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2025
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Invention
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Measurement apparatus, measurement method, and calibration method.
A measurement apparatus inclu... |
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Invention
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Etching method and plasma processing apparatus.
A plasma processing apparatus includes a chamber... |
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Invention
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Substrate processing apparatus and shutter.
A substrate processing apparatus comprises a substra... |
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Invention
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Virtual metrology apparatus, virtual metrology method, and virtual metrology program.
A virtual ... |
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Invention
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Substrate processing apparatus and substrate holding method.
An electrostatic chuck is provided ... |
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Invention
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Member in a semiconductor manufacturing apparatus and member manufacturing method.
A member used... |
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Invention
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Plasma processing method and plasma processing apparatus.
A plasma processing method includes:
... |
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Invention
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Substrate processing apparatus.
There is provided a substrate processing apparatus for processin... |
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Invention
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Semiconductor processing platform using plural heat pumps for reduced energy consumption.
A syst... |
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Invention
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Semiconductor processing platform for reduced energy consumption.
A system includes one or more ... |
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Invention
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Semiconductor processing platform using heat pump for reduced energy consumption.
A system inclu... |
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Invention
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Semiconductor processing platform using cascaded heat pumps for reduced energy consumption.
A sy... |
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Invention
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Semiconductor processing platform for reduced energy consumption. A system includes one or more s... |
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Invention
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Semiconductor processing platform using cascaded heat pumps for reduced energy consumption. A sys... |
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Invention
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Semiconductor processing platform using plural heat pumps for reduced energy consumption. A syste... |
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Invention
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Vacuum processing apparatus and method for exhausting the same. [Problem] To improve energy effic... |
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Invention
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Bonding apparatus, bonding system, and bonding method.
A bonding apparatus includes a first hold... |
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Invention
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Abnormality detection method and substrate treatment device. An abnormality detection method for ... |
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P/S
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Semiconductor manufacturing machines and parts therefor; flat panel display manufacturing machine... |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
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Invention
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Semiconductor manufacturing device and temperature adjustment method. This semiconductor manufact... |
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Invention
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Matching device and plasma processing apparatus.
A matching device includes: a plurality of reac... |
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Invention
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Systems and low temperature methods of forming ferroelectric device electrodes. A method of formi... |
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Invention
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Plasma processing apparatus.
A plasma processing apparatus includes: a chamber; an introducer di... |
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Invention
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Rinse processing conditions determination method, substrate processing method, and substrate proc... |
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Invention
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State determination device, state determination method, and state determination program. Provided... |
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Invention
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Pick-up device, bonding device, pick-up method, and bonding method. A pick-up device according to... |
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Invention
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Substrate processing device. Provided is a technique for simplifying assembly and maintenance of ... |
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Invention
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Plasma processing device. A first heater is provided in an interior portion of an electrostatic c... |
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Invention
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Processing device, cleaning method, and electrostatic chuck. This processing device comprises a c... |
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Invention
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Filter circuit and plasma processing apparatus.
A filter circuit comprises an input port configu... |
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Invention
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Substrate processing device. Provided is a technique for improving throughput in substrate surfac... |
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Invention
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Method for manufacturing silicon article, silicon article, and plasma processing device. A method... |
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Invention
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Plasma processing apparatus and assembly method. This plasma processing apparatus comprises: a sh... |
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Invention
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Film forming apparatus and determination method.
A film forming apparatus performs a film formin... |
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Invention
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Film forming method, film forming apparatus, and metal hard mask. This film forming method includ... |
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Invention
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Plasma treatment device and power supply system. The present invention controls the ion incidence... |
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Invention
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Pattern forming method. This pattern forming method includes steps (a)–(f). In step (a), a substr... |
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Invention
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Substrate processing method and substrate processing device. A substrate processing method accord... |
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Invention
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Substrate processing method and substrate processing system. This substrate processing method com... |
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Invention
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Substrate processing method and substrate processing device. Provided is a substrate processing m... |
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Invention
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Contactless wafer positioning carrier design. A method of wafer handling includes providing a waf... |
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Invention
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Method for forming p-type tin oxide film, and film deposition device. [Problem] To easily produce... |
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Invention
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Vertically mounted processing system.
A method for processing a wafer includes receiving the waf... |
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Invention
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Recessed structure formation method. A recessed structure formation method according to one embod... |
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P/S
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Installation, maintenance and repair of semiconductor manufacturing machines; installation, maint... |
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P/S
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Installation, maintenance and repair of semiconductor
manufacturing machines; installation, main... |
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Invention
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Plasma processing system with continuous bias power and source power. A plasma processing system ... |
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2024
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P/S
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Semiconductor manufacturing machines and their component parts and fittings |
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
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P/S
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Semiconductor manufacturing machines used for coating and deposition processes, and their compone... |
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Invention
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Contactless wafer positioning carrier design.
A method of wafer handling includes providing a wa... |
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Invention
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Systems and low temperature methods of forming ferroelectric device electrodes.
A method of form... |
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Invention
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Plasma treatment for deposition of metals.
In one example, a method for depositing ruthenium inc... |
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Invention
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Plasma processing system with continuous bias power and source power.
A plasma processing system... |
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Invention
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Method for producing semiconductor device. This method for producing a semiconductor device inclu... |
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Invention
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Method for manufacturing semiconductor apparatus. Provided is a method for manufacturing a semico... |
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P/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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P/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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2023
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P/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines, nam... |
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P/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
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2022
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings. |
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2021
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; machines for mainten... |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; machines for mainte... |
