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2025
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Invention
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Repair process for clear defects on euv psm masks.
The present disclosure relates to a method of... |
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Invention
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Lithography system and method for operating a lithography system.
A lithography system comprises... |
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Invention
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Method of determination of optical properties of an optical system.
A method of determining opti... |
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Invention
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Lithography apparatus and method for operating a lithography apparatus.
A lithography apparatus ... |
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Invention
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Imaging euv optical unit for imaging an object field into an image field.
An imaging EUV optical... |
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Invention
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Method for producing a mems mirror array, and mems mirror array.
A method for producing a MEMS m... |
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Invention
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Optical system, in particular for microlithography, and method for operating an optical system.
... |
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G/S
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Laser system for correcting distortion of wafers comprised
of lasers for measuring and optical s... |
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Invention
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Measuring module for determining the position of a component in an optical system for microlithog... |
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Invention
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Adaptive optical element having an insertion element.
An adaptive optical element for a microlit... |
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Invention
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Method for the interferometric determination of the surface shape of a test object.
Methods for ... |
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Invention
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Creating an electric field when processing a lithography object.
The invention relates to intera... |
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Invention
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Optical modules for the ultraviolet wavelength range.
This disclosure relates to an optical modu... |
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Invention
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Sample preparation for charged particle beam imaging.
A method of preparing a sample for charged... |
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Invention
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Adaptive optical module for a microlithographic projection exposure apparatus.
An adaptive optic... |
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G/S
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3D X-ray inspection and metrology tool in the field of
semiconductor measurement and control sol... |
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Invention
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Method for producing an optical test element for determining an accuracy of an optical surface. T... |
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Invention
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Apparatus for inspecting an object pertaining to euv semiconductor technology. The invention rela... |
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Invention
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Optical assembly. An optical assembly (17) has a primary optical bar (28) for guiding illuminatio... |
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Invention
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Device for pivoting an optical component into a beam path of a system for semiconductor technolog... |
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Invention
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Workpiece for a semiconductor technology system, system for semiconductor technology, method for ... |
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Invention
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Device for accommodating optical elements.
The invention relates to a device for accommodating o... |
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Invention
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Optical measuring arrangement for recording distances. Optical measuring arrangement for recordin... |
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Invention
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Method for operating a mask inspection device, control system for a mask inspection device, mask ... |
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Invention
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Illumination light guide, illumination optics unit and inspection apparatus.
An illumination lig... |
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Invention
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Method for analysing a mask for lithography.
A method for analysing a mask for lithography, comp... |
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Invention
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Method of operating a dual beam device and corresponding apparatus. A method of operating a charg... |
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Invention
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Mask inspection device and method for adjusting a mask inspection device.
A mask inspection devi... |
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Invention
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Optical hollow waveguide assembly, illumination optics unit and inspection apparatus.
An optical... |
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Invention
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Method for re-training a machine learning model for defect detection in an image of a photolithog... |
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Invention
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Control device, optical system, and lithography installation. The invention relates to a control ... |
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Invention
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Element for use in a microelectromechanical system, and microelectromechanical system. The invent... |
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Invention
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Optical element including at least one smoothing layer and optical arrangement. The invention rel... |
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Invention
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Simulation-based defect and repair shape determination for an object for lithography. A method fo... |
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Invention
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Method for reducing a long-term change in a form, optical element and system for semiconductor te... |
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Invention
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Method for adjusting the focus level of an image of an object comprising integrated circuit patte... |
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Invention
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Method for detecting defects in a photolithography mask from an aerial image.
The invention rela... |
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Invention
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Method and system for detecting printing defects in a photolithography mask.
A method for detect... |
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Invention
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Method and system for evaluating the quality of a photolithography mask. The invention relates to... |
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Invention
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Optical element for reflection of radiation in the vuv wavelength region.
An optical element for... |
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Invention
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Temperature-control device for controlling the temperature of a position-sensitive component of a... |
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Invention
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Optical system and projection exposure apparatus. An optical system (100, 100A, 100B) for a proje... |
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Invention
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Achromatic imaging optical unit. An achromatic imaging optical unit (20) serves for imaging a sou... |
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Invention
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3d inspection of buried regions of interest with reduced milling artefacts. A wafer inspection sy... |
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Invention
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Optical hollow waveguide component. An optical hollow waveguide component (25), in particular for... |
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Invention
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Method for electron beam processing of a surface, optical component, semiconductor technology sys... |
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Invention
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Optical system, projection exposure system, and method. The invention relates to an optical syste... |
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Invention
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Optical assembly with porous particle capture structure and semiconductor system. The invention r... |
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Invention
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Add-on part, optical element and semiconductor technology system. The invention relates to an add... |
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G/S
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Instruments and applications for the correction of wafer forms, namely, semiconductor wafer proce... |
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G/S
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instruments and applications for the correction of wafer forms; laser system to correct distorsio... |
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G/S
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3D X-ray inspection and metrology tool in the nature of an industrial x-ray apparatus in the fiel... |
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G/S
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3D X-ray inspection and metrology tool in the field of semiconductor measurement and control solu... |
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2024
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G/S
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Applications and instruments in the field of semiconductor
measurement and inspection solutions ... |
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G/S
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Applications and instruments in the field of semiconductor
measurement and inspection solutions. |
|
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Invention
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Tdi camera synchronization for mask inspection system. An apparatus for inspection of a sample, t... |
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G/S
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applications and instruments in the field of semiconductor measurement and inspection solutions. |
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G/S
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Electro-optical instruments for use in inspection and measurement of industrial components, namel... |
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G/S
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Downloadable computer application software for use in semiconductor measurement and semiconductor... |
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2022
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G/S
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Recorded data; web applications and server software;
utility, security and cryptographic softwar... |
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2020
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G/S
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Focused ion beam workstations, comprising of scanning ion and electron microscopes, computer soft... |
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G/S
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Focused ion beam systems/instruments for scientific
purposes; software for focused ion beam syst... |
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G/S
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Focused ion beam apparatus comprised of computer hardware and recorded computer software to perfo... |
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G/S
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Software platform for the visualization and analysis of
semiconductor image data. |
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G/S
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Apparatus and instruments for aerial photogrammetry of
lithography photomasks in the field of se... |
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2019
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G/S
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Apparatus and instruments for aerial photogrammetry of lithography photomasks in the field of sem... |
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2018
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G/S
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Microscopes and parts thereof; x-ray microscopes and parts thereof; downloadable software used fo... |
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2014
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G/S
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Maintenance, repairing, installation and replacement of
hardware for semiconductor equipment. Ma... |
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G/S
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Installation, maintenance and repair of semiconductor equipment for others; replacement of worn o... |
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G/S
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Server for linking instruments used in the semiconductor field and for analyzing and evaluating d... |
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G/S
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Computer server for linking instruments used in the
semiconductor field and for analyzing and ev... |
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2011
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G/S
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Laser apparatus for correcting the precision in the position
of photomask structures. |
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2009
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G/S
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Optical inspection apparatus, namely, semiconductor mask inspection apparatus and parts thereof |
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G/S
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Mask inspection systems. |
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2008
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G/S
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measuring instruments to measure positions of structures on photomasks; computer software for use... |
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2005
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G/S
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Apparatus for repair of masks used for manufacturing
semi-conductor structures and their parts (... |
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G/S
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mask repair tools used in the semiconductor industry |
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2002
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G/S
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Optical apparatus and instruments, lenses for the semiconductor industry, apparatus and instrumen... |
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1998
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G/S
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Optical apparatus and instruments; objectives. Lighting devices. |
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1997
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G/S
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lens objectives for use with wafersteppers and illuminators |
