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2025
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Invention
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Multi-beam particle microscope with improved beam tube.
A multi-beam particle microscope compris... |
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Invention
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Particle-optical arrangement, in particular multi-beam particle microscope, with a magnet arrange... |
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2024
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Invention
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Multi-beam charged particle microscope design with mirror for field curvature correction.
A mult... |
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Invention
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Multi-beam system and multi-beam forming unit with reduced sensitivity to secondary radiation.
A... |
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Invention
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Frame aggregation using filter for reducing charging artifacts. Techniques of post-processing a f... |
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Invention
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Multi-beam charged particle microscope for inspection with reduced charging effects. A multi-beam... |
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Invention
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Method for operating a multi-beam particle microscope, computer program product and multi-beam pa... |
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Invention
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Method for voltage contrast imaging with a corpuscular multi-beam microscope, corpuscular multi-b... |
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Invention
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Multi-beam charged particle imaging system with improved imaging of secondary electron beamlets o... |
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Invention
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Method for producing a micro-optical unit for a multiple particle beam system, micro-optical unit... |
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Invention
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Multi-beam particle microscope with improved alignment and method for aligning the multi-beam par... |
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Invention
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Frame aggregation for multi-beam raster scanning microscopes. Various examples pertain to frame-a... |
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Invention
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Multi-beam charged particle microscope design with improved detection system for secondary electr... |
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Invention
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Monolithic multi-aperture plate for a multi-beam electron beam system. A monolithic multi-apertur... |
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Invention
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Method for operating a multiple particle beam system, calibration method for a multiple particle ... |
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Invention
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Multi-beam generating unit with increased focusing power. An improvement to a multipole array for... |
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Invention
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Multi-beam particle microscope for reducing particle beam-induced traces on a sample.
A multi-be... |
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Invention
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Multi-beam system and multi-beam generating unit with reduced sensitivity to drift and damages.
... |
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Invention
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Multiple charged particle beam system with a mirror mode of operation, method for operating a mul... |
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Invention
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Multi-beam particle beam system having an electrostatic booster lens, method for operating a mult... |
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Invention
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Valves for charged particle beam microscope, valve member and charged particle beam microscope.
... |
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Invention
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Method for operating a multiple particle beam system while altering the numerical aperture, assoc... |
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Invention
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Multiple particle beam system, in particular multi-beam particle microscope, having a fast magnet... |
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Invention
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Method for the automated mechanical adjustment of a particle beam column, associated computer pro... |
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Invention
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Method for operating a multi-beam particle beam microscope.
A method for operating a multi-beam ... |
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Invention
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Multi-beam charged particle microscope for inspection with increased throughput. A multi-beam cha... |
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Invention
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Method of global and local optimization of imaging resolution in a multibeam system.
A multi-bea... |
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Invention
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Multi-beam particle microscope with a quickly replaceable particle source, and method for quickly... |
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Invention
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Multi-beam charged particle microscope for inspection with improved image contrast. A multi-beam ... |
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Invention
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Method for operating a multi-beam particle microscope in a contrast operating mode with defocused... |
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Invention
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Monitoring of imaging parameters of scanning electron microscopy. Techniques are disclosed that e... |
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Invention
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Multi-beam particle beam system and method for operating the same. A multi-beam particle microsco... |
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Invention
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System comprising a multi-beam particle microscope and method for operating the same. A system in... |
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Invention
|
Multi-beam generating unit with increased focusing power.
A multi-beam generation unit for a mul... |
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Invention
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Fast closed-loop control of multi-beam charged particle system. Various examples of the disclosur... |
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Invention
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Method for analyzing disturbing influences in a multi-beam particle microscope, associated comput... |
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Invention
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Multi-beam charged particle microscope with a detection unit for fast compensation of charging ef... |
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Invention
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Multi-beam particle microscope with improved multi-beam generator for field curvature correction ... |
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Invention
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Method for designing a multi-beam particle beam system having monolithic path trajectory correcti... |
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Invention
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Method for defect detection in a semiconductor sample in sample images with distortion.
A method... |
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Invention
|
Multi-beam particle microscope with improved beam current control.
A multi-beam particle microsc... |
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2023
|
Invention
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Method for operating a multi-beam particle microscope with fast closed-loop beam current control,... |
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Invention
|
Multi-beam charged particle microscope design with detection system for fast charge compensation.... |
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Invention
|
Multi-beam particle microscope comprising an aberration correction unit having geometry-based cor... |
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|
Invention
|
Multi-beam charged particle imaging system with reduced charging effects. A method for imaging of... |
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|
Invention
|
Multi-beam particle beam system.
A multi-beam particle beam system comprises a particle beam sou... |
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Invention
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Multi-beam charged particle microscope design with anisotropic filtering for improved image contr... |
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2022
|
Invention
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Multi-beam charged particle beam system with anisotropic filtering for improved image contrast.
... |
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2020
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G/S
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electron microscopes and parts thereof |
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G/S
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Electron microscopes and parts therefor. |
