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2025
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P/S
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Computer software for use in processing semiconductor wafers; computer software, recorded; semi-c... |
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2024
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P/S
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Semiconductor manufacturing machines and semiconductor machinery.. Electronic imaging hardware an... |
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Invention
|
Cleaning a structure surface in an euv chamber.
In some general aspects, a surface of a structur... |
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Invention
|
Calibration system for an extreme ultraviolet light source.
A metrology system includes a light ... |
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Invention
|
Charged particle-optical apparatus.
A charged particle-optical apparatus for assessing a sample ... |
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Invention
|
Data processing device and method, charged particle assessment system and method.
A charged part... |
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Invention
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Utilize machine learning in selecting high quality averaged sem images from raw images automatica... |
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Invention
|
Process window optimizer.
A defect prediction method for a device manufacturing process involvin... |
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P/S
|
Semi-conductor lithographic machines, and their parts and fittings. |
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P/S
|
Semi-conductor lithographic machines, and their parts and
fittings. |
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P/S
|
Semiconductor manufacturing machines and semiconductor machinery. Electronic imaging hardware and... |
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P/S
|
Semiconductor manufacturing machines and semiconductor
machinery. Electronic imaging hardware an... |
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Invention
|
Fully automated sem sampling system for e-beam image enhancement.
Disclosed herein is a method o... |
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Invention
|
Method of operating a microlithographic projection exposure apparatus. A method of operating a mi... |
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Invention
|
Clog-resistant droplet generators for euv light sources. A droplet generator for an EUV light sou... |
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Invention
|
Carbon nanotube pellicle membrane. There is provided a carbon nanotube pellicle membrane for a li... |
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Invention
|
Systems and methods for hybrid sampling plan generation and accurate die loss projection. Systems... |
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Invention
|
Reticle conditioning nozzle. A reticle conditioning nozzle configured to supply conditioning flui... |
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Invention
|
Substrate parameter measurement. A method of measuring a parameter of a structure of a substrate ... |
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Invention
|
Reticle handling system. Multiple cover store positions are provided within an in-vacuum reticle ... |
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Invention
|
Systems and methods for magnetically levitated object stages. A transport system includes an obje... |
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Invention
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Method for reducing the effects of parasitic forces and/or moments on the imaging quality of a pr... |
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Invention
|
Semi-supervised, self-supervised, and reinforcement learning machine learning models for mask pre... |
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Invention
|
Linear motor with cogging compensation. An actuator system includes a linear motor that has a fir... |
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Invention
|
Method of determining a positioning correction for a lithographic process. Disclosed is a method ... |
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Invention
|
Inspection apparatus, wedge system for reducing aberrations, and method of fabrication thereof. A... |
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Invention
|
System and method for substrate disturbance minimization, and lithographic apparatus including th... |
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Invention
|
Electromotive force braking in a lithographic apparatus. A braking system can include a moving fr... |
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Invention
|
Multiple pitch sem overlay marks and algorithm for stitching area. Improved systems and methods f... |
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Invention
|
Method and system for optimizing source, mask and wavefront based on diffraction pattern to reduc... |
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Invention
|
Method of determining an exposure strategy, lithography method and apparatus and computer program... |
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Invention
|
Learning-based local alignment for edge placement metrology. A charged particle beam inspection m... |
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Invention
|
Lithographic apparatus and associated method. A lithographic apparatus comprising a support struc... |
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Invention
|
Confidentiality-preserving collaborative model for deriving information on a production system. A... |
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Invention
|
Anisotropic resist patterning. Disclosed herein is a tool for an EUV exposure process, the tool c... |
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Invention
|
Laser-controlled thermonuclear fusion fueling. A system for a thermonuclear fusion reactor having... |
|
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Invention
|
Vertically federated training of a machine learning model used by different participants for conf... |
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Invention
|
Remaining useful lifetime estimation using multivariate signals. Disclosed is a computer implemen... |
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Invention
|
Method and system for generating an overlay-tolerant mask pattern design. Described a method and ... |
|
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P/S
|
Inspection tool using an electron beam for inspection of semiconductor materials, devices and pro... |
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|
P/S
|
Inspection tool using an electron beam for inspection of
semiconductor materials, devices and pr... |
|
|
Invention
|
Process model based scanning electron microscopy (sem) image distortion correction. A method for ... |
|
|
Invention
|
Photolithography object stage and method for forming the same. An object stage and method thereof... |
|
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Invention
|
Optical system and method. An optical system comprising an optical component configured to modify... |
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Invention
|
Method for optical calibration. A method of calibrating an illumination system for a lithographic... |
|
2023
|
P/S
|
Machines for micro lithography and machines for use in the manufacture, fabrication and treatment... |
|
|
P/S
|
Machines for micro lithography and machines for use in the
fields of integrated circuits, semico... |
|
|
P/S
|
Registered software, namely, recorded software for the storage, processing and generation of data... |
|
|
P/S
|
Software, especially software for the storage, processing
and generation of data and graphics. |
|
|
Invention
|
Substrate table, lithographic apparatus, sticker, cover ring and method of operating a lithograph... |
|
|
Invention
|
Mechanically controlled stress-engineered optical systems and methods.
A fast and dynamic wavepl... |
|
2022
|
Invention
|
Element of an afm tool.
The disclosure relates to determining information about a target structu... |
|
|
Invention
|
Systems and methods for generating multiple illumination spots from a single illumination source.... |
|
|
Invention
|
Hierarchical anomaly detection and data representation method to identify system level degradatio... |
|
|
Invention
|
Generating an alignment signal without dedicated alignment structures.
Generating an alignment s... |
|
|
Invention
|
An optical system implemented in a system for fast optical inspection of targets.
A system inclu... |
|
|
Invention
|
Method of reducing cyclic error effects in a lithographic process, projection system and lithogra... |
|
|
Invention
|
Substrate comprising a target arrangement, associated patterning device and metrology method.
Di... |
|
|
Invention
|
Object holder, lithographic apparatus comprising such object holder and methods for an object hol... |
|
|
Invention
|
Lithographic apparatus, illumination system, and connection sealing device with protective shield... |
|
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Invention
|
Latent space synchronization of machine learning models for in-device metrology inference.
Autoe... |
|
|
P/S
|
Software, especially software for the storage, processing and generation of data and graphics. |
|
|
P/S
|
Micro-lithography apparatus and instruments for use in the electronics, micro-lithography, semi-c... |
|
|
Invention
|
Temperature measurement of optical elements in an optical apparatus.
An optical apparatus is dis... |
|
2021
|
P/S
|
Recorded software, in particular software for the storage, processing, and generation of data and... |
|
2020
|
P/S
|
Maintenance and repair services in connection with machines for use in microlithography and in th... |
|
|
P/S
|
Maintenance and repair services in connection with machines for use in the electronics, micro-lit... |
|
|
P/S
|
Maintenance and repair services in connection with machines
for use in the electronics, micro-li... |
|
2018
|
P/S
|
Computer hardware and software for the design and manufacture of semiconductor wafers and masks; ... |
|
|
P/S
|
Computer hardware and software for the design and
manufacture of semiconductor wafers and masks;... |
|
2017
|
P/S
|
Semiconductor lithographic machines, namely, lithographic machines used to manufacture semiconduc... |
|
|
P/S
|
Computer hardware for improving lithography manufacturing
processes; computer software for impro... |
|
|
P/S
|
Maintenance and repair services in connection with machines, apparatus and instruments for use in... |
|
2016
|
P/S
|
Micro-lithography equipment; machines for use in the manufacture by micro-lithography, especially... |
|
2015
|
P/S
|
Exposure units being optical instruments and their parts, for use in lithographic machines, namel... |
|
|
P/S
|
Exposure units [optical instruments] and their parts, for
use in lithographic machines. |
|
|
P/S
|
Machine tool for mounting, demounting and remounting a
pellicle to a reticle in lithographic equ... |
|
|
P/S
|
[ Electronic inspection devices and ] computer software for inspection of semiconductor materials... |
|
|
P/S
|
Electronic inspection devices, data processors, computer hardware and software for defect inspect... |
|
2014
|
P/S
|
Process control equipment for semiconductor wafer production, namely particle beam emitter in the... |
|
|
P/S
|
Optical measuring apparatus and instruments for measuring test wafers for the manufacture of elec... |
|
|
P/S
|
Optical measuring apparatus and instruments for measuring
test wafers for the manufacture of ele... |
|
2013
|
P/S
|
Electronic imaging platforms in the field of inspection of semiconductor materials, namely, semic... |
|
|
P/S
|
Technology supervision and inspection in the field of quality control of semiconductor wafers and... |
|
2012
|
P/S
|
Machinery maintenance and repair in the field of semiconductor industry; installation of semicond... |
|
|
P/S
|
testing and inspection in the field of quality control of semiconductor wafers and reticles |
|
|
P/S
|
Micro-lithography machines, namely, machines for manufacturing electronic components, integrated ... |
|
|
P/S
|
Micro-lithography machines; machines for use in the
electronics, integrated circuit, semi-conduc... |
|
|
P/S
|
[ Cutting, polishing and heat treatment and coating of glass and other optical surfaces, namely, ... |
