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2025
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G/S
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Manufacturing machines for semiconductors, plasma machines, optical surface treatment machines, m... |
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2024
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G/S
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Manufacturing machines for semiconductors, plasma machines,
optical surface treatment machines, ... |
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2022
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Invention
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Method for manufacturing a photovoltaic cell. Disclosed is a method for manufacturing a high-temp... |
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2019
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Invention
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Device for improving the mobility of carriers in a mosfet channel on silicon carbide. A MOSFET de... |
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Invention
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Device for improving the mobility of carriers in a mosfet channel on silicon carbide. The present... |
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Invention
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Method for doping silicon sheets.
A method of doping a silicon wafer in order to fabricate a pho... |
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2016
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Invention
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Method of controlling an implanter operating in plasma immersion. an expulsion stage (4) for expe... |
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Invention
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Control method and bias supply for a plasma-immersion ion implanter. The invention relates to a c... |
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Invention
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A method of stabilizing a substrate and a machine for performing the method.
A method of treatin... |
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Invention
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Method for stabilizing a substrate and machine for implementing same. The present invention relat... |
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2015
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Invention
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Method for installing a gas diffusion device.
The present invention relates to a method of impla... |
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Invention
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Method for installing a gas diffusion device. The present invention relates to a method for impla... |
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Invention
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Electrostatic heating substrate holder which is polarised at high voltage. at least one electrica... |
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Invention
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Electrostatic heating substrate holder which is polarised at high voltage. The present invention ... |
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2014
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Invention
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Method for producing a solar cell.
The invention relates to a method for producing a solar cell ... |
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Invention
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Method for producing a contact structure of a photovoltaic cell and photovoltaic cell.
The inven... |
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Invention
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Method for producing a solar cell. The invention relates to a method for producing a solar cell (... |
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Invention
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Method for producing a contact structure of a photovoltaic cell and photovoltaic cell. The invent... |
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Invention
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Method for producing a solar cell involving doping by ion implantation and depositing an outdiffu... |
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Invention
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Method for producing a solar cell involving doping by ion implantation and the depositing of an o... |
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Invention
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Ion implantation machine presenting increased productivity. a substrate-carrier 104 connected to ... |
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Invention
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Ion-implantation machine having increased productivity. The present invention concerns an ion-imp... |
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Invention
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Method for doping silicon sheets. The invention relates to a method for doping a silicon sheet fo... |
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2013
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Invention
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Ion implanter provided with a plurality of plasma source bodies. The invention relates to an ion ... |
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2012
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Invention
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Support including an electrostatic substrate carrier. an electrically conductive clamping collar ... |
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Invention
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Support including an electrostatic substrate holder. The present invention relates to a support w... |
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Invention
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Method of controlling an ion implanter in plasma immersion mode. the method including an implanta... |
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Invention
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Method of controlling an ion implanter in plasma immersion mode. The present invention relates to... |
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Invention
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Control module for an ion implanter. A control module for an ion implanter having a power supply,... |
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Invention
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Control module for an ion implanter in the plasma immersion mode. The present invention relates t... |
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Invention
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Machine for implanting ions in plasma immersion mode for a low-pressure method. An ion implantati... |
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Invention
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Plasma immersion ion implantation machine for low-pressure process. The present invention relates... |
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2011
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Invention
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Dose measurement device for plasma-immersion ion implantation. a selection electrode G3, A3, T3, ... |
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Invention
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Detector for energetic secondary electrons.
The present invention relates to a high-energy secon... |
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Invention
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Dose measurement device for plasma-immersion ion implantation. The invention relates to a dose me... |
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Invention
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Detector for energetic secondary electrons. The invention relates to a detector for energetic sec... |
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2007
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Invention
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Method and apparatus for optically characterizing the doping of a substrate. The invention relate... |
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2006
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Invention
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Summation-based mass measurement device. The invention relates to a mass measurement device compr... |
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2005
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Invention
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Ion implanter power supply which is intended to limit the loading effect.
The invention relates ... |
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Invention
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Ion implanter operating in pulsed plasma mode.
The present invention relates to an ion implanter... |
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Invention
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Ion implanter power supply which is intended to limit the loading effect. The invention relates t... |
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Invention
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Ion implanter operating in pulsed plasma mode. The invention relates to an ion implanter (IMP) co... |
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2004
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Invention
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Multilayer substrate implanted with a low dose. The invention relates to a substrate (1) which is... |
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2003
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Invention
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Optically active waveguide device comprising a channel on an optical substrate. The invention con... |
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Invention
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Waveguide comprising a channel on an optical substrate. The invention provides a waveguide compri... |
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2001
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Invention
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Optically active apparatus comprising a channel on an optical substrate. The invention concerns a... |
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Invention
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Waveguide comprising a channel on an optical substrate. The invention concerns a waveguide compri... |
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Invention
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Wave guide with channel for optical substrate. The invention concerns a waveguide comprising a ch... |
