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2025
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G/S
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Computer software for use in processing semiconductor wafers; computer software, recorded; semi-c... |
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G/S
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Computer software for use in processing semiconductor
wafers; computer software, recorded; semi-... |
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Invention
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Target supply control apparatus and method in an extreme ultraviolet light source.
A target appa... |
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2024
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G/S
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Semiconductor manufacturing machines and semiconductor machinery.. Electronic imaging hardware an... |
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Invention
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Methods and samples to determine charged-particle beam spot size. Samples and methods for determi... |
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Invention
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Semiconductor charged particle detector for microscopy.
A detector may be provided with an array... |
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Invention
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Signal processing method, signal processor, assessment method, and assessment apparatus. A signal... |
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Invention
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Method of scanning a sample with non-circular beam spots. Systems, methods, and non-transitory co... |
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Invention
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Radiation sensor. A radiation sensor for detecting EUV radiation, the radiation sensor comprising... |
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Invention
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Systems and methods of particle contamination reduction in charged-particle beam systems. Systems... |
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Invention
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Droplet metrology using tunable-wavelength laser. Disclosed is an apparatus for and method of adj... |
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Invention
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Device and method for projecting a plurality of charged particle beams. The present disclosure pr... |
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Invention
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Method and system for primitive-based mask prediction. Described herein is a method and system fo... |
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Invention
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Radiation source assembly for generating broadband radiation. Radiation source assembly and metho... |
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Invention
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Holistic calibration. A method is provided for measuring a characteristic feature or property of ... |
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Invention
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A distributed system for wafer print check. A method for performing a distributed wafer print che... |
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Invention
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Metrology tool and method. A metrology tool for inspection of a structure on an object comprises:... |
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Invention
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System for controlling gas flow in a laser discharge chamber. A discharge chamber for use in a de... |
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Invention
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Patterning process assessment systems and methods. Compact semiconductor manufacturing patterning... |
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Invention
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Detection of yield-critical defects using the medial axis of 3d-stacked charged-particle beam ins... |
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Invention
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Metrology apparatus and associated methods. Metrology apparatus comprises: an illumination module... |
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Invention
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Laser powered plasma based euv generation system. A laser powered plasma, LPP, based EUV generati... |
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Invention
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Method and system for perturbing mask pattern. Described herein is a method and system for optimi... |
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Invention
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Method of substrate support repair. A method of joining a support member to a substrate support, ... |
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Invention
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Radiation source. A broadband radiation source comprises: a hollow core optical fiber; a working ... |
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Invention
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Tin handling device and apparatus, euv generation apparatus, euv utilization apparatus, use there... |
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Invention
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Method of setting up of a lithography apparatus. Disclosed is a method of determining compact len... |
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Invention
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Fluid handling structure. A fluid handling structure configured to at least partly confine an imm... |
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Invention
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Assembly for wavelength calibration. An assembly for calibrating a radiation wavelength. The asse... |
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Invention
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Method for determining an optical property of a multi-layer structure. A method of determining op... |
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Invention
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Method of determining a correction for an exposure process, lithography apparatus and computer pr... |
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Invention
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Electron-optical system, method of manufacturing an electron beam element. The disclosure relates... |
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Invention
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Reticle load lock system and method. A reticle load lock having a valve with a variable size orif... |
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Invention
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Contrastive deep learning for defect inspection. An improved system (300) and method for defect d... |
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Invention
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Heat transfer systems for an extreme ultraviolet radiation utilization apparatus, methods of manu... |
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Invention
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Scrubber system, euv radiation source and euv utilization system comprising the same, and method ... |
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Invention
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Robotic arm for cleaning structure surface in chamber. An apparatus for cleaning a surface of a c... |
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G/S
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Semi-conductor lithographic machines, and their parts and fittings. |
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G/S
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Semi-conductor lithographic machines, and their parts and
fittings. |
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G/S
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Semiconductor manufacturing machines and semiconductor machinery. Electronic imaging hardware and... |
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G/S
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Semiconductor manufacturing machines and semiconductor
machinery. Electronic imaging hardware an... |
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Invention
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Sem image enhancement methods and systems.
Systems and methods for image enhancement are disclos... |
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G/S
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Inspection tool using an electron beam for inspection of semiconductor materials, devices and pro... |
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G/S
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Inspection tool using an electron beam for inspection of
semiconductor materials, devices and pr... |
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2023
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Invention
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Measuring contrast and critical dimension using an alignment sensor.
A method can include direct... |
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Invention
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Method and system for reducing charging artifact in inspection image.
Systems and methods for re... |
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G/S
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Machines for micro lithography and machines for use in the manufacture, fabrication and treatment... |
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G/S
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Machines for micro lithography and machines for use in the
fields of integrated circuits, semico... |
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Invention
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Substrate warpage determination system.
A substrate warpage determination system comprises at le... |
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Invention
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Methods of metrology and associated devices.
A method of inferring second metrology data relatin... |
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Invention
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Method for determining a spatial distribution of a parameter of interest over at least one substr... |
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Invention
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Data retrieval.
A method of retrieving data from at least one data store which stores a pluralit... |
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Invention
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Lithographic pattern representation with curvilinear elements.
Methods, systems, and computer so... |
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Invention
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Euv light source target metrology.
Disclosed is a system for and method of performing target met... |
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Invention
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Method for correcting measurements in the manufacture of integrated circuits and associated appar... |
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Invention
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Image analysis based on adaptive weighting of template contours.
A method of characterizing an i... |
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Invention
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Vacuum chamber system including temperature conditioning plate.
A vacuum chamber system comprise... |
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Invention
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Apparatus and methods for filtering measurement radiation.
An apparatus for measuring a paramete... |
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Invention
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Methods and systems for improving wafer defect classification nuisance rate.
An automatic defect... |
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|
G/S
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Registered software, namely, recorded software for the storage, processing and generation of data... |
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G/S
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Software, especially software for the storage, processing
and generation of data and graphics. |
|
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Invention
|
Beam manipulation using charge regulator in a charged particle system.
A system and a method for... |
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Invention
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Systems and methods for defect location binning in charged-particle systems.
Apparatuses, system... |
|
2022
|
G/S
|
Software, especially software for the storage, processing and generation of data and graphics. |
|
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G/S
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Micro-lithography apparatus and instruments for use in the electronics, micro-lithography, semi-c... |
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2021
|
G/S
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Recorded software, in particular software for the storage, processing, and generation of data and... |
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2020
|
G/S
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Maintenance and repair services in connection with machines for use in microlithography and in th... |
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G/S
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Maintenance and repair services in connection with machines for use in the electronics, micro-lit... |
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G/S
|
Maintenance and repair services in connection with machines
for use in the electronics, micro-li... |
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2018
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G/S
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Computer hardware and software for the design and manufacture of semiconductor wafers and masks; ... |
|
|
G/S
|
Computer hardware and software for the design and
manufacture of semiconductor wafers and masks;... |
|
2017
|
G/S
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Semiconductor lithographic machines, namely, lithographic machines used to manufacture semiconduc... |
|
|
G/S
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Computer hardware for improving lithography manufacturing
processes; computer software for impro... |
|
|
G/S
|
[ Grinding, cutting, polishing and coating of glass and other optical surfaces ] Micro-lithograp... |
|
2016
|
G/S
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Micro-lithography equipment; machines for use in the manufacture by micro-lithography, especially... |
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2015
|
G/S
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Exposure units being optical instruments and their parts, for use in lithographic machines, namel... |
|
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G/S
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Exposure units [optical instruments] and their parts, for
use in lithographic machines. |
|
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G/S
|
Machine tool for mounting, demounting and remounting a
pellicle to a reticle in lithographic equ... |
|
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G/S
|
Electronic inspection devices, data processors, computer hardware and software for defect inspect... |
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|
G/S
|
[ Electronic inspection devices and ] computer software for inspection of semiconductor materials... |
|
2014
|
G/S
|
Process control equipment for semiconductor wafer production, namely particle beam emitter in the... |
|
|
G/S
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Optical measuring apparatus and instruments for measuring test wafers for the manufacture of elec... |
|
|
G/S
|
Optical measuring apparatus and instruments for measuring
test wafers for the manufacture of ele... |
|
2013
|
G/S
|
Electronic imaging platforms in the field of inspection of semiconductor materials, namely, semic... |
|
|
G/S
|
Technology supervision and inspection in the field of quality control of semiconductor wafers and... |
|
2012
|
G/S
|
Machinery maintenance and repair in the field of semiconductor industry; installation of semicond... |
|
|
G/S
|
testing and inspection in the field of quality control of semiconductor wafers and reticles |
|
|
G/S
|
Micro-lithography machines, namely, machines for manufacturing electronic components, integrated ... |
|
|
G/S
|
Micro-lithography machines; machines for use in the
electronics, integrated circuit, semi-conduc... |
|
|
G/S
|
[ Cutting, polishing and heat treatment and coating of glass and other optical surfaces, namely, ... |
