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2025
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Invention
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Substrate processing system and substrate processing method for acquiring plasma emission data in... |
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Invention
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Substrate processing system.
A substrate processing system comprises a module having a mounting ... |
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
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Invention
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Plasma processing apparatus, substrate support, and method for correcting wear of edge ring.
A p... |
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Invention
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Plasma processing apparatus, power supply system, and etching method.
A plasma processing appara... |
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Invention
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Computer program, information processing method, and information processing apparatus.
Provided ... |
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Invention
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Etching method and plasma processing apparatus.
The disclosed etching method includes: (a) provi... |
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Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
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Invention
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Film forming method and film forming apparatus.
A film forming method includes: providing a subs... |
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Invention
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Wall member and plasma processing apparatus.
A wall member body is provided in a circumferential... |
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Invention
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Plasma processing apparatus.
There is a plasma processing apparatus, comprising: a plasma proces... |
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Invention
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Substrate processing method and substrate processing system.
According to one embodiment of the ... |
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Invention
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Plasma processing method and plasma processing apparatus.
A plasma processing method includes di... |
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Invention
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Plasma processing apparatus and plasma processing method.
A plasma processing apparatus includes... |
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Invention
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Substrate processing system and trolley.
Provided is a substrate processing system including: a ... |
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Invention
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Lifting mechanism, substrate processing apparatus and lifting method.
A lifting mechanism for ra... |
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Invention
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Radio-frequency power source and plasma processing apparatus.
A radio-frequency power source, in... |
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Invention
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Film formation processing system and method of controlling film formation processing system.
A f... |
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Invention
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Substrate processing method, hard mask forming method, and substrate processing device. Provided ... |
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Invention
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Substrate processing method and substrate processing apparatus.
A substrate processing method in... |
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Invention
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Substrate liquid processing apparatus, substrate liquid processing method, and image processing m... |
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Invention
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Information processing apparatus, temperature control method, and heat treatment apparatus.
An i... |
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Invention
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Recording medium, data generation method, learning model generation method, and information proce... |
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Invention
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Substrate processing method and substrate processing device. A substrate processing method accord... |
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Invention
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Substrate processing apparatus and substrate processing method. This substrate processing apparat... |
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Invention
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Substrate processing method and substrate processing apparatus.
There is a substrate processing ... |
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Invention
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Substrate processing method and substrate processing apparatus.
Provided a substrate processing ... |
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Invention
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Heat treatment system and state monitoring method.
A heat treatment system heat treats a plurali... |
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Invention
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Computer program, method for generating trained model, information processing method, and informa... |
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Invention
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Substrate processing apparatus, calibration substrate, and calibration method.
A substrate proce... |
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Invention
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Computer program, information processing method, substrate processing method, information process... |
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Invention
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Recipe optimization method and heat treatment apparatus.
A recipe optimization method includes: ... |
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Invention
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Film formation method and film formation device. A film formation method according to the present... |
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Invention
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Substrate processing method. This substrate processing method includes: applying atmospheric pres... |
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Invention
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Test system and method for assembling test system. A test system according to the present inventi... |
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Invention
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Substrate processing device and substrate processing method. This substrate processing device is ... |
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Invention
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Information processing apparatus and process condition predicting method.
An information process... |
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Invention
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Mounting table and plasma treatment apparatus. This mounting table comprises: an electrostatic ch... |
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Invention
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Substrate processing method, structure, and film formation device. A substrate processing method ... |
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Invention
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Substrate treatment method and substrate treatment device. A substrate treatment method comprisin... |
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Invention
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Cleaning method and film-forming apparatus.
A cleaning method is for a film-forming apparatus co... |
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G/S
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Installation, maintenance and repair of semiconductor manufacturing machines; installation, maint... |
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G/S
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Installation, maintenance and repair of semiconductor
manufacturing machines; installation, main... |
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Invention
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System and method for plasma process. A method for plasma processing includes providing a substra... |
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Invention
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Methods for controlling the pitch of self-assembled ionic liquid crystal (ilc) structures. Embodi... |
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Invention
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Methods for controlling the phase of self-assembled ionic liquid crystal (ilc) structures. Embodi... |
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Invention
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In situ wafer bond propagation measurement. An example method for measuring bond front propagatio... |
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2024
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G/S
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Semiconductor manufacturing machines and their component parts and fittings |
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G/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
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G/S
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Semiconductor manufacturing machines used for coating and deposition processes, and their compone... |
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Invention
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Systems and methods that utilize metal-coated processing heads to improve wet processing of semic... |
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Invention
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Embedding method and film forming device. An embedding method according to one aspect of the pres... |
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Invention
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Methods for controlling the phase of self-assembled ionic liquid crystal (ilc) structures.
Embod... |
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Invention
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Situ wafer bond propagation measurement.
An example method for measuring bond front propagation ... |
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Invention
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System and method for plasma process.
A method for plasma processing includes providing a substr... |
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Invention
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Systems and methods for wafer processing with sensor technologies.
A method of processing a subs... |
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G/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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G/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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2023
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G/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines, nam... |
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G/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
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2022
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings. |
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2021
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G/S
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Semiconductor manufacturing machines and their component parts and fittings; machines for mainten... |
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G/S
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Semiconductor manufacturing machines and their component
parts and fittings; machines for mainte... |
