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2025
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Invention
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Substrate processing method.
A substrate processing method of etching a SiN film formed on the s... |
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Invention
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Substrate processing system.
A substrate processing system including a substrate processing appa... |
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Invention
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Transfer apparatus.
A transfer apparatus includes a first vacuum transfer module; a first transf... |
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Invention
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Information processing apparatus, computer-readable medium, and information processing method.
A... |
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Invention
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Substrate processing apparatus and maintenance method for substrate processing apparatus.
There ... |
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Invention
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Etching method and plasma processing apparatus.
An etching method is provided. This method inclu... |
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Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing method in... |
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Invention
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Component replacement system.
The component replacement system includes a plasma processing appa... |
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Invention
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Etching method and etching apparatus.
An etching method includes: a) preparing, within a chamber... |
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Invention
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Processing system.
A processing system disclosed includes an atmosphere conveyance module, a con... |
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Invention
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Substrate support, substrate processing apparatus, and substrate support production method.
A su... |
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Invention
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Film forming method and film forming apparatus.
A film forming method includes a first step of s... |
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Invention
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Etching method and etching apparatus.
An etching method includes: exhausting a processing contai... |
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G/S
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Semiconductor manufacturing machines and parts therefor; flat panel display manufacturing machine... |
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
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Invention
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Processing apparatus and shower structure.
A processing apparatus for processing a peripheral ed... |
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Invention
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Information processing method, substrate processing system, and computer-readable recording mediu... |
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Invention
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Substrate processing method and substrate processing system.
A substrate processing method accor... |
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Invention
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Film forming apparatus. Provided is a film forming apparatus in which film thickness distribution... |
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Invention
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Substrate holding mechanism, substrate processing device, and control method. Provided are a subs... |
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Invention
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Substrate processing apparatus and substrate processing method. The present disclosure describes ... |
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Invention
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Measurement device, grinding system, and measurement method. This measurement device measures the... |
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Invention
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Processing system and processing method. A processing system for processing a plurality of dies, ... |
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Invention
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Plasma processing device. A plasma processing device disclosed in the present invention comprises... |
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Invention
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System and method for process chemistry abatement and recycling. A processing system is provided ... |
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Invention
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Information processing method, computer program, and information processing device. Provided are ... |
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Invention
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Gas detection device, gas supply system, and substrate processing apparatus.
A gas detection dev... |
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Invention
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Film formation method and film formation device. This film formation method includes, in order: p... |
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Invention
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Bonding device and bonding method. This bonding device bonds a first substrate and a second subst... |
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Invention
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Processing system, removal jig, and removal method. This processing system comprises: a conveyanc... |
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Invention
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Stage and substrate processing device. A stage according to the present invention adjusts the tem... |
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Invention
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Stage, substrate processing device, and temperature adjustment method. A stage according to the p... |
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Invention
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Method for manufacturing coated member, and film treatment device. Provided are a method for manu... |
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Invention
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Pitch splitting for euv imaging. A method of patterning a substrate includes forming a mandrel ov... |
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Invention
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Imaging mask stacks and methods for lithographically patterning a substrate. The present disclosu... |
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Invention
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Imaging mask stacks and methods for lithographically patterning a substrate.
The present disclos... |
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Invention
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Sin film embedding method and film formation apparatus.
A SiN film embedding method includes: an... |
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G/S
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Installation, maintenance and repair of semiconductor manufacturing machines; installation, maint... |
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G/S
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Installation, maintenance and repair of semiconductor
manufacturing machines; installation, main... |
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Invention
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Optical wafer monitoring. A method for monitoring a dechucking of a wafer includes illuminating, ... |
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Invention
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Angled beam exposure for hardmask based modification. A method for processing a substrate include... |
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Invention
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Metal recess depth measurements by capacitor test structure. A system for testing metal recess de... |
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Invention
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Thermally conductive substrate bonding interface. A bonded substrate structure includes a first s... |
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Invention
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Etching system for forming recessed features with high aspect ratio. A method includes providing ... |
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Invention
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Semiconductor manufacturing apparatus and method for manufacturing semiconductor device.
Accordi... |
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2024
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G/S
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Semiconductor manufacturing machines and their component parts and fittings |
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G/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
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Invention
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Thermally conductive substrate bonding interface.
A bonded substrate structure includes a first ... |
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G/S
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Semiconductor manufacturing machines used for coating and deposition processes, and their compone... |
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Invention
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Methods to quickly adjust the temperature of at least one processing liquid used to process a sem... |
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Invention
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Angled beam exposure for hardmask based modification.
A method for processing a substrate includ... |
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Invention
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Optical wafer monitoring.
A method for monitoring a dechucking of a wafer includes illuminating,... |
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Invention
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Methods of forming ferroelectric devices with metal oxide sidewall spacers.
A method of forming ... |
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Invention
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Pitch splitting for euv imaging.
A method of patterning a substrate includes forming a mandrel o... |
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Invention
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Etching system for forming recessed features with high aspect ratio.
A method includes providing... |
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Invention
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Retainer for circuit substrate conveyance |
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G/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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G/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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2023
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Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
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G/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines, nam... |
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G/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
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2022
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings. |
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2021
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G/S
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Semiconductor manufacturing machines and their component parts and fittings; machines for mainten... |
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings; machines for mainte... |
