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2026
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Invention
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Mark position measurement apparatus and mark position measurement method.
According to one aspec... |
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Invention
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Charged particle beam writing apparatus, drift amount calculation method, and charged particle be... |
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Invention
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Pattern inspection apparatus, focus position adjustment method, and pattern inspection method.
A... |
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Invention
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Beam writing method and beam writing device. The present invention provides a beam writing method... |
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Invention
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Stage mechanism, charged particle beam irradiation apparatus, and charged particle beam irradiati... |
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Invention
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Electron beam irradiation apparatus and contact point conductivity inspection method.
According ... |
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Invention
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Dose information correction method, dose information acquisition method for edge peripheral regio... |
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Invention
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Abnormality diagnosis method for blanking aperture array substrate and multi-beam writing method.... |
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Invention
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Charged-particle beam irradiation apparatus and charged-particle beam irradiation method.
A char... |
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Invention
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Pattern inspection apparatus and pattern inspection method.
A pattern inspection apparatus inclu... |
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Invention
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Data processing method, charged particle beam writing method, charged particle beam writing appar... |
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Invention
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Graphic data generation method, graphic data generation device, quantum beam writing method, quan... |
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Invention
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Evaluation pattern formation method and position variation evaluation method.
In one embodiment,... |
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Invention
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Susceptor |
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Invention
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Multi-beam writing apparatus and multi-beam writing method.
A multi-beam writing apparatus inclu... |
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Invention
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Pattern inspection apparatus and pattern inspection method.
According to one aspect of the prese... |
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2025
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Invention
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Charged particle beam writing method and charged particle beam writing apparatus.
According to o... |
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Invention
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Charged particle beam writing method, charged particle beam writing apparatus and computer-readab... |
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Invention
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Electronic device.
An electronic device includes a substrate, an electrode extending toward a si... |
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Invention
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Charged particle beam writing method, charged particle beam writing apparatus and computer readab... |
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Invention
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Multi-charged particle beam writing method, and non-transitory computer-readable storage medium s... |
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Invention
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Multi-charged particle beam irradiation apparatus and multi-charged particle beam irradiation met... |
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Invention
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Multi-charged particle beam writing apparatus, data generation apparatus, complexity calculation ... |
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Invention
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Multi-charged particle beam writing method, multi-charged particle beam writing apparatus and com... |
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Invention
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Multi-charged particle beam irradiation apparatus and alignment method.
In one embodiment, an al... |
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Invention
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Multi-charged-particle-beam writing method and multi-charged-particle-beam writing apparatus.
In... |
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Invention
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Charged particle beam writing apparatus.
In one embodiment, a charged particle beam writing appa... |
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Invention
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Multiple charged-particle beam irradiation apparatus, multiple charged-particle beam irradiation ... |
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Invention
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Multi-charged particle beam writing method, and multi-charged particle beam writing apparatus.
A... |
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Invention
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Semiconductor manufacturing apparatus.
According to an embodiment, semiconductor manufacturing a... |
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G/S
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Photomask writing machines and tools for semiconductors, namely, semiconductor manufacturing mach... |
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G/S
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Photomask writing machines and tools for semiconductors;
metalworking machines and tools; semico... |
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Invention
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Multi-charged particle beam writing apparatus.
According to one aspect of the present invention,... |
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Invention
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Raster beam writing method and raster beam writing apparatus.
A raster beam writing method inclu... |
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Invention
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Charged particle beam writing method, charged particle beam writing apparatus, and non-transitory... |
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Invention
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Electronic component.
An electronic component of an embodiment includes an electrode array unit ... |
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Invention
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Cover for gas ring |
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Invention
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Chip-stacked device and method for manufacturing chip-stacked device.
A chip-stacked device incl... |
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Invention
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Chip-stacked device.
A first chip includes a first substrate which includes a first outer periph... |
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Invention
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Slip evaluation method and charged particle beam writing method.
In one embodiment, a slip evalu... |
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Invention
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Multibeam writing method and multibeam writing apparatus.
In one embodiment, a multibeam writing... |
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Invention
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Pattern inspection apparatus.
According to one aspect of the present invention, a pattern inspec... |
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Invention
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Multi-charged particle beam drawing method and multi-charged particle beam drawing device. A mult... |
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Invention
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Pattern inspecting device and pattern inspecting method.
An imaging mechanism is configured to o... |
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2017
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G/S
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Multiple electron beams mask writers used for manufacturing semiconductors |
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G/S
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Multiple electron beams mask writers used for manufacturing
semiconductors. |
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2016
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G/S
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Measuring and testing machines and instruments; optical
inspection apparatus for industrial use;... |
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G/S
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Instruction relating to operation and design of semiconductor manufacturing machines and systems |
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G/S
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Application software relating to maintenance manual for
semiconductor manufacturing machines and... |
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2015
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G/S
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Semiconductor making machines. Repair and maintenance of semiconductor manufacturing machines and... |
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2014
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G/S
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Semiconductor manufacturing machines and systems Repair and maintenance of semiconductor manufact... |
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G/S
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Semiconductor manufacturing machines and systems. Repair and maintenance of semiconductor manufac... |
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G/S
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Equipment for depositing on semiconductor wafers; equipment for performing epitaxial growth on se... |
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G/S
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Apparatus for depositing on semiconductor wafers; apparatus for performing epitaxial growth on se... |
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G/S
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Apparatus for depositing on semiconductor wafers; apparatus
for performing epitaxial growth on s... |
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2007
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G/S
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Semiconductor manufacturing machines Repair and maintenance of semiconductor manufacturing machin... |
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2003
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G/S
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SEMI-CONDUCTOR MANUFACTURING APPARATUS, NAMELY, ELECTRON BEAM EXPOSURE MACHINES, EPITAXIAL REACTO... |
