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2025
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G/S
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Radio frequency power supplies for semiconductor applications |
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Invention
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Robust tensorized shaped setpoint waveform streaming control.
Various illustrative aspects are d... |
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Invention
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Systems and methods for delay and amplitude correction.
This disclosure describes systems, metho... |
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G/S
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Phosphor coating for temperature probes. |
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G/S
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Power controllers |
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G/S
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software for use in the design and configuration of power systems and power supplies. computer se... |
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Invention
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Electrostatic wafer clamping and sensing system. An electrostatic wafer clamping and sensing syst... |
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G/S
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Phosphor coating for temperature probes |
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G/S
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AC/DC converters. |
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G/S
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AC/DC converters. |
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G/S
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Electronic power conversion products, namely, radio
frequency control systems and match networks. |
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G/S
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phosphor coating for temperature probes |
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G/S
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Impedance matching products, namely radio frequency match
network products; impedance alteration... |
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2024
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G/S
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Electronic devices, namely, power supplies, power supply inverters, power shelves in the nature o... |
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G/S
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Electronic power conversion products, namely, radio frequency control systems and match networks ... |
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Invention
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Multi-phase voltage converter current balancing.
A multi-phase power supply circuit comprises a ... |
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Invention
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Open circuit and back-surge protection for power supplies. This disclosure describes systems, met... |
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Invention
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Capacitance sensing systems and methods. Systems, methods, and apparatuses for measuring capacita... |
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Invention
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Apparatus and method for ground fault monitoring.
An apparatus for ground fault monitoring compr... |
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Invention
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Match network with variable capacitance and switchable array of solid-state capacitance. A match ... |
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Invention
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Transient control of an asymmetric waveform. A bias supply comprising power circuitry configured ... |
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Invention
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Apparatus, system and method to reduce crazing.
A coating system that reduces parasitic currents... |
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Invention
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Match network with switchable variable capacitance. A match network with switchable variable capa... |
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Invention
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Current clamp for parallel switches.
Various embodiments are directed to a switch circuit compri... |
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Invention
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Control of plasma sheath with bias supplies.
Systems and methods for plasma processing are discl... |
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Invention
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Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mod... |
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Invention
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High voltage power supply for fast voltage changes. The disclosure describes a high voltage power... |
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Invention
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Enhanced capacitance sensing system for electrostatic chuck devices. An electrostatic chuck syste... |
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Invention
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System with multiple power controllers to reduce harmonics.
A power controller system comprises ... |
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Invention
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Surface charge and power feedback and control using a switch mode bias system.
Systems, methods ... |
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G/S
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AC/DC converters |
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Invention
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Model reference adaptive control with signum projection tensor operations.
An example device com... |
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G/S
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Temperature measurement products, namely pyrometers. |
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Invention
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Rf sputtering of multiple electrodes with optimized plasma coupling through the implementation of... |
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Invention
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Match network design for use with frequency sweeping. Match networks, systems, and methods are di... |
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G/S
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Impedance matching products, namely radio frequency match network products in the nature of radio... |
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Invention
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Plasma behaviors predicted by current measurements during asymmetric bias waveform application. A... |
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Invention
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Gas flow diffusors for remote plasma sources. A remote plasma source (RPS) may include a toroidal... |
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Invention
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Active switch on time control for bias supply. Bias supplies and plasma processing systems are di... |
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Invention
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Capacitance sensing systems and methods.
Systems, methods, and apparatuses for measuring capacit... |
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Invention
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Active switch leakage current diversion. A power supply component comprising a supply node to pro... |
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Invention
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Phase shift scheme to optimize thermal efficiency for full-bridge converters. A power converter m... |
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Invention
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Transition control in a bias supply.
Bias supplies and bias control methods are disclosed. One m... |
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Invention
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System and method of determining a load voltage in a power converter. Determining a load voltage ... |
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Invention
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Cascoded high-voltage amplifier. A cascoded high-voltage amplifier is disclosed. The amplifier ca... |
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Invention
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Class d-h preamplifier and cascoded high-voltage amplifier.
A cascoded high-voltage amplifier wi... |
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Invention
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Electrostatic wafer clamping and sensing system.
An electrostatic wafer clamping and sensing sys... |
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G/S
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temperature measurement products, namely, pyrometers |
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Invention
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Busbar assembly and method of making.
A busbar assembly comprises a first busbar having a first ... |
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2023
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Invention
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Open circuit and back-surge protection for power supplies.
This disclosure describes systems, me... |
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G/S
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Power modules being electrical power supplies, AC/DC power supplies, and DC/DC power supplies |
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Invention
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Match network with variable capacitance and switchable array of solid-state capacitance.
A match... |
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Invention
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Transient control of an asymmetric waveform.
A bias supply comprising power circuitry configured... |
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Invention
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Match network with switchable variable capacitance.
A match network with switchable variable cap... |
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G/S
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Power supplies, namely radio frequency plasma generators for
use in semiconductor and industrial... |
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Invention
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High voltage power supplies for fast voltage changes.
The disclosure describes a high voltage po... |
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Invention
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Enhanced capacitance sensing system for electrostatic chuck devices.
An electrostatic chuck syst... |
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G/S
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Power supplies; DC/DC power converters; AC/DC power converters; Power supplies, DC/DC power conve... |
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Invention
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Rf sputtering of multiple electrodes with optimized plamsa coupling through the implementation of... |
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Invention
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Match network design for use with frequency sweeping.
Match networks, systems, and methods are d... |
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Invention
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Passive capacitance sensing. Devices and methods for measuring capacitance of a load. A device ma... |
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Invention
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Plasma behaviors predicted by current measurements during asymmetric bias waveform application.
... |
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Invention
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Active switch leakage current diversion.
A power supply component comprising a supply node to pr... |
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Invention
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Over-energy protection for a power supply. An energy delivery system comprises a power supply con... |
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Invention
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Phase shift scheme to optimize thermal efficiency for full-bridge converter.
A power converter m... |
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G/S
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Radio frequency power supplies for generating and supplying radio frequency energy to produce pla... |
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Invention
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Cascoded high-voltage amplifier.
A cascoded high-voltage amplifier is disclosed. The amplifier c... |
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Invention
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Shielding for capacitance sensing.
Systems, methods, and apparatuses for measuring capacitance o... |
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2022
|
G/S
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Phosphor-coated fiber optic temperature measurement probes
for controlling processes involving r... |
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G/S
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Downloadable computer software to monitor power delivery
systems and perform analytics related t... |
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G/S
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Phosphor-coated fiber optic temperature measurement probes for controlling processes involving RF... |
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G/S
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Downloadable computer software to monitor power delivery systems and perform analytics related to... |
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2021
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G/S
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High voltage power supplies. |
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G/S
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Computer services, namely, providing online non-downloadable
computer software for installing, m... |
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G/S
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Power controllers; power supplies. |
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G/S
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Computer Services, namely, providing online non-downloadable computer software for installing, mo... |
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G/S
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High Voltage Power Supplies |
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G/S
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Power controllers; Power supplies |
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G/S
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High voltage multipliers; High voltage reactors; High voltage transformers; Power supplies; Power... |
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G/S
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Electrostatic voltmeters; instrumentation for locating
static charge and measuring ionizer perfo... |
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G/S
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Electrostatic voltmeters; instrumentation for locating static charge and measuring ionizer perfor... |
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2020
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G/S
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Electronic devices, namely, power generators. Electronic devices, namely, power supplies, power i... |
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G/S
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Remote plasma sources, namely, apparatus for delivery of
activated gases for etching, deposition... |
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G/S
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Electronic devices, namely, power supplies, power generators, power inverters, power shelves in t... |
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G/S
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Electronic devices, namely, power amplifiers and fiber optic temperature sensors |
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G/S
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Remote plasma sources, namely, electronic apparatus for delivery of activated gases for etching, ... |
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2019
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G/S
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Electronic controllers for use with power converters; Electronic controllers used to reduce power... |
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2017
|
G/S
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Power Controllers; Power supplies |
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G/S
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Provision of technical information relating to the
installation, overhaul, maintenance and repai... |
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G/S
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Providing technical support services, namely, technical advice in the field of overhaul, maintena... |
