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2025
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Invention
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Printed circuit board for sealing vacuum system.
Detector modules, systems and methods for detec... |
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Invention
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Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-bea... |
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Invention
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Nozzle apparatus.
An apparatus includes: a tube; a body including: a first body wall and a secon... |
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Invention
|
Apparatus of plural charged-particle beams.
A multi-beam apparatus for observing a sample with h... |
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G/S
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Semiconductor manufacturing machines and semiconductor
machinery. Electronic imaging hardware an... |
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G/S
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Testing apparatus using electron beam for inspection of semiconductor materials, devices and prod... |
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G/S
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Electronic testing apparatus, data processors, computer
hardware and software for defect inspect... |
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G/S
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Testing apparatus using electron beam for inspection of
semiconductor materials, devices and pro... |
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G/S
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Electric and electronic process control apparatus for the production of semiconductor components,... |
|
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Invention
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Laser system, installation for exposing a semiconductor material coated with a photosensitive coa... |
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Invention
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Exposure apparatus and exposure method. An exposure apparatus comprises a first object support co... |
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Invention
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Post-optical proximity correction mask layout correction for wafer back side overlay. A method fo... |
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Invention
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Method and system for mask prediction using diffusion model. Described herein is a method and sys... |
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Invention
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Method and system for diffraction pattern based source and mask optimization. Described is a meth... |
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Invention
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Pupil imaging through anderson localization based multimode fibers. Systems, methods, and compute... |
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Invention
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Exposure process and apparatus. A method of determining a reparation dose for a substrate exposed... |
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Invention
|
Adaptable euv radiation source. A system for and method of controlling the characteristics a puls... |
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Invention
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Method of correcting an image. A method comprising obtaining at least two signals based on scatte... |
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Invention
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Radiation source with heat transfer. A radiation source includes a vessel, a frame configured at ... |
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Invention
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Machine-learning assisted extrapolation of wafer-scale metrology using alignment read-outs. A non... |
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Invention
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Exposure apparatus and associated method of determining a correction for an exposure process. The... |
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Invention
|
Optical member thermal conditioning method. Method to condition an optical member in an initial t... |
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Invention
|
Object force application system. A system includes a chuck and an object force application system... |
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Invention
|
High force low vibration cylindrical linear motor. A cylindrical linear motor is described that r... |
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Invention
|
Method, apparatus, and system for dynamically controlling an electrostatic chuck during an inspec... |
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Invention
|
Charged particle-optical element, charged particle-optical device and methods of manufacturing el... |
|
|
Invention
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Method and apparatus for homogenizing a beam of radiation. Disclosed is an optical arrangement fo... |
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Invention
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Substrate support, method for loading a substrate on a substrate support and lithographic apparat... |
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Invention
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Method and apparatus for measuring a gas species in a system. Disclosed is a method and apparatus... |
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Invention
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Method for use with a sensor system of a lithographic apparatus and a lithographic apparatus comp... |
|
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Invention
|
Exposure method and exposure apparatus. A new exposure method for forming a pattern on a pluralit... |
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Invention
|
Modular moveable loading station for a lithography apparatus. A lithography system comprising a l... |
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Invention
|
Slotted ferromagnetic core polyphase forcer with closed slot design. Disclosed is a slotted iron ... |
|
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Invention
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Optimizing a patterning device layout and a discretized pupil profile to control facet mirrors us... |
|
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Invention
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Systems and methods for optical proximity correction (opc) model calibration in a stitching regio... |
|
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Invention
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System and method for thermal contact modulation between object and clamp. An object clamping sys... |
|
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Invention
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Method and apparatus for bonding substrates. Disclosed is a method of bonding a first substrate t... |
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Invention
|
Electromagnetic coil. The present invention relates to an electromagnetic coil comprising an elec... |
|
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Invention
|
A broadband radiation source. There is provided a method for generating broadband radiation, the ... |
|
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Invention
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System and method for compact display of optical measurement information. A metrology device rece... |
|
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Invention
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Method, computer program and assembly for pellicle monitoring. A method of pellicle monitoring, t... |
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Invention
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Substrate support. A substrate support configured to support a substrate. The substrate support c... |
|
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Invention
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Method of configuring a substrate positioning system of a semiconductor manufacturing tool. Discl... |
|
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Invention
|
Method and apparatus for short wavelength metrology. Disclosed is a method of and apparatus for m... |
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Invention
|
Methods and apparatuses for independent rarefication pulse for co2 laser driven euv source. A pul... |
|
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Invention
|
Reticle capture arrangement for a lithographic apparatus. A stage arrangement including an electr... |
|
|
Invention
|
Wafer stage system, method, and lithographic apparatus provided with the wafer stage. The present... |
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Invention
|
Method of determining degradation on a fiducial. Disclosed is a method of determining a degradati... |
|
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Invention
|
Graph neural networks for exploiting spatial and semantic relations in metrology data. A method o... |
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G/S
|
Computer software for use in processing semiconductor wafers; computer software, recorded; semi-c... |
|
|
G/S
|
Computer software for use in processing semiconductor
wafers; computer software, recorded; semi-... |
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G/S
|
Downloadable computer software for use in processing semiconductor wafers; Recorded computer soft... |
|
2024
|
G/S
|
Semiconductor manufacturing machines and semiconductor machinery.. Electronic imaging hardware an... |
|
|
G/S
|
Semi-conductor lithographic machines, and their parts and fittings. |
|
|
G/S
|
Semi-conductor lithographic machines, and their parts and
fittings. |
|
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G/S
|
Semiconductor manufacturing machines and semiconductor machinery. Electronic imaging hardware in ... |
|
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G/S
|
Electron beam tool for inspecting semiconductor materials, devices and processes |
|
|
G/S
|
Inspection tool using an electron beam for inspection of
semiconductor materials, devices and pr... |
|
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G/S
|
Inspection tool using an electron beam for inspection of semiconductor materials, devices and pro... |
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2023
|
Invention
|
Design for multiple off-axis illumination beams for wafer alignment sensor.
A novel approach for... |
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Invention
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Control method and control system for controlling a position of an object with an electromagnetic... |
|
|
G/S
|
Machines for micro lithography and machines for use in the manufacture, fabrication and treatment... |
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|
G/S
|
Machines for micro lithography and machines for use in the
fields of integrated circuits, semico... |
|
|
G/S
|
Registered software, namely, recorded software for the storage, processing and generation of data... |
|
|
G/S
|
Software, especially software for the storage, processing
and generation of data and graphics. |
|
|
Invention
|
Multiscale physical etch modeling and methods thereof. Systems and methods for simulating a plasm... |
|
2022
|
Invention
|
Inspection tool, inspection tool operating method, and non-transitory computer readable medium. T... |
|
|
Invention
|
A liquid target material supplying apparatus, fuel emitter, radiation source, lithographic appara... |
|
|
G/S
|
Software, especially software for the storage, processing and generation of data and graphics. |
|
|
G/S
|
Micro-lithography apparatus and instruments for use in the electronics, micro-lithography, semi-c... |
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2021
|
G/S
|
Recorded software, in particular software for the storage, processing, and generation of data and... |
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2020
|
G/S
|
Maintenance and repair services in connection with machines for use in microlithography and in th... |
|
|
G/S
|
Maintenance and repair services in connection with machines for use in the electronics, micro-lit... |
|
|
G/S
|
Maintenance and repair services in connection with machines
for use in the electronics, micro-li... |
|
2018
|
G/S
|
Computer hardware and software for the design and manufacture of semiconductor wafers and masks; ... |
|
|
G/S
|
Computer hardware and software for the design and
manufacture of semiconductor wafers and masks;... |
|
|
Invention
|
Lithographic apparatus substrate table and method of loading a substrate. A lithographic apparatu... |
|
2017
|
G/S
|
Semiconductor lithographic machines, namely, lithographic machines used to manufacture semiconduc... |
|
|
G/S
|
Computer hardware for improving lithography manufacturing
processes; computer software for impro... |
|
|
G/S
|
Micro-lithography machines, namely, machines for manufacturing electronic components, integrated ... |
|
2016
|
G/S
|
Micro-lithography equipment; machines for use in the manufacture by micro-lithography, especially... |
|
2015
|
G/S
|
Exposure units being optical instruments and their parts, for use in lithographic machines, namel... |
|
|
G/S
|
Exposure units [optical instruments] and their parts, for
use in lithographic machines. |
|
|
G/S
|
Electronic inspection devices, data processors, computer hardware and software for defect inspect... |
|
|
G/S
|
[ Electronic inspection devices and ] computer software for inspection of semiconductor materials... |
|
2014
|
G/S
|
Process control equipment for semiconductor wafer production, namely particle beam emitter in the... |
|
|
G/S
|
Optical measuring apparatus and instruments for measuring test wafers for the manufacture of elec... |
|
|
G/S
|
Optical measuring apparatus and instruments for measuring
test wafers for the manufacture of ele... |
|
2013
|
G/S
|
Electronic imaging platforms in the field of inspection of semiconductor materials, namely, semic... |
|
|
G/S
|
Technology supervision and inspection in the field of quality control of semiconductor wafers and... |
|
2012
|
G/S
|
Machinery maintenance and repair in the field of semiconductor industry; installation of semicond... |
