- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/147 - Arrangements for directing or deflecting the discharge along a desired path
Patent holdings for IPC class H01J 37/147
Total number of patents in this class: 1355
10-year publication summary
|
86
|
88
|
95
|
136
|
126
|
114
|
102
|
135
|
113
|
119
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| ASML Netherlands B.V. | 7573 |
156 |
| Hitachi High-Tech Corporation | 5455 |
145 |
| NuFlare Technology, Inc. | 881 |
109 |
| Hitachi High-Technologies Corporation | 1996 |
71 |
| FEI Company | 981 |
54 |
| Applied Materials, Inc. | 19204 |
50 |
| ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | 155 |
50 |
| Carl Zeiss Microscopy GmbH | 1225 |
42 |
| Carl Zeiss MultiSEM GmbH | 149 |
41 |
| Axcelis Technologies, Inc. | 427 |
40 |
| JEOL Ltd. | 602 |
39 |
| Varian Semiconductor Equipment Associates, Inc. | 1226 |
32 |
| Applied Materials Israel, Ltd. | 620 |
31 |
| KLA Corporation | 1655 |
27 |
| KLA-Tencor Corporation | 2539 |
22 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 119 |
20 |
| Exogenesis Corporation | 70 |
16 |
| Hitachi, Ltd. | 15679 |
15 |
| Carl Zeiss SMT GmbH | 3080 |
14 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 46069 |
13 |
| Other owners | 368 |