|
2025
|
Invention
|
Vaporizer, method, and ion source including vaporizer.
A vaporizer includes a crucible in which ... |
|
2024
|
Invention
|
Ion implantation apparatus.
An ion implantation apparatus for performing channeling ion implanta... |
|
|
Invention
|
Vaporizer, ion source and method for generating aluminum-containing vapor.
An ion source include... |
|
|
Invention
|
Wafer clamping method and semiconductor manufacturing apparatus. A semiconductor manufacturing ap... |
|
|
G/S
|
Semiconductor manufacturing machines; ion implanter machines; surface treatment equipment using i... |
|
|
Invention
|
Ion implanter and ion implantation method.
An ion implanter includes an angle measurement appara... |
|
|
Invention
|
Ion beam irradiation method and ion beam irradiation apparatus.
An ion beam irradiation method i... |
|
2023
|
Invention
|
Plasma source.
A plasma source includes a chamber in which plasma is generated, a cathode provid... |
|
|
Invention
|
Ion beam extraction electrode, ion source and extraction electrode structure.
An ion beam extrac... |
|
|
Invention
|
Vaporizer, ion source, ion beam irradiation apparatus, and an operating method for a vaporizer.
... |
|
|
Invention
|
Ion source and operating method thereof.
An ion source includes a vaporizer, a plasma chamber, a... |
|
|
Invention
|
Ion beam irradiation apparatus and method.
An ion beam irradiation apparatus includes a plasma g... |
|
2022
|
Invention
|
Vaporizer, ion source and method for generating aluminum-containing vapor. An ion source includes... |
|
|
Invention
|
Substrate transfer device.
A substrate transfer device includes a shaft member rotationally mova... |
|
|
Invention
|
Substrate transfer apparatus. This substrate transfer apparatus (10) comprises a rod member (15) ... |
|
|
Invention
|
Substrate holding device. Provided is a substrate holding device comprising: a holder that holds ... |
|
|
Invention
|
Hydrogen supply device, and ion beam irradiation apparatus equipped therewith. A hydrogen supply ... |
|
|
Invention
|
Ion beam irradiation apparatus and program therefor. An ion beam irradiation apparatus includes m... |
|
|
Invention
|
Vaporizer, ion source and method for generating aluminum-containing vapor. A vaporizer includes a... |
|
|
Invention
|
Wafer supporting device. A wafer support device includes a support base having a wafer-facing sur... |
|
|
Invention
|
Ion beam irradiation apparatus.
The ion beam irradiation apparatus 10 includes a vacuum vessel 1... |
|
2021
|
Invention
|
Ion implantation apparatus. An ion implantation apparatus includes a transfer device that transfe... |
|
|
Invention
|
Wafer separating apparatus, and wafer separating method. A wafer separating apparatus and method ... |
|
|
Invention
|
Substrate cooling device.
A substrate cooling device is provided and includes a device body and ... |
|
2020
|
Invention
|
Heating device. A heating device is provided. The heating device includes a conveyance member, fi... |
|
|
Invention
|
Beam profile determination method and ion beam irradiation apparatus. A beam profile determinatio... |
|
|
Invention
|
Ion beam extraction electrode |
|
|
Invention
|
Substrate heating device. A substrate heating device is provided. The substrate heating device in... |
|
|
Invention
|
Mass separator using retractable magnetic yoke on a beam bending path. d) positioned at a side of... |
|
|
Invention
|
Substrate accommodation device. A substrate accommodation device includes a casing, a gas supply ... |
|
|
Invention
|
Ion source and cleaning method thereof. An ion source includes a plasma chamber, and a suppressio... |
|
2019
|
Invention
|
Substrate temperature measurement device and an apparatus having substrate temperature measuremen... |
|
|
Invention
|
Ion beam irradiation apparatus. An apparatus provided with a wafer processing chamber that houses... |
|
|
Invention
|
Substrate holding device. A substrate holding device is provided. The substrate holding device in... |
|
|
Invention
|
Ion source. An ion source is provided. The ion source includes a plasma generation chamber, a pla... |
|
|
Invention
|
Method for neutralizing ion beam, and apparatus using the method. A method and apparatus are prov... |
|
|
Invention
|
Systems and methods for substrate cooling.
An apparatus is provided for cooling a substrate. The... |
|
|
Invention
|
Ion beam irradiation apparatus. An apparatus is provided. The apparatus includes a beam current m... |
|
|
Invention
|
Ion source, ion beam irradiation apparatus, and operating method for ion source. An ion source is... |
|
2018
|
Invention
|
Ion source and ion implantation apparatus. An ion source for improving beam transport efficiency ... |
|
|
Invention
|
Plasma source. A plasma source is provided. The plasma source includes a chamber body inside whic... |
|
|
Invention
|
Plasma source. A plasma source is provided. The plasma source includes a chamber body, a supply p... |
|
|
Invention
|
Plasma generation system. A plasma generation system is provided that includes an elongated plasm... |
|
2017
|
Invention
|
Ion implanter.
An ion implanter is provided that includes an ion source configured to generate a... |
|
|
Invention
|
Ion implanter. An ion implanter (200) is provided that includes an ion source (210) configured to... |
|
|
Invention
|
Ion source. An ion source is provided that includes a gas source for supplying a gas, and an ioni... |
|
|
Invention
|
Heating device and semiconductor manufacturing apparatus. A heating device is provided. The heati... |
|
|
Invention
|
Method for cooling semiconductor manufacturing apparatus and substrate support apparatus. A semic... |
|
2016
|
Invention
|
Ion beam irradiation apparatus. An ion beam irradiation apparatus is provided. The apparatus incl... |
|
|
Invention
|
Beam current measuring device and charged particle beam irradiation apparatus. A beam current mea... |
|
2009
|
G/S
|
Semiconductor manufacturing machines, namely, ion implanters for manufacturing semiconductors |
|
|
G/S
|
Semiconductor manufacturing machines, namely, ion implanters
for manufacturing semiconductors. |
|
2007
|
G/S
|
Semiconductor manufacturing machines |
|
2006
|
G/S
|
Semiconductor manufacturing machines; ion implantation machines for manufacturing semiconductors,... |
