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2025
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
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Invention
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Wall member and plasma processing apparatus.
A wall member body is provided in a circumferential... |
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Invention
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Plasma processing apparatus.
There is a plasma processing apparatus, comprising: a plasma proces... |
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Invention
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Substrate processing method and substrate processing system.
According to one embodiment of the ... |
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Invention
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Plasma processing method and plasma processing apparatus.
A plasma processing method includes di... |
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Invention
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Plasma processing apparatus.
To provide a technique capable of improving an in-plane uniformity ... |
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Invention
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Plasma processing apparatus.
A plasma processing apparatus includes a plasma processing chamber;... |
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Invention
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Plasma processing apparatus and plasma processing method.
A plasma processing apparatus includes... |
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Invention
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Plasma processing method and plasma processing system.
A plasma processing method includes: (a) ... |
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Invention
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Etching method and plasma processing apparatus.
In one exemplary embodiment, an etching method i... |
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Invention
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Substrate processing system and trolley.
Provided is a substrate processing system including: a ... |
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Invention
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Plasma processing method, precoat forming method, and plasma processing apparatus.
In one exempl... |
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Invention
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Film forming method and substrate processing apparatus.
A film forming method of forming a carbo... |
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Invention
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Etching method and plasma processing apparatus.
In one exemplary embodiment, an etching method m... |
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Invention
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Non-transitory computer readable storage medium, analysis method, and analyzer.
An analyzer that... |
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Invention
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Anomaly detection method and plasma processing device.
An anomaly detection method includes chan... |
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Invention
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Substrate support and method of regenerating substrate support.
A substrate support includes a m... |
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Invention
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Measuring instrument and measuring method.
A measuring instrument according to an exemplary embo... |
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Invention
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Computer program, information processing method, and information processing device.
A non-transi... |
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Invention
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Electrostatic chuck.
A technique improves temperature uniformity in a substrate held by an elect... |
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Invention
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Plasma processing apparatus and plasma processing method.
The disclosed plasma processing appara... |
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Invention
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Device for performing plasma treatment, and method for performing plasma treatment.
There is pro... |
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Invention
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Pulsed capacitively coupled plasma processes.
A method of plasma processing includes cyclically ... |
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Invention
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Recording medium, data generation method, learning model generation method, and information proce... |
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Invention
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Recording medium, information processing method, and information processing device.
A computer-r... |
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Invention
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Substrate holding device and bonding system.
A substrate holding device includes a main body, a ... |
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Invention
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Recipe optimization method and heat treatment apparatus.
A recipe optimization method includes: ... |
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Invention
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Plasma processing apparatus and matching device.
A plasma processing apparatus includes: a gas s... |
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Invention
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Information processing apparatus and process condition predicting method.
An information process... |
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Invention
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Substrate treatment method and substrate treatment device. A substrate treatment method comprisin... |
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Invention
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Substrate processing method, structure, and film formation device. A substrate processing method ... |
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Invention
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Cleaning method and film-forming apparatus.
A cleaning method is for a film-forming apparatus co... |
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Invention
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Power transmission system and power transmission method. This power transmission system includes ... |
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Invention
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Film formation apparatus, film formation method, and substrate support member.
A film formation ... |
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Invention
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Substrate liquid processing device, substrate liquid processing method, and computer-readable rec... |
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Invention
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Inspection system and inspection method. Provided is a technology that makes it possible to reduc... |
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Invention
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Bonding device and bonding method. In the present invention, a carrier has a carrier substrate, a... |
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Invention
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Plasma processing device. This plasma processing device is provided with a plasma processing cham... |
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Invention
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Method for controlling plasma measurement system and plasma measurement system.
Provided is a me... |
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P/S
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Installation, maintenance and repair of semiconductor manufacturing machines; installation, maint... |
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P/S
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Installation, maintenance and repair of semiconductor
manufacturing machines; installation, main... |
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Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
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Invention
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Substrate processing method and substrate processing apparatus.
A technique capable of controlli... |
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Invention
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Substrate processing method and substrate processing apparatus.
A technique capable of adjusting... |
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Invention
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System and method for plasma process. A method for plasma processing includes providing a substra... |
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Invention
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Systems and methods for wafer processing with sensor technologies. A method of processing a subst... |
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Invention
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Stress control of high-density carbon hardmask (chm). A method of microfabrication is provided. T... |
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Invention
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Plasma processing apparatus and plasma processing method.
In a plasma processing apparatus, a ra... |
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2024
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P/S
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Semiconductor manufacturing machines and their component parts and fittings |
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
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P/S
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Semiconductor manufacturing machines used for coating and deposition processes, and their compone... |
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Invention
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System and method for plasma process.
A method for plasma processing includes providing a substr... |
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Invention
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Systems and methods for wafer processing with sensor technologies.
A method of processing a subs... |
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Invention
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Stress control of high-density carbon hardmask (chm).
A method of microfabrication is provided. ... |
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Invention
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Wafer cleaning method and system.
A wafer processing method and system are provided. The wafer p... |
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P/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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P/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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2023
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P/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines, nam... |
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P/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
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Invention
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Coating film forming apparatus, coating film forming method, and storage medium.
A coating film ... |
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2022
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings. |
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2021
|
P/S
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Semiconductor manufacturing machines and their component parts and fittings; machines for mainten... |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; machines for mainte... |
