|
2025
|
P/S
|
Semiconductor manufacturing machines; Semiconductor substrates manufacturing machines; Semiconduc... |
|
|
P/S
|
Recorded computer simulation software for modeling
semiconductor manufacturing; recorded compute... |
|
|
P/S
|
Semiconductor manufacturing machines; semiconductor
substrates manufacturing machines; semicondu... |
|
|
Invention
|
Matchless plasma source for semiconductor wafer fabrication.
A matchless plasma source is descri... |
|
|
Invention
|
Plasma-enhanced atomic layer deposition with radio-frequency power ramping.
Methods and apparatu... |
|
|
Invention
|
Methods for making euv patternable hard masks.
Methods for making thin-films on semiconductor su... |
|
|
Invention
|
System, method, and user interface for edge ring wear compensation.
A method for adjusting a hei... |
|
|
Invention
|
Carbon based depositions used for critical dimension control during high aspect ratio feature etc... |
|
|
Invention
|
Atomic layer etching for subtractive metal etch.
A method for atomic layer etching a metal conta... |
|
|
Invention
|
Process control for ion energy delivery using multiple generators and phase control.
A method fo... |
|
|
Invention
|
Systems and methods for pulse width modulated dose control.
A substrate processing system for tr... |
|
|
P/S
|
Recorded computer simulation software for modeling semiconductor manufacturing; Recorded computer... |
|
|
Invention
|
High power cable for heated components in rf environment.
A cable and filter system for a substr... |
|
2024
|
Invention
|
Collaborative robot system on a mobile cart with a chamber docking system.
A robot system for se... |
|
|
Invention
|
Integrated process for metallization. are provided herein. Apparatuses for integrating the metall... |
|
|
Invention
|
Inert anode and electrolyte control. Discussed herein are techniques for electroplating metal ont... |
|
|
Invention
|
Systems and apparatus for processing 200 mm wafers in equipment configured for processing 300 mm ... |
|
|
Invention
|
Active divert pressure tuning. An apparatus for semiconductor processing including a junction poi... |
|
|
Invention
|
Tunable selective lateral etch of silicon using radical species. A method for selectively etching... |
|
|
Invention
|
Particle mitigation by purging. Purging of flow paths to remove particle defects includes chargin... |
|
|
Invention
|
Methods and tools for etching titanium-containing films. Examples are disclosed that relate to et... |
|
|
Invention
|
Stress tuning of molybdenum. Methods and apparatuses for tuning stress of molybdenum films during... |
|
|
Invention
|
Use of perfluoroalkyl substance-free heat transfer fluids in substrate processing tools. Examples... |
|
|
Invention
|
Bow control of high aspect ratio features during cryogenic etch. Methods and apparatus for etchin... |
|
|
Invention
|
Cooled edge ring with securing mechanism. A substrate support for a substrate processing chamber ... |
|
|
Invention
|
Systems and methods for achieving ion energy distribution. Systems and methods for achieving an e... |
|
|
Invention
|
In-situ carbon liner for improved high aspect ratio etch with bow control. A method of etching re... |
|
|
Invention
|
Systems and methods for energy recovery and resonant hv switching with voltage balancing. A modul... |
|
|
Invention
|
Cyclic etching between deposition cycles. A method for filling a recessed feature on a substrate ... |
|
|
Invention
|
Multi-operational soft bod y vine robot. The present disclosure relates a soft body vine robot th... |
|
|
Invention
|
In-situ process monitoring of photoresist using optical sensor. An optical sensor system performs... |
|
|
Invention
|
Systems and methods for orthogonal control of ion energy for har etching. Systems and methods for... |
|
|
Invention
|
Shield for plasma chambers. A shield for a processing chamber includes a body. The body includes ... |
|
|
Invention
|
Liner assembly for substrate processing chambers. A liner assembly for a processing chamber inclu... |
|
|
Invention
|
Ceramic top plate with an annular projection to protect a seal ring and a bonding layer of a subs... |
|
|
Invention
|
Forming aluminum nitride coating on aluminum-containing metal. One example provides a method of f... |
|
|
Invention
|
Liquid cooled ceramic window for inductively coupled plasma processing systems. A liquid cooled c... |
|
|
Invention
|
Azimuthal edge ring control to improve residual non-uniformity near substrate edges. A substrate ... |
|
|
Invention
|
Fractal showerhead for flow uniformity. A showerhead is described. The showerhead includes a gas ... |
|
|
P/S
|
Pure non-metallic silicon sold in ingots, slices, loose
aggregate chunks; silicon; silicon carbi... |
|
|
Invention
|
Assembled window for processing chamber. A dielectric window assembly for use in a plasma process... |
|
|
Invention
|
Gas distribution plate assembly for semiconductor processing chamber. A gas distribution plate as... |
|
|
P/S
|
Chemicals for use in industry and science; chemicals for use
in the semiconductor industry; chem... |
|
|
P/S
|
Chemicals for use in industry and science; Chemicals for use in the semiconductor industry; Chemi... |
|
2023
|
P/S
|
Computer services, namely, providing on-line facilities for
real-time interaction with other com... |
|
|
P/S
|
Consultation services in the field of software for designing
and manufacturing semiconductors an... |
|
|
P/S
|
Recorded computer software comprising a library of 3d models
and design tools for computer aided... |
|
|
P/S
|
Computer hardware and recorded software systems for the installation, operation, maintenance, and... |
|
|
P/S
|
Ceramic parts for machines; parts for machines for the
deposition of materials; ceramic tools fo... |
|
|
P/S
|
Recorded virtual reality and augmented reality software for the design, development, manufacture,... |
|
|
P/S
|
Computer services, namely, providing on-line facilities for real-time interaction with other comp... |
|
|
P/S
|
Recorded computer software for designing and manufacturing semiconductors and micro-electro- mech... |
|
|
P/S
|
Consultation services in the field of software for designing and manufacturing semiconductors and... |
|
|
Invention
|
Spark plasma sintered component for cryo-plasma processing.
An apparatus for plasma processing a... |
|
|
Invention
|
Low-k dielectric protection during plasma deposition of silicon nitride.
Methods and apparatuses... |
|
|
Invention
|
Seam-free and crack-free deposition.
Methods and apparatuses for depositing material into featur... |
|
|
Invention
|
Sidewall passivation using aldehyde or isocyanate chemistry for high aspect ratio etch.
Various ... |
|
|
Invention
|
Showerhead for substrate processing systems.
A dual-plenum showerhead for a substrate processing... |
|
|
Invention
|
Encapsulated compression washer for bonding ceramic plate and metal baseplate of electrostatic ch... |
|
|
Invention
|
Low resistance molybdenum deposition for logic source/drain contacts.
Provided is an efficient m... |
|
|
Invention
|
Selective precision etching of semiconductor materials.
Various embodiments described herein rel... |
|
|
Invention
|
Balun transformer with enhanced rf coupling embedded in high-strength dielectric materials.
A ba... |
|
|
P/S
|
Ceramic tools for semiconductor manufacturing machines, semiconductor substrates manufacturing ma... |
|
2022
|
P/S
|
Components for pulsed laser deposition machines for use in the manufacture of semiconductors, nam... |
|
|
Invention
|
Machine vision inspection of wafer processing tool.
Examples are disclosed that relate to diagno... |
|
|
Invention
|
Deposition of molybdenum.
Provided herein are methods of depositing molybdenum (Mo) films. The m... |
|
|
P/S
|
Components for semiconductor manufacturing machines, namely,
electrodes, calibrators, actuators,... |
|
2021
|
P/S
|
Components of equipment for the manufacture, processing, and
fabrication of semiconductors, name... |
|
|
Invention
|
Low resistivity contacts and interconnects.
Metallization schemes involve atomic layer depositio... |
