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2025
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G/S
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Computer software for use in processing semiconductor wafers; computer software, recorded; semi-c... |
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G/S
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Computer software for use in processing semiconductor
wafers; computer software, recorded; semi-... |
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2024
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Invention
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Charged particle assessment system and method.
An assessment method comprising: using an assessm... |
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Invention
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Method of assessing a sample, apparatus for assessing a sample.
The present disclosure relates t... |
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G/S
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Semiconductor manufacturing machines and semiconductor machinery.. Electronic imaging hardware an... |
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Invention
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Training a model to generate predictive data.
A method of training a generator model comprising:... |
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Invention
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Electron-optical device.
A charged particle-optical device for projecting a plurality of charged... |
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Invention
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Method of processing data derived from a sample.
The embodiments of the present disclosure provi... |
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G/S
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Semi-conductor lithographic machines, and their parts and fittings. |
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G/S
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Semi-conductor lithographic machines, and their parts and
fittings. |
|
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Invention
|
Defect detection from a scanning electron microscope derived depth map with neural network and de... |
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G/S
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Semiconductor manufacturing machines and semiconductor machinery. Electronic imaging hardware and... |
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G/S
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Semiconductor manufacturing machines and semiconductor
machinery. Electronic imaging hardware an... |
|
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Invention
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Pulse compression for sample assessment. A charged particle-optical device configured to assess a... |
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Invention
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Method of assessing a charged particle beam, and method of assessing a beam grid. Methods and app... |
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Invention
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Methods and assemblies for wavelength calibration. Assemblies and methods for wavelength calibrat... |
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Invention
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Systems and methods for motion control of a patterning device in a lithography apparatus. A retic... |
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Invention
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Broadband light source assembly. A broadband light source assembly, a metrology apparatus and a m... |
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Invention
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A method of refurbishing a substrate support. A method of refurbishing a substrate support, the s... |
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Invention
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Apparatus of plural charged-particle beams.
A multi-beam apparatus for observing a sample with h... |
|
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Invention
|
Radiation spectrum configuration system. A radiation source, a metrology tool, a lithographic app... |
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Invention
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Height measurement system. A system for measuring the height of a resist-covered surface of a sub... |
|
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Invention
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Speeding up forward electromagnetic computations for sxr reconstruction. A computer-implemented m... |
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Invention
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Method for designing a focus target for focus metrology. Disclosed is a method for designing a fo... |
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Invention
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Method of determining a dimensional parameter of a microstructured optical fiber. A method of det... |
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Invention
|
Radiation system. A radiation system comprising a deformable minor having a reflective surface ar... |
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Invention
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Lithographic apparatus, metrology systems, digital holographic microscopy alignment sensor, and m... |
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Invention
|
Setpoint generator, position control system, stage apparatus and exposure apparatus. The inventio... |
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Invention
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Systems and methods for contactless measurement of energy barriers during device fabrication. Sys... |
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Invention
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Methodology to predict a part per trillion failure rate. A method of predicting a part per trilli... |
|
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Invention
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Systems and methods for beam alignment in multi charged-particle beam systems. Systems and method... |
|
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Invention
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Optical element for use in euv lithography. An optical element for an EUV lithographic apparatus,... |
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Invention
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Projection system characterisation system and method. Disclosed herein is a computing system conf... |
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Invention
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Substrate coupling systems. Current substrate (e.g., semiconductor wafer) coupling (e.g., bonding... |
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Invention
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Optical vortex based metrology systems and methods. Optical vortex based metrology systems and me... |
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Invention
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A method of spectrally configuring measurement illumination of a metrology tool and associated ap... |
|
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Invention
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Method for reducing stochastic failures via source-mask optimization. Systems and methods for sou... |
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Invention
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Molten metal transfer line. A transfer line for transferring molten metal from a reservoir to a n... |
|
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Invention
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Masking module. A masking module for use in a lithographic apparatus, comprising a moveable maski... |
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|
Invention
|
A measurement system and a diffraction grating therefor. A measurement system (shearing interfero... |
|
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Invention
|
Membrane monitoring apparatus and method, and lithographic apparatus. A monitoring subsystem for ... |
|
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Invention
|
Real time recipe tuning for inspection system. The present disclosure provides a method for real ... |
|
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Invention
|
Method for determining root causes of events of a semiconductor manufacturing process and for mon... |
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Invention
|
Lithographic apparatus and gas lock funnel. A lithographic apparatus comprises: a substrate table... |
|
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Invention
|
An optical filter, a heterodyne interferometer system comprising the filter, and a method for fil... |
|
|
G/S
|
Inspection tool using an electron beam for inspection of semiconductor materials, devices and pro... |
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|
G/S
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Inspection tool using an electron beam for inspection of
semiconductor materials, devices and pr... |
|
2023
|
G/S
|
Machines for micro lithography and machines for use in the manufacture, fabrication and treatment... |
|
|
G/S
|
Machines for micro lithography and machines for use in the
fields of integrated circuits, semico... |
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Invention
|
Lithographic apparatus controller system.
A controller system is configured to control a plant a... |
|
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G/S
|
Registered software, namely, recorded software for the storage, processing and generation of data... |
|
|
G/S
|
Software, especially software for the storage, processing
and generation of data and graphics. |
|
|
Invention
|
Assembly for a lithographic apparatus.
An assembly for a lithographic apparatus, wherein the ass... |
|
|
Invention
|
A supercontinuum radiation source and associated metrology devices.
A supercontinuum radiation s... |
|
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Invention
|
Active learning to improve wafer defect classification.
Systems and methods for training a machi... |
|
2022
|
Invention
|
Resist under-layer for use in a lithographic apparatus.
A substrate arrangement for use in a lit... |
|
|
Invention
|
Method for controlling a production system and method for thermally controlling at least part of ... |
|
|
Invention
|
Systems and methods for generating multiple illumination spots from a single illumination source.... |
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Invention
|
Optical apparatus.
An optical apparatus for a reticle stage of a lithographic apparatus is discl... |
|
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Invention
|
A framework for condition tuning and image processing for metrology applications.
A method for p... |
|
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Invention
|
Method and system of defect detection for inspection sample based on machine learning model.
Sys... |
|
|
G/S
|
Software, especially software for the storage, processing and generation of data and graphics. |
|
|
G/S
|
Micro-lithography apparatus and instruments for use in the electronics, micro-lithography, semi-c... |
|
|
Invention
|
Image enhancement in charged particle inspection.
An improved systems and methods for generating... |
|
2021
|
G/S
|
Recorded software, in particular software for the storage, processing, and generation of data and... |
|
2020
|
G/S
|
Maintenance and repair services in connection with machines for use in microlithography and in th... |
|
|
G/S
|
Maintenance and repair services in connection with machines for use in the electronics, micro-lit... |
|
|
G/S
|
Maintenance and repair services in connection with machines
for use in the electronics, micro-li... |
|
2018
|
G/S
|
Computer hardware and software for the design and manufacture of semiconductor wafers and masks; ... |
|
|
G/S
|
Computer hardware and software for the design and
manufacture of semiconductor wafers and masks;... |
|
2017
|
G/S
|
Semiconductor lithographic machines, namely, lithographic machines used to manufacture semiconduc... |
|
|
G/S
|
Computer hardware for improving lithography manufacturing
processes; computer software for impro... |
|
|
G/S
|
Maintenance and repair services in connection with machines, apparatus and instruments for use in... |
|
2016
|
G/S
|
Micro-lithography equipment; machines for use in the manufacture by micro-lithography, especially... |
|
2015
|
G/S
|
Exposure units being optical instruments and their parts, for use in lithographic machines, namel... |
|
|
G/S
|
Exposure units [optical instruments] and their parts, for
use in lithographic machines. |
|
|
Invention
|
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a ... |
|
|
G/S
|
Machine tool for mounting, demounting and remounting a
pellicle to a reticle in lithographic equ... |
|
|
G/S
|
Electronic inspection devices, data processors, computer hardware and software for defect inspect... |
|
|
G/S
|
[ Electronic inspection devices and ] computer software for inspection of semiconductor materials... |
|
2014
|
G/S
|
Process control equipment for semiconductor wafer production, namely particle beam emitter in the... |
|
|
G/S
|
Optical measuring apparatus and instruments for measuring test wafers for the manufacture of elec... |
|
|
G/S
|
Optical measuring apparatus and instruments for measuring
test wafers for the manufacture of ele... |
|
2013
|
G/S
|
Electronic imaging platforms in the field of inspection of semiconductor materials, namely, semic... |
|
|
G/S
|
Technology supervision and inspection in the field of quality control of semiconductor wafers and... |
|
2012
|
G/S
|
Machinery maintenance and repair in the field of semiconductor industry; installation of semicond... |
|
|
G/S
|
testing and inspection in the field of quality control of semiconductor wafers and reticles |
|
|
G/S
|
Micro-lithography machines, namely, machines for manufacturing electronic components, integrated ... |
|
|
G/S
|
Micro-lithography machines; machines for use in the
electronics, integrated circuit, semi-conduc... |
|
|
G/S
|
[ Cutting, polishing and heat treatment and coating of glass and other optical surfaces, namely, ... |
