Patent holdings for IPC class H01J 37/147

Total number of patents in this class: 1355

10-year publication summary

86
88
95
136
126
114
102
135
113
119
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
ASML Netherlands B.V.
7573
156
Hitachi High-Tech Corporation
5455
145
NuFlare Technology, Inc.
881
109
Hitachi High-Technologies Corporation
1996
71
FEI Company
981
54
Applied Materials, Inc.
19204
50
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
155
50
Carl Zeiss Microscopy GmbH
1225
42
Carl Zeiss MultiSEM GmbH
149
41
Axcelis Technologies, Inc.
427
40
JEOL Ltd.
602
39
Varian Semiconductor Equipment Associates, Inc.
1226
32
Applied Materials Israel, Ltd.
620
31
KLA Corporation
1655
27
KLA-Tencor Corporation
2539
22
Sumitomo Heavy Industries ION Technology Co., Ltd.
119
20
Exogenesis Corporation
70
16
Hitachi, Ltd.
15679
15
Carl Zeiss SMT GmbH
3080
14
Taiwan Semiconductor Manufacturing Company, Ltd.
46069
13
Other owners 368