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2024
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Invention
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Information processing method, computer program, and information processing apparatus.
An inform... |
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Invention
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Control method of substrate processing apparatus including partially etching a workpiece to from ... |
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Invention
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Plasma processing apparatus.
A plasma processing apparatus comprises a first plasma processing a... |
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Invention
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Frequency control of source radio frequency power in plasma processing.
A disclosed plasma proce... |
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Invention
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Substrate processing method and substrate processing apparatus.
A method of processing a substra... |
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Invention
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Substrate support and plasma processing apparatus.
The disclosed substrate support includes a fi... |
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Invention
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Substrate-processing method and substrate-processing apparatus.
A substrate-processing method is... |
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G/S
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Semiconductor manufacturing machines and their component parts and fittings |
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
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Invention
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Substrate processing apparatus and substrate processing method. This load lock module includes: a... |
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G/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
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Invention
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Film forming method and processing system.
A film forming method includes: (a) preparing a subst... |
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Invention
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Liquid supply device, liquid supply method, and storage medium.
A liquid supply device includes:... |
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Invention
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Liquid supply device, liquid supply method, and storage medium.
A liquid supply device includes ... |
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Invention
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Etching method and plasma treatment system. This etching method involves etching a substrate prov... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus includes a carry-in/out block h... |
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Invention
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Substrate processing device. Provided is a substrate processing device for forming a metal chalco... |
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Invention
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Etching method and etching device. An etching method according to the present disclosure includes... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus comprises a processing chamber ... |
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Invention
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Display device, recording medium, and display method.
A display method includes acquiring, based... |
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Invention
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Cleaning method and film-forming apparatus.
A cleaning method for cleaning an interior of a proc... |
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Invention
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Film-forming method and film-forming system.
A film-forming method for forming a film on a subst... |
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Invention
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Substrate treatment method and substrate treatment device. This substrate treatment method includ... |
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Invention
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Film-forming method and film-forming apparatus.
A film-forming method for forming a film on a su... |
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Invention
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Method and apparatus for forming two-dimensional material layer. In the present invention, a prec... |
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Invention
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Substrate processing apparatus and substrate processing method. This substrate processing apparat... |
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Invention
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Temperature control stage and inspection device. This temperature control stage comprises: a top ... |
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Invention
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Calibration method and substrate processing system.
Provided is a calibration method for calibra... |
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Invention
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Etching method and etching device. The present invention provides technology for improving throug... |
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Invention
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Information processing method, computer program, and information processing device. Provided are ... |
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Invention
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Method and device for forming boron nitride film. This method for forming a boron nitride film co... |
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Invention
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Film formation method and film formation device. This film formation method for forming, on a sub... |
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Invention
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Substrate treatment method and substrate treatment device. The purpose of the present invention i... |
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Invention
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Plasma processing apparatus and shower head. A plasma processing apparatus has a processing conta... |
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Invention
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Processing method, processing system, and inspection appraratus. This processing method for a sta... |
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Invention
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Method and system for plasma process. A method for a plasma process includes generating plasma wi... |
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Invention
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Selective passivation of photoresists. A method of processing a substrate includes forming a phot... |
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Invention
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System and method for plasma processing. A method for plasma processing includes biasing a substr... |
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Invention
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Hardmask integration for high aspect ratio applications. A method for fabricating semiconductor d... |
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Invention
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Wafer bow metrology system.
Aspects of the present disclosure provide a metrology system for mea... |
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Invention
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Ferroelectric 3d memory block unit.
FeFET memory devices are provided. A semiconductor device in... |
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Invention
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Three-dimensional ferroelectric memory device and methods of fabricating the same.
A semiconduct... |
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G/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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G/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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Invention
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System and method for plasma processing.
A method for plasma processing includes biasing a subst... |
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2023
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Invention
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Multiple input post mix showerhead.
Aspects of the present disclosure provide an apparatus, whic... |
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Invention
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Hardmask integration for high aspect ratio applications.
A method for fabricating semiconductor ... |
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Invention
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System and method to measure ion properties in a plasma system.
A detector for a plasma measurem... |
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Invention
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Method and system for plasma process.
A method for a plasma process includes generating plasma w... |
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Invention
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Device and method for determining wafer bow.
An apparatus for measuring bow of a wafer, includes... |
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G/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines, nam... |
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G/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
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Invention
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Substrate processing apparatus.
Provided is a substrate processing apparatus that has an improve... |
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2022
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings. |
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Invention
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Substrate processing method and substrate processingsystem.
A substrate processing method of pro... |
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Invention
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Substrate processing method and substrate processing apparatus.
A technique enabling wet etching... |
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2021
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G/S
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Semiconductor manufacturing machines and their component parts and fittings; machines for mainten... |
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings; machines for mainte... |
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2020
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G/S
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Semiconductor manufacturing machines and their structural parts; flat panel display manufacturing... |
