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2025
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P/S
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3D X-ray inspection and metrology tool in the field of
semiconductor measurement and control sol... |
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Invention
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Euv optics module for an euv projection exposure apparatus.
An EUV optics module (35) for an EUV... |
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Invention
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Projection exposure apparatus with manipulators.
A microlithographic projection exposure apparat... |
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Invention
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Assembly for an optical system.
An assembly for an optical system having a mirror array having a... |
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Invention
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Editing of deep, multi-layered structures.
An improved system and method for circuit edit or rep... |
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Invention
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Production control method for a projection exposure apparatus, projection exposure apparatus, and... |
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Invention
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Sensor fusion for thin film segmentation.
Certain examples provide methods of performing semicon... |
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Invention
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Mirror element, lithography system, and method for providing a mirror element.
A mirror element ... |
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Invention
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Optical system and lithography apparatus having an optical system.
An optical system for a litho... |
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Invention
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Adaptive mirror with mechanical mediator layer and microlithographic projection exposure apparatu... |
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P/S
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Instruments and applications for the correction of wafer forms; laser system to correct distorsio... |
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Invention
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Optical system, and method for operating an optical system.
An optical system, such as in a micr... |
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P/S
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instruments and applications for the correction of wafer forms; laser system to correct distorsio... |
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Invention
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Computer implemented method for the detection of defects in an imaging dataset of an object compr... |
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Invention
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Method and apparatus for segmentation of semiconductor inspection images.
A method for segmentat... |
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Invention
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Contact area size determination between 3d structures in an integrated semiconductor sample.
A m... |
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Invention
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Method to obtain information to control a manufacturing process for a stacked semiconductor devic... |
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Invention
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Mirror, in particular for a microlithographic projection exposure apparatus, and method of proces... |
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Invention
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Method for operating an optical component, and optical component.
A method of operating an optic... |
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Invention
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Method and device for forming a fluoride or oxylfluoride layer for an optical element for the vuv... |
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Invention
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Cooling device for cooling a position-sensitive component of a lithography system.
A cooling dev... |
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P/S
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3D X-ray inspection and metrology tool in the field of semiconductor measurement and control solu... |
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Invention
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Mirror device, for example for a microlithographic projection exposure system, and method for mea... |
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Invention
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Mirror device, projection objective and method for measuring the temperature of a mirror.
A mirr... |
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Invention
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Computer implemented method for defect detection in an imaging dataset of a wafer, corresponding ... |
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Invention
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Method for operating a projection exposure system.
In a method for operating a microlithographic... |
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Invention
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Optical element for a projection exposure system, optical system comprising same and projection e... |
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Invention
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Facet mirror, illumination optical unit, arrangement of a facet mirror, projection exposure appar... |
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Invention
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Method for regulating the temperature of an optical module for microlithography. A method for reg... |
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Invention
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Method for operating an optical system, and optical system.
A method for operating an optical sy... |
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Invention
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Contamination handling in metrology systems. The present disclosure relates to a metrology system... |
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Invention
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Method and apparatus for determining an optical reflectivity of a curved surface of an optical te... |
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Invention
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Reference image for distortion correction. The application relates to a method for generating dis... |
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Invention
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Measuring assembly for determining the position of a component. The invention relates to a measur... |
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Invention
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Method, device and computer program for determining and correcting a concentricity error when rot... |
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Invention
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Organohalogen precursors for particle beam-induced mask repair. The present invention relates, in... |
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Invention
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Measurement arrangement for determining the position of a movable component. A measurement arrang... |
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Invention
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Method for producing a substrate, an optical system, and a light source arrangement for a lithogr... |
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Invention
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Method and device for determining a topography contrast and/or a material contrast of a sample.
... |
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Invention
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Method and apparatus for atomic layer deposition of a fluoride layer, optical element and optical... |
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Invention
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Strut and optical system. The invention relates to a strut (134, 136, 200) for an optical system ... |
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Invention
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Assembly of a microlithographic projection system, a vacuum chamber and a wall element arranged i... |
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Invention
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Defect review of samples with un-patterned surface. A method for review of a plurality of anomali... |
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Invention
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Collector mirror and collector mirror assembly for lithography. A collector mirror (21) for litho... |
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Invention
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Optical system, lithography machine having an optical system, and method for producing an optical... |
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Invention
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Projection optical unit, and projection exposure system. The invention relates to a projection op... |
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Invention
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Apparatus and method for coating a substrate of an optical element. The invention relates to an a... |
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Invention
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Method for producing an optical imaging system for a microlithography system. In a method for pro... |
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Invention
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Method and system for producing a lithography apparatus or one of its components and/or for adjus... |
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2024
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Invention
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Screw transmission drive, and reticle stage and measuring device for semiconductor lithography ap... |
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Invention
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Residual gas analysis method and residual gas analysis system. auxiliary gasiii) for the residual... |
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P/S
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Applications and instruments in the field of semiconductor
measurement and inspection solutions ... |
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P/S
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Applications and instruments in the field of semiconductor
measurement and inspection solutions. |
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P/S
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applications and instruments in the field of semiconductor measurement and inspection solutions. |
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P/S
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Electro-optical instruments for use in inspection and measurement of industrial components, namel... |
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P/S
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Downloadable computer application software for use in semiconductor measurement and semiconductor... |
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Invention
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Euv multi-mirror arrangement.
An EUV multi-mirror arrangement comprises a multiplicity of mirror... |
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Invention
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Euv collector for use in an euv projection exposure apparatus.
An EUV collector (24) serves for ... |
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Invention
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Disturbance compensation for charged particle beam devices. Charged particle beam devices, e.g., ... |
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2022
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P/S
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Recorded data; web applications and server software;
utility, security and cryptographic softwar... |
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2020
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P/S
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Focused ion beam workstations, comprising of scanning ion and electron microscopes, computer soft... |
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P/S
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Focused ion beam systems/instruments for scientific
purposes; software for focused ion beam syst... |
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P/S
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Focused ion beam apparatus comprised of computer hardware and recorded computer software to perfo... |
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P/S
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Software platform for the visualization and analysis of
semiconductor image data. |
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P/S
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Apparatus and instruments for aerial photogrammetry of
lithography photomasks in the field of se... |
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2019
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P/S
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Apparatus and instruments for aerial photogrammetry of lithography photomasks in the field of sem... |
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2018
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P/S
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Microscopes and parts thereof; x-ray microscopes and parts thereof; downloadable software used fo... |
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2014
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P/S
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Maintenance, repairing, installation and replacement of
hardware for semiconductor equipment. Ma... |
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P/S
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Installation, maintenance and repair of semiconductor equipment for others; replacement of worn o... |
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P/S
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Server for linking instruments used in the semiconductor field and for analyzing and evaluating d... |
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P/S
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Computer server for linking instruments used in the
semiconductor field and for analyzing and ev... |
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2011
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P/S
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Laser apparatus for correcting the precision in the position
of photomask structures. |
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2009
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P/S
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Optical inspection apparatus, namely, semiconductor mask inspection apparatus and parts thereof |
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P/S
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Mask inspection systems. |
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2008
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P/S
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measuring instruments to measure positions of structures on photomasks; computer software for use... |
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2005
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P/S
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Apparatus for repair of masks used for manufacturing
semi-conductor structures and their parts (... |
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P/S
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mask repair tools used in the semiconductor industry |
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2002
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P/S
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Optical apparatus and instruments, lenses for the semiconductor industry, apparatus and instrumen... |
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1998
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P/S
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Optical apparatus and instruments; objectives. Lighting devices. |
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1997
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P/S
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lens objectives for use with wafersteppers and illuminators |
