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2025
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P/S
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Installation, maintenance and repair of semiconductor
manufacturing machines; installation, main... |
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Invention
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Film formation method and substrate processing apparatus.
A film formation method of forming, in... |
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Invention
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Plasma treatment device and etching method.
A plasma processing apparatus is provided. The appar... |
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Invention
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Plasma treatment device and plasma treatment method.
A plasma processing apparatus, comprising: ... |
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Invention
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Stage and substrate processing apparatus.
A stage includes a first member made of a material hav... |
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Invention
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Substrate treatment system.
A substrate processing system comprising: a plasma processing appara... |
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Invention
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Substrate processing method and substrate processing system.
A substrate processing method inclu... |
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Invention
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Substrate processing method and substrate processing apparatus.
A substrate processing method fo... |
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Invention
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Plasma processing apparatus and power supply system.
A technique for improving controllability o... |
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Invention
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Cooling device, substrate processing apparatus, and cooling method.
A cooling device that cools ... |
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Invention
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Substrate evaluation method and substrate processing apparatus.
A substrate evaluation method in... |
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Invention
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Film deposition apparatus for fine pattern forming.
In a mask pattern forming method, a resist f... |
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Invention
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Film forming method and film forming apparatus.
A film forming method includes: preparing a subs... |
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Invention
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Plasma processing apparatus and plasma processing method.
A plasma processing apparatus is discl... |
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Invention
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Plasma processing apparatus.
A plasma processing apparatus includes: a plasma process chamber; a... |
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2024
|
Invention
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Substrate processing apparatus, substrate processing method, and filter.
A substrate processing ... |
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Invention
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Substrate-processing apparatus and substrate-processing method.
A substrate-processing apparatus... |
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Invention
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Gas box and semiconductor manufacturing apparatus.
A gas box includes: a first housing having a ... |
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Invention
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Materials and methods for forming patterned mask on substrate.
A method includes depositing an o... |
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Invention
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Anti-spacer masking process using resist layer with solubility shifting agent. A method for formi... |
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Invention
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Anti-spacer masking process using resist layer with solubility shifting agent.
A method for form... |
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Invention
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Materials and methods for forming patterned mask on substrate.
A method includes forming mandrel... |
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Invention
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Masking process using switchable polymer.
A method for forming a patterned mask can include prov... |
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Invention
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Anti-spacer masking process using second switchable polymer.
A method for forming a patterned ma... |
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Invention
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Detection method, substrate processing system, and control program. Provided is a detection metho... |
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Invention
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Substrate processing device and substrate processing method. A substrate processing device that p... |
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Invention
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Substrate processing device and electrostatic chuck. This electrostatic chuck comprises a chuck m... |
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Invention
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Plasma processing device, prediction method, prediction program, and information processing devic... |
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Invention
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Substrate processing device and substrate temperature control method. An acquisition unit accordi... |
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Invention
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Substrate processing system and substrate processing method. The present disclosure provides a me... |
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Invention
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Processing liquid supply device and processing liquid supply method. The present disclosure expla... |
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P/S
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Semiconductor manufacturing machines and their component parts and fittings |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
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Invention
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Processing system and processing method. A processing system for mounting a plurality of types of... |
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Invention
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Etching method and substrate processing apparatus. The present invention provides a technique for... |
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Invention
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Correcting of design and mask shape position due to die and wafer distortion for bonding. Aspects... |
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
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Invention
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Plasma processing device. The present invention provides a plasma processing device in which wear... |
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P/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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P/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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Invention
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Integrated optical nanothermometry for real-time wafer temperature monitoring during processing. ... |
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Invention
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Selective deposition on metal-containing mask using promoter.
A method of selective deposition o... |
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Invention
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Methods for protecting a peripheral edge and backside of a semiconductor substrate.
Various embo... |
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Invention
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Method and system for plasma process.
A method for generating a bias voltage includes generating... |
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Invention
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Method and system for plasma process.
A method for plasma processing includes providing a tailor... |
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Invention
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Substrate support with printed heater.
A substrate support includes a top plate including a diel... |
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Invention
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Correcting of design and mask shape position due to die and wafer distortion for bonding.
Aspect... |
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Invention
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Fault detection and classification (fdc) for endpoint detection (epd) by reflectometry.
A method... |
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2023
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P/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines, nam... |
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P/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
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Invention
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Device for storing liquid, system for processing substrate, and method for identifying liquid lev... |
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Invention
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Inspection apparatus.
There is provided an inspection apparatus for inspecting a device to be in... |
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Invention
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Filling method and substrate processing system.
A filling method of filling a film containing a ... |
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Invention
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Monitoring substrate and monitoring method.
A monitoring substrate for monitoring the inside of ... |
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2022
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings. |
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2021
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Invention
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Substrate treatment system and substrate treatment method.
A substrate treatment system connecte... |
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; machines for mainten... |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; machines for mainte... |
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2020
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P/S
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Semiconductor manufacturing machines and their structural parts; flat panel display manufacturing... |
