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2026
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P/S
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Computer software for computational lithography, including software for lithography simulation, s... |
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P/S
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Machines for lithography; machines for patterning substrates; machines for use in the fields of e... |
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Invention
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Fluid dispensing system and method.
A fluid dispensing system including a fluid-permeable surfac... |
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Invention
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Optimization of scanner throughput and imaging quality for a patterning process.
A method for so... |
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Invention
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Apparatus and methods to generate deblurring model and deblur image.
Described herein is a metho... |
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Invention
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Method for correcting measurements in the manufacture of integrated circuits and associated appar... |
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Invention
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Metrology apparatus and metrology methods based on high harmonic generation from a diffractive st... |
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P/S
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Fittings and accessories for lithographic machines, included in this class. Electronic and optica... |
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Invention
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Measurement apparatus and methods. The present invention relates to a device for determining char... |
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Invention
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Apparatus and method for removing debris. A radiation source includes a vessel defining a radiati... |
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Invention
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Overlay metrology systems and methods for semiconductor manufacturing. Measuring overlay is descr... |
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Invention
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Method and apparatus for measuring one or more properties of a surface of an object. A method of ... |
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Invention
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A substrate, lithographic method and metrology method. Disclosed is a substrate comprising a plur... |
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Invention
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Detector package design. A charged particle beam detector includes a detection layer, a readout i... |
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Invention
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Method of structuring burls and grounding lines on a clamp apparatus. A method of forming burls a... |
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Invention
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Automatic anti-scan deflector alignment method on a multi-beam electron-optics system. A method o... |
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Invention
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Electrostatic clamp with dissimilar conductive coating. A lithography system includes an electros... |
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Invention
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Apparatus and method for removing debris in radiation source. Disclosed relates to an apparatus a... |
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Invention
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Sensor system and method for sensing and lithographic apparatus provided with the sensor system. ... |
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Invention
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Exposure apparatus position control. A method of positioning N modules in an exposure apparatus, ... |
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Invention
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Method and apparatus for bonding substrates. Disclosed is a method of bonding substrates to form ... |
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Invention
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Optical beam member. The present invention provides an optical beam member for a charged particle... |
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Invention
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Semiconductor alignment metrology using digital holographic microscopy techniques. Research into ... |
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Invention
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Optical component for an alignment system and lithographic apparatus. An optical component compri... |
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Invention
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Throughput improvement of computer guided inspection dynamic sampling via zone-based inspection. ... |
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Invention
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Backside actuation process. There is provided a method of determining a backside process correcti... |
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Invention
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Pellicle. A pellicle for an apparatus for semiconductor processes comprising: a pellicle film; a ... |
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Invention
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Pulsed radiation source and method of illumination. A metrology tool for measuring a target on a ... |
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Invention
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Method and system for artificial intelligence-based layout retargeting command generation. Descri... |
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Invention
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Method of bonding substrates and apparatus for bonding substrates. The present disclosure relates... |
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Invention
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Euv source with vibration-decoupled exhaust module. A radiation source includes: a vessel; an exh... |
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Invention
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Substrate holder. A substrate holder for a bonding tool that is configured to bond a first substr... |
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Invention
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Position control method for a stage, stage, and lithographic apparatus including the stage. The p... |
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P/S
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Optical alignment sensors and measuring instruments for determining semiconductor wafer position,... |
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P/S
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Optical alignment sensors and measuring instruments for
determining semiconductor wafer position... |
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2025
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P/S
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Semiconductor manufacturing machines and semiconductor
machinery. Electronic imaging hardware an... |
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P/S
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Testing apparatus using electron beam for inspection of semiconductor materials, devices and prod... |
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P/S
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Electronic testing apparatus, data processors, computer
hardware and software for defect inspect... |
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P/S
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Testing apparatus using electron beam for inspection of
semiconductor materials, devices and pro... |
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P/S
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Electric and electronic process control apparatus for the production of semiconductor components,... |
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P/S
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Computer software for use in processing semiconductor wafers; computer software, recorded; semi-c... |
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P/S
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Computer software for use in processing semiconductor
wafers; computer software, recorded; semi-... |
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P/S
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Downloadable computer software for use in processing semiconductor wafers; Recorded computer soft... |
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2024
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P/S
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Semiconductor manufacturing machines and semiconductor machinery.. Electronic imaging hardware an... |
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P/S
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Semi-conductor lithographic machines, and their parts and fittings. |
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P/S
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Semi-conductor lithographic machines, and their parts and
fittings. |
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P/S
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Semiconductor manufacturing machines and semiconductor machinery. Electronic imaging hardware in ... |
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P/S
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Electron beam tool for inspecting semiconductor materials, devices and processes |
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P/S
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Inspection tool using an electron beam for inspection of
semiconductor materials, devices and pr... |
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P/S
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Inspection tool using an electron beam for inspection of semiconductor materials, devices and pro... |
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Invention
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Systems and methods for inspecting a portion of a lithography apparatus. An inspection system inc... |
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Invention
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Reticle design for minimizing thermal strain.
A method for reducing thermal strain in a reticle ... |
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Invention
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Object holder, object table, method of controlling the shape of a surface, method of manufacturin... |
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Invention
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Apparatus for wavelength-resolved beam monitoring.
System an apparatus for wavelength resolved b... |
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Invention
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Cleaning structure surface in light source chamber.
An apparatus includes: a component of a cham... |
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Invention
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An illumination module for a metrology device.
Disclosed is an illumination configuration module... |
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Invention
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Method of performing a qualification action on an exposure apparatus.
Disclosed is a method of p... |
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Invention
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Metrology method and apparatus and computer program background.
Disclosed is a method of metrolo... |
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Invention
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Protective device for a vacuum seal.
An apparatus includes: a vacuum sealing device chemically r... |
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Invention
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Internally-cooled actuator coil.
A coil to be fluid-cooled for use in electromagnetic actuators ... |
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Invention
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Using reinforcement learning to determine optimal alignment for an optical system.
Corrections a... |
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Invention
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Substrate processing.
A method for processing a substrate, the method including: providing a sub... |
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Invention
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Image positioning control method and system.
A method of controlling an image positioning error ... |
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Invention
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Conductive polymers for reticle table cleaning apparatus.
A reticle stage cleaning apparatus for... |
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Invention
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Metrology method and associated metrology and lithographic apparatuses.
Disclosed is a method of... |
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Invention
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Shield arrangement for electron-optical module.
A charged particle-optical module for a charged ... |
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Invention
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Fluid handling system and method, and method of manufacturing devices.
A fluid handling system f... |
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Invention
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System and method for tailoring chuck stiffness.
A lithographic apparatus that includes an illum... |
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Invention
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A method to monitor the cgi model performance without ground truth information.
An apparatus to ... |
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2023
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Invention
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Method for configuring a field of view of an inspection apparatus.
A method for configuring a fi... |
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P/S
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Machines for micro lithography and machines for use in the manufacture, fabrication and treatment... |
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P/S
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Machines for micro lithography and machines for use in the
fields of integrated circuits, semico... |
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P/S
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Registered software, namely, recorded software for the storage, processing and generation of data... |
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P/S
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Software, especially software for the storage, processing
and generation of data and graphics. |
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2022
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P/S
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Software, especially software for the storage, processing and generation of data and graphics. |
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P/S
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Micro-lithography apparatus and instruments for use in the electronics, micro-lithography, semi-c... |
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2021
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P/S
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Recorded software, in particular software for the storage, processing, and generation of data and... |
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2020
|
P/S
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Maintenance and repair services in connection with machines for use in microlithography and in th... |
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P/S
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Maintenance and repair services in connection with machines for use in the electronics, micro-lit... |
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P/S
|
Maintenance and repair services in connection with machines
for use in the electronics, micro-li... |
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2018
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P/S
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Computer hardware and software for the design and manufacture of semiconductor wafers and masks; ... |
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P/S
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Computer hardware and software for the design and
manufacture of semiconductor wafers and masks;... |
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2017
|
P/S
|
Semiconductor lithographic machines, namely, lithographic machines used to manufacture semiconduc... |
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P/S
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Computer hardware for improving lithography manufacturing
processes; computer software for impro... |
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P/S
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Micro-lithography machines, namely, machines for manufacturing electronic components, integrated ... |
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2016
|
P/S
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Micro-lithography equipment; machines for use in the manufacture by micro-lithography, especially... |
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2015
|
P/S
|
Exposure units being optical instruments and their parts, for use in lithographic machines, namel... |
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P/S
|
Exposure units [optical instruments] and their parts, for
use in lithographic machines. |
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P/S
|
Electronic inspection devices, data processors, computer hardware and software for defect inspect... |
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P/S
|
[ Electronic inspection devices and ] computer software for inspection of semiconductor materials... |
