Patent holdings for IPC class H01J 37/04

Total number of patents in this class: 597

10-year publication summary

46
46
41
55
40
51
38
46
45
25
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
NuFlare Technology, Inc.
839
109
ASML Netherlands B.V.
7361
69
Hitachi High-Tech Corporation
5282
33
FEI Company
941
32
Hitachi High-Technologies Corporation
2004
27
Mapper Lithography IP B.V.
135
19
Applied Materials, Inc.
18530
18
KLA Corporation
1532
11
Carl Zeiss MultiSEM GmbH
131
11
Intel Corporation
46949
10
IMS Nanofabrication GmbH
59
9
Hitachi, Ltd.
15459
8
Axcelis Technologies, Inc.
407
8
Carl Zeiss Microscopy GmbH
1202
8
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
158
8
JEOL Ltd.
578
8
Lam Research Corporation
5217
7
KLA-Tencor Corporation
2545
7
Varian Semiconductor Equipment Associates, Inc.
1231
6
Tokyo Electron Limited
12645
6
Other owners 183