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2025
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P/S
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Semiconductor manufacturing machines; Semiconductor substrates manufacturing machines; Semiconduc... |
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P/S
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Semiconductor manufacturing machines; semiconductor
substrates manufacturing machines; semicondu... |
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Invention
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Methods and systems for managing byproduct material accumulation during plasma-based semiconducto... |
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Invention
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Coolant channel with internal fins for substrate processing pedestals.
A baseplate for a substra... |
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Invention
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Substrate location detection and adjustment.
Systems and methods are provided for positioning a ... |
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Invention
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Methods and apparatus for controlling plasma in a plasma processing system.
Methods and apparatu... |
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Invention
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Underlayer for photoresist adhesion and dose reduction.
This disclosure relates generally to a p... |
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Invention
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Process navigator for doe results checking in virtual fabrication platform. Techniques for viewin... |
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Invention
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Reacting radical species with undeposited film precursor. Examples are disclosed that relate to s... |
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Invention
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Coating surfaces within a pumping path of a processing tool. Systems and methods are disclosed fo... |
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Invention
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Etch and deposition of substrate bevel edge region by tuning gas introduction via pez rings. A fi... |
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Invention
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Utilizing infrared data for control of fabrication processes. Techniques for utilizing infrared d... |
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Invention
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Pulsed dc systems and methods for controlling etch rate using an lc circuit. A system includes a ... |
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Invention
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Passivation for selective etching semiconductor materials. Methods and apparatuses for selectivel... |
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Invention
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Provision of rf signals to a multi-station fabrication chamber. Techniques for provision of RF si... |
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Invention
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Dual backside gas supply system. A gas supply system external to a processing chamber includes a ... |
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Invention
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Cooling sleeve for processing tool valve. One example provides a processing tool comprising a poi... |
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Invention
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Metallization precursors and onboard combinatorial chemical synthesis. Methods and apparatuses fo... |
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Invention
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Selective etch of stack using a nitrogen and fluorine containing gas. A method of etching recesse... |
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Invention
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Cryogenic etch using acid forming gas. A method of etching recessed features in a stack is provid... |
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Invention
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Monitoring and detection of transient phenomena. Methods and apparatus for detecting a transient ... |
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Invention
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Carbon film deposition using plasma power modulation. Examples are disclosed that relate to using... |
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P/S
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Recorded computer simulation software for modeling
semiconductor manufacturing; recorded compute... |
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Invention
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Confinement ring with tapered bottom slots and side slots. A confinement ring structure includes ... |
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Invention
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Thermal interface material for substrate processing systems. A thermal interface material for com... |
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Invention
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Passivation for etching of semiconductor materials with seam-like defects. An apparatus for proce... |
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Invention
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Monitoring substrate properties by transmitting laser light through a ceramic layer of an electro... |
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Invention
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Showerhead for supplying metastable activated radicals. A gas distribution device includes a gas ... |
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Invention
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Multi-state rf pulsing to control mask shape and breaking selectivity versus process margin trade... |
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Invention
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Voltage control for semiconductor fabrication equipment. Disclosed herein are techniques, systems... |
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Invention
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Methods and apparatus for distortion and bow compensation. Methods and apparatus for mitigating d... |
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Invention
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Mold stack for high aspect ratio plasma etching. A mold stack may include a mask, one or more mol... |
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Invention
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Durable backside layer of a semiconductor substrate. Methods and apparatus for deposition of a ba... |
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Invention
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Temperature control of substrate processing chamber plates using pwm to analog converters and pro... |
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Invention
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Semiconductor processing techniques configured for use of a flexible and malleable temperature pr... |
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Invention
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Edge ring carriers for semiconductor processing. Ring storage carrier and ring storage buffers fo... |
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Invention
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Methods to enhance glass substrate handling in semiconductor processing. Certain embodiments pert... |
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Invention
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An assembly for a semiconductor processing chamber with an aluminum nitride containing gasket. A ... |
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Invention
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Moveable edge ring designs.
An edge ring is configured to be raised and lowered relative to a su... |
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P/S
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Recorded computer simulation software for modeling semiconductor manufacturing; Recorded computer... |
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2024
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P/S
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Pure non-metallic silicon sold in ingots, slices, loose
aggregate chunks; silicon; silicon carbi... |
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P/S
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Chemicals for use in industry and science; chemicals for use
in the semiconductor industry; chem... |
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P/S
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Chemicals for use in industry and science; Chemicals for use in the semiconductor industry; Chemi... |
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2023
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P/S
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Computer services, namely, providing on-line facilities for
real-time interaction with other com... |
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P/S
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Recorded computer software comprising a library of 3d models
and design tools for computer aided... |
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P/S
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Consultation services in the field of software for designing
and manufacturing semiconductors an... |
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Invention
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Refractory components for a semiconductor processing chamber.
A component for use in a semicondu... |
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P/S
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Computer hardware and recorded software systems for the installation, operation, maintenance, and... |
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Invention
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Parasitic plasma suppressor.
A parasitic plasma suppressor configured to suppress (or at least r... |
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Invention
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Deposition and etch of silicon-containing layer.
A silicon-based film is conformally deposited i... |
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Invention
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High aspect ratio etch with a metal or metalloid containing mask.
A method for etching features ... |
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Invention
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Tin precursors for deposition of euv dry resist.
The present disclosure relates to precursor com... |
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P/S
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Ceramic parts for machines; parts for machines for the
deposition of materials; ceramic tools fo... |
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Invention
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Substrate temperature control with integrated thermoelectric cooling system.
A temperature contr... |
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Invention
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Chucking system with silane coupling agent.
A chuck system for supporting a substrate in a plasm... |
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P/S
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Recorded computer software for designing and manufacturing semiconductors and micro-electro- mech... |
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P/S
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Recorded virtual reality and augmented reality software for the design, development, manufacture,... |
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P/S
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Computer services, namely, providing on-line facilities for real-time interaction with other comp... |
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P/S
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Consultation services in the field of software for designing and manufacturing semiconductors and... |
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Invention
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Rf and dc frequency and phase locked pulsed edge tilt control system.
A method performed within ... |
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Invention
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Water-based pretreatment for photoresist scum removal.
Described herein are methods, apparatus, ... |
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Invention
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Underlayer with bonded dopants for photolithography.
Examples are disclosed that relate to use o... |
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Invention
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Window edge heater for high power plasma processing applications.
A window support system for a ... |
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Invention
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Nonconformal oxide film deposition using carbon-containing inhibitor.
Examples are disclosed tha... |
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Invention
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Conformal copper deposition on thin liner layer.
Various embodiments described herein relate to ... |
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P/S
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Ceramic tools for semiconductor manufacturing machines, semiconductor substrates manufacturing ma... |
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2022
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P/S
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Components for pulsed laser deposition machines for use in the manufacture of semiconductors, nam... |
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Invention
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Threaded nozzle insert |
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P/S
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Components for semiconductor manufacturing machines, namely,
electrodes, calibrators, actuators,... |
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2021
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P/S
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Components of equipment for the manufacture, processing, and
fabrication of semiconductors, name... |
