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2024
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
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Invention
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Substrate processing method and substrate processing apparatus.
A substrate processing method su... |
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Invention
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Ultra dense 3d routing for compact 3d designs.
A method of microfabrication includes epitaxially... |
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Invention
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Gas cluster assisted plasma processing.
A method for processing a substrate includes forming a p... |
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Invention
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Plasma processing apparatus and plasma processing method.
There is a plasma processing apparatus... |
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Invention
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Substrate support.
A substrate support for use in a substrate processing apparatus includes: a b... |
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Invention
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Electrostatic chuck and plasma processing apparatus.
An electrostatic chuck for supporting a sub... |
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Invention
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Apparatus for plasma processing.
An apparatus for plasma processing includes a first resonating ... |
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Invention
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Plasma processing apparatus and plasma processing method.
An RF system includes: a first RF gene... |
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Invention
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Plasma processing method and plasma processing apparatus.
A plasma processing method includes (a... |
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Invention
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Analysis apparatus, substrate processing system, substrate processing apparatus, analysis method,... |
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P/S
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Semiconductor manufacturing machines and their component parts and fittings |
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Invention
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Edge exposure apparatus and edge exposure method.
An edge exposure apparatus includes a substrat... |
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Invention
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Plasma processing apparatus, substrate processing apparatus, and temperature control system.
A p... |
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Invention
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Semiconductor manufacturing apparatus, information processing apparatus, and radio-frequency vibr... |
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Invention
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Distance measuring device, distance measuring method, bonding apparatus, and bonding method.
A d... |
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Invention
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Film-forming method and film-forming apparatus.
A film-forming method is provided for forming a ... |
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Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
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Invention
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Separating apparatus, separating system and separating method.
A separating apparatus includes a... |
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Invention
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Plasma processing method and plasma processing apparatus. The present invention efficiently clean... |
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Invention
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Information processing apparatus, abnormality detection method, and semiconductor manufacturing s... |
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Invention
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Plasma processing device and plasma processing method. A plasma processing device (1) comprises: ... |
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Invention
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Plasma processing apparatus.
A plasma processing apparatus includes a chamber, a substrate suppo... |
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Invention
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Information processing method, computer program, and information processing device. Provided are ... |
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Invention
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Plasma treatment device, control method, and control program. Provided are a plasma treatment dev... |
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Invention
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Plasma processing method and plasma processing device. One illustrative embodiment of the present... |
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Invention
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Substrate processing device and chuck operation method. This substrate processing device is provi... |
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Invention
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Analysis device and analysis method. Provided is an analysis device that analyzes the state of ea... |
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Invention
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Plasma processing apparatus.
A plasma processing apparatus includes: a chamber including a proce... |
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Invention
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Substrate processing device and positioning method of conveyance arm. This substrate processing d... |
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Invention
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Plasma processing device. The disclosed plasma processing apparatus includes a chamber, a substra... |
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Invention
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Film forming apparatus. The present invention provides a film forming apparatus in which a plural... |
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Invention
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Holding device, joining device, and holding method. A holding device according to an aspect of th... |
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Invention
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Plasma treatment method and plasma treatment device. This plasma treatment method includes a step... |
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Invention
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Method for stacking integrated circuit wafers and dies.
A method includes receiving a first devi... |
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Invention
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Substrate processing method. Provided is a substrate processing method for forming a resist film ... |
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Invention
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Determination method, determination program, substrate processing device, and information process... |
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Invention
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Mounting table and plasma processing apparatus. Disclosed is a mounting table which comprises: a ... |
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Invention
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Plasma processing system, substrate processing system, and gate valve unit. This plasma processin... |
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Invention
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Method of preventing pattern collapse. A method of microfabrication includes forming a sacrificia... |
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Invention
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Processing system and processing method. Disclosed is a processing system for processing a polyme... |
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Invention
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Adsorption control method and film forming apparatus. The present invention provides an adsorptio... |
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Invention
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Process system, method, and substrate chuck. An embodiment apparatus includes a processing chambe... |
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Invention
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Plasma processing method and apparatus. An embodiment plasma processing apparatus includes a plas... |
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P/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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P/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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2023
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Invention
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Grinding method, method for calculating residual amount of cutting edge, and grinding device. Pro... |
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Invention
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Wafer bow mitigation.
A method of processing a substrate that includes: depositing first and sec... |
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Invention
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Plasma processing method and apparatus.
An embodiment plasma processing apparatus includes a pla... |
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Invention
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Process system, method, and substrate chuck.
An embodiment apparatus includes a processing chamb... |
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Invention
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Method of preventing pattern collapse.
A method of microfabrication includes forming a sacrifici... |
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Invention
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Cleaning method, computer storage medium, and substrate treatment system.
A method for cleaning ... |
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P/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines, nam... |
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P/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
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2022
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings. |
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2021
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; machines for mainten... |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; machines for mainte... |
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2020
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P/S
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Semiconductor manufacturing machines and their structural parts; flat panel display manufacturing... |
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P/S
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Semiconductor manufacturing machines |
