- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/36 - Gas-filled discharge tubes for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation
Patent holdings for IPC class H01J 37/36
Total number of patents in this class: 27
10-year publication summary
|
4
|
2
|
6
|
2
|
3
|
2
|
3
|
1
|
2
|
1
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Varian Semiconductor Equipment Associates, Inc. | 1231 |
4 |
| Axcelis Technologies, Inc. | 419 |
3 |
| Tokyo Electron Limited | 12877 |
2 |
| Lam Research Corporation | 5309 |
2 |
| Applied Materials, Inc. | 18861 |
1 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 43258 |
1 |
| Lapis Semiconductor Co., Ltd. | 876 |
1 |
| The Regents of the University of Michigan | 4739 |
1 |
| Carl Zeiss SMT GmbH | 3019 |
1 |
| Advanced Energy Industries, Inc. | 476 |
1 |
| Denka Company Limited | 2600 |
1 |
| Eagle Harbor Technologies, Inc. | 78 |
1 |
| Gatan, Inc. | 105 |
1 |
| Hauzer Techno-coating B.V. | 8 |
1 |
| ION Beam Services | 33 |
1 |
| Nissin ION Equipment Co., Ltd. | 85 |
1 |
| Universidade Federal de Santa Catarina | 8 |
1 |
| Veeco Instruments Inc. | 331 |
1 |
| Shanghai IC R&D Center Co., Ltd | 189 |
1 |
| Changxin Memory Technologies, Inc. | 4927 |
1 |
| Other owners | 0 |