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2024
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Invention
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Optical system for a plurality of primary beamlets, charged particle multi-beam apparatus and met... |
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Invention
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Electron beam apparatus, foil or grid lens, and method of operating an electron beam apparatus. A... |
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2023
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Invention
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Signal electron beam deflector for an electron beam apparatus, electron beam apparatus and method... |
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Invention
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Deflector for a charged particle beam apparatus, deflecting system, charged particle beam apparat... |
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Invention
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Method of characterizing a detection path of a charged particle beam and a charged particle mirro... |
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Invention
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Method of operating a charged particle beam apparatus, and charged particle beam apparatus.
A me... |
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Invention
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Detector device, electron beam apparatus, and method for inspecting and/or imaging a sample.
A d... |
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Invention
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Proximity-electrode, charged particle beam device and method for inspecting and/or imaging a samp... |
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Invention
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Electron beam apparatus, foil or grid lens, and method of operating an electron beam apparatus.
... |
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Invention
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Method of determining a beam convergence of a charged particle beam, and charged particle beam sy... |
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Invention
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Method of determining an energy spectrum or energy width of a charged particle beam, and charged ... |
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Invention
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Aberration corrector, a charged particle beam apparatus, a method of aligning an aberration corre... |
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Invention
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Charged particle optics, charged particle beam apparatus, and method for scanning a charged parti... |
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Invention
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Method of forming a multipole device, method of influencing an electron beam, and multipole devic... |
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2022
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Invention
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Charged particle beam column, charged particle beam chromatic aberration corrector, and method of... |
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Invention
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Lens for a charged particle beam apparatus, charged particle beam apparatus, and method of focusi... |
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Invention
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Charged particle beam system, corrector for aberration correction of a charged particle beam, and... |
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Invention
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Method of determining a brightness of a charged particle beam, method of determining a size of a ... |
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Invention
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Electron microscope, electron source for electron microscope, and methods of operating an electro... |
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Invention
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Magnetic multipole device, charged particle beam apparatus, and method of influencing a charged p... |
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Invention
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Method of determining the beam convergence of a focused charged particle beam, and charged partic... |
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Invention
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Aberration corrector and method of aligning aberration corrector. Provided is an aberration corre... |
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Invention
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Methods of determining aberrations of a charged particle beam, and charged particle beam system. ... |
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Invention
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Method of influencing a charged particle beam, multipole device, and charged particle beam appara... |
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Invention
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Charged particle beam apparatus, scanning electron microscope, and method of operating a charged ... |
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2021
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Invention
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Primary charged particle beam current measurement. It is provided a current measurement module (1... |
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Invention
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Charged particle beam apparatus and method of controlling sample charge. A charged particle beam ... |
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Invention
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Charged particle beam apparatus, multi-beamlet assembly, and method of inspecting a specimen. A c... |
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Invention
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Charged particle beam device and method for inspecting and/or imaging a sample. A charged particl... |
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Invention
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Charged particle beam manipulation device and method for manipulating charged particle beamlets. ... |
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Invention
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Method of operating a charged particle gun, charged particle gun, and charged particle beam devic... |
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2020
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Invention
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Primary charged particle beam current measurement. It is provided a current measurement module 10... |
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Invention
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Charged particle imaging system. A secondary charged particle imaging system comprising: a backsc... |
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Invention
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Electrode arrangement, contact assembly for an electrode arrangement, charged particle beam devic... |
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Invention
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Charged particle beam device with interferometer for height measurement. A method of operating a ... |
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2019
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Invention
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Beam blanking device for a multi-beamlet charged particle beam apparatus. A beam blanking device ... |
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Invention
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Secondary charged particle imaging system. A secondary charged particle imaging system comprising... |
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1990
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G/S
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testing devices for integrated circuits |
