2025
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P/S
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Semiconductor manufacturing machines; Semiconductor substrates manufacturing machines; Semiconduc... |
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P/S
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Recorded computer simulation software for modeling semiconductor manufacturing; Recorded computer... |
2024
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P/S
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Semiconductor manufacturing machines; semiconductor
substrates manufacturing machines; semicondu... |
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P/S
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Pure non-metallic silicon sold in ingots, slices, loose
aggregate chunks; silicon; silicon carbi... |
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Invention
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Vacuum-integrated hardmask processes and apparatus.
Vacuum-integrated photoresist-less methods a... |
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Invention
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Systems and methods for extracting process control information from radiofrequency supply system ... |
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Invention
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Identification of and compensation for a failure in a heater array.
Systems and methods for iden... |
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Invention
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Pedestal polishing apparatus.
A cleaning apparatus for a vacuum pedestal and method of cleaning ... |
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Invention
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Tunable esc for rapid alternating process applications.
A substrate support for a substrate proc... |
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Invention
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Showerhead faceplates with angled gas distribution passages for semiconductor processing tools.
... |
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Invention
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Cross flow conduit for foaming prevention in high convection plating cells.
The embodiments here... |
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Invention
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Method for providing doped silicon using a diffusion barrier layer.
A method for doping a substr... |
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Invention
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Collapsible impeller wire frames for blood pump.
An alignment device is provided to draw two com... |
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P/S
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Chemicals for use in industry and science; chemicals for use
in the semiconductor industry; chem... |
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Invention
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Model-based scheduling for substrate processing systems.
For etching tools, a neural network mod... |
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Invention
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Atomic layer etching using passivation and directional plasma. Examples are provided that relate ... |
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Invention
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Methods to improve thermal stability and film cracking margin for low temperature high tensile si... |
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Invention
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Chemical deposition system and method for deposition. A chemical deposition system includes a bac... |
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Invention
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Processing tool showerhead with integrated static mixer. Examples are disclosed that relate to st... |
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Invention
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Method for simultaneous selective deposition of both metal and dielectric films. Methods and appa... |
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Invention
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All-in-one dry development for metal-containing photoresist. 22 flash treatment; or thermal dry d... |
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Invention
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Molybdenum metallization and fill techniques for logic and memory. Provided herein are methods an... |
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Invention
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Improved plasma uniformity using a higher frequency signal to power an inner coil and a mixed sig... |
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Invention
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Processing chamber precoat with trapping layer and sealing layer. Examples are disclosed that rel... |
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Invention
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Electrostatic chuck with high-density plasma barrier coating. An electrostatic chuck comprises a ... |
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Invention
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Dielectric etch using unsaturated carbon containing components. A method of etching features in a... |
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Invention
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Deposition of metal-containing films using halogen-containing activator molecules. 2522). The pro... |
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Invention
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End effector and substrate transfer sequence for thick, heavy, and/or bowed substrates with limit... |
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P/S
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Chemicals for use in industry and science; Chemicals for use in the semiconductor industry; Chemi... |
2023
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P/S
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Computer services, namely, providing on-line facilities for
real-time interaction with other com... |
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P/S
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Recorded computer software comprising a library of 3d models
and design tools for computer aided... |
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P/S
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Consultation services in the field of software for designing
and manufacturing semiconductors an... |
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P/S
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Computer hardware and recorded software systems for the installation, operation, maintenance, and... |
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P/S
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Ceramic parts for machines; parts for machines for the
deposition of materials; ceramic tools fo... |
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P/S
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Computer services, namely, providing on-line facilities for real-time interaction with other comp... |
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P/S
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Recorded computer software comprising a library of 3d models and design tools for computer aided ... |
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P/S
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Consultation services in the field of software for designing and manufacturing semiconductors and... |
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P/S
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Ceramic tools for semiconductor manufacturing machines, semiconductor substrates manufacturing ma... |
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Invention
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A wafer chuck assembly with thermal insulation for rf connections.
Described is a wafer chuck as... |
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Invention
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Method and apparatus for radio frequency grid design in an esc to reduce film asymmetry.
Electro... |
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Invention
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Carbon mask deposition.
Examples are disclosed that relate to depositing a carbon mask to thicke... |
2022
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Invention
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Wafer transfer paddles with minimum contact area structures for reduced backside marking.
A wafe... |
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Invention
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Ald pulse sequence engineering for improved conformality for low temp precursors.
The present di... |
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Invention
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Method to smooth sidewall roughness and maintain reentrant structures during dielectric gap fill.... |
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Invention
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Multi-zone coatings on parts for galling prevention and high-temperature chemical stability.
Dis... |
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P/S
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Components for pulsed laser deposition machines for use in the manufacture of semiconductors, nam... |
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Invention
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Substrate processing tool with high-speed match network impedance switching for rapid alternating... |
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Invention
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Aqueous acid development or treatment of organometallic photoresist.
The present disclosure rela... |
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Invention
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Development of hybrid organotin oxide photoresists.
The present disclosure relates to a film for... |
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Invention
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Large grain tungsten growth in features.
Methods of filling a feature with large grain tungsten ... |
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Invention
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Improved thermal and electrical interface between parts in an etch chamber.
An assembly for a pr... |
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Invention
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Valve systems for balancing gas flow to multiple stations of a substrate processing system.
A su... |
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Invention
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Feature fill with nucleation inhibition.
Provided herein are methods of filling features with me... |
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Invention
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Method for reducing variations in mask topography.
A patterning method includes etching a mask f... |
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Invention
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Soaking and esc clamping sequence for high bow substrates.
A method for processing a substrate c... |
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Invention
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Low temperature molybdenum deposition assisted by silicon-containing reactants.
Molybdenum-conta... |
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Invention
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Conformal deposition of silicon nitride.
High quality silicon nitride (silicon nitride character... |
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Invention
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Multiple-zone gas box block surface heater.
A gas conditioning apparatus comprising a substrate ... |
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Invention
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Direct-pick robot for multi-station semiconductor processing chambers.
Disclosed herein are dire... |
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Invention
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Deposition of high compressive stress thermally stable nitride film.
A high-stress, thermally-st... |
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Invention
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Showerhead faceplate configurations.
A showerhead for processing a substrate comprises a backpla... |
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Invention
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Nesting atmospheric robot arms for high throughput.
Nesting wafer handling robot arms are provid... |
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Invention
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Substrate processing tool with rapid and selective control of partial pressure of water vapor and... |
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Invention
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Microchannel assembly cooled power circuits for power boxes of substrate processing systems.
A c... |
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Invention
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A method and apparatus for enhancing ion energy and reducing ion energy spread in an inductively ... |
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P/S
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Components for semiconductor manufacturing machines, namely,
electrodes, calibrators, actuators,... |
2021
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P/S
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Components of equipment for the manufacture, processing, and
fabrication of semiconductors, name... |
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P/S
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Components for semiconductor manufacturing machines, namely, electrodes, pedestals in the nature ... |