are disclosed that relate to s... |
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Invention
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Coating surfaces within a pumping path of a processing tool. Systems and methods are disclosed fo... |
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Invention
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Utilizing infrared data for control of fabrication processes. Techniques for utilizing infrared d... |
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Invention
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Pulsed dc systems and methods for controlling etch rate using an lc circuit. A system includes a ... |
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Invention
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Passivation for selective etching semiconductor materials. Methods and apparatuses for selectivel... |
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Invention
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Provision of rf signals to a multi-station fabrication chamber. Techniques for provision of RF si... |
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Invention
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Dual backside gas supply system. A gas supply system external to a processing chamber includes a ... |
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Invention
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Cooling sleeve for processing tool valve. One example provides a processing tool comprising a poi... |
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Invention
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Metallization precursors and onboard combinatorial chemical synthesis. Methods and apparatuses fo... |
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Invention
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Selective etch of stack using a nitrogen and fluorine containing gas. A method of etching recesse... |
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Invention
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Cryogenic etch using acid forming gas. A method of etching recessed features in a stack is provid... |
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Invention
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Carbon film deposition using plasma power modulation. Examples are disclosed that relate to using... |
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P/S
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Recorded computer simulation software for modeling
semiconductor manufacturing; recorded compute... |
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Invention
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Confinement ring with tapered bottom slots and side slots. A confinement ring structure includes ... |
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Invention
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Showerhead for supplying metastable activated radicals. A gas distribution device includes a gas ... |
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Invention
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Durable backside layer of a semiconductor substrate. Methods and apparatus for deposition of a ba... |
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Invention
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An assembly for a semiconductor processing chamber with an aluminum nitride containing gasket. A ... |
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Invention
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Moveable edge ring designs.
An edge ring is configured to be raised and lowered relative to a su... |
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P/S
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Recorded computer simulation software for modeling semiconductor manufacturing; Recorded computer... |
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2024
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P/S
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Pure non-metallic silicon sold in ingots, slices, loose
aggregate chunks; silicon; silicon carbi... |
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P/S
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Chemicals for use in industry and science; chemicals for use
in the semiconductor industry; chem... |
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P/S
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Chemicals for use in industry and science; Chemicals for use in the semiconductor industry; Chemi... |
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Invention
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Shower head |
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2023
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P/S
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Computer services, namely, providing on-line facilities for
real-time interaction with other com... |
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P/S
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Recorded computer software comprising a library of 3d models
and design tools for computer aided... |
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P/S
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Consultation services in the field of software for designing
and manufacturing semiconductors an... |
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Invention
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Refractory components for a semiconductor processing chamber.
A component for use in a semicondu... |
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Invention
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Backside layer for a semiconductor substrate.
A composite nanocrystalline silicon layer can be f... |
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P/S
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Computer hardware and recorded software systems for the installation, operation, maintenance, and... |
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Invention
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Apparatus and method for modulating spatial distribution of plasma and ion energy using frequency... |
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Invention
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Parasitic plasma suppressor.
A parasitic plasma suppressor configured to suppress (or at least r... |
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Invention
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Deposition and etch of silicon-containing layer.
A silicon-based film is conformally deposited i... |
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Invention
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Plasma enhanced low temperature atomic layer deposition of metals.
Provided are reduced-temperat... |
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Invention
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Systems and methods for calibrating rf generators in a simultaneous manner.
Systems and methods ... |
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Invention
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Integrated high aspect ratio etching.
Methods for etching features into carbon material using a ... |
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P/S
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Ceramic parts for machines; parts for machines for the
deposition of materials; ceramic tools fo... |
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Invention
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Metal-oxide varistor (mov) based surge protection circuit for plasma processing chamber.
A syste... |
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Invention
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Chucking system with silane coupling agent.
A chuck system for supporting a substrate in a plasm... |
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P/S
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Recorded computer software for designing and manufacturing semiconductors and micro-electro- mech... |
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P/S
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Computer services, namely, providing on-line facilities for real-time interaction with other comp... |
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P/S
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Recorded virtual reality and augmented reality software for the design, development, manufacture,... |
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P/S
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Consultation services in the field of software for designing and manufacturing semiconductors and... |
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P/S
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Ceramic tools for semiconductor manufacturing machines, semiconductor substrates manufacturing ma... |
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Invention
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Method for depositing highly doped aluminum nitride piezoelectric material.
The invention relate... |
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2022
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P/S
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Components for pulsed laser deposition machines for use in the manufacture of semiconductors, nam... |
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P/S
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Components for semiconductor manufacturing machines, namely,
electrodes, calibrators, actuators,... |
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2021
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P/S
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Components of equipment for the manufacture, processing, and
fabrication of semiconductors, name... |
