Patent holdings for IPC class H01J 37/05

Total number of patents in this class: 338

10-year publication summary

28
21
32
41
41
29
27
20
16
11
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Applied Materials, Inc.
18530
27
Hitachi High-Technologies Corporation
2004
25
Hitachi High-Tech Corporation
5282
24
Axcelis Technologies, Inc.
407
18
ASML Netherlands B.V.
7361
17
FEI Company
941
17
Varian Semiconductor Equipment Associates, Inc.
1231
16
Exogenesis Corporation
70
15
mi2-factory GmbH
34
15
JEOL Ltd.
578
13
NuFlare Technology, Inc.
839
8
Carl Zeiss MultiSEM GmbH
131
8
Sumitomo Heavy Industries ION Technology Co., Ltd.
113
7
Applied Materials Israel, Ltd.
611
6
Gatan, Inc.
105
6
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
158
6
Nissin ION Equipment Co., Ltd.
82
6
KLA Corporation
1532
6
Battelle Memorial Institute
2479
4
Scienta Omicron AB
20
4
Other owners 90