- All sections
- C - Chemistrymetallurgy
- C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/52 - Controlling or regulating the coating process
Patent holdings for IPC class C23C 16/52
Total number of patents in this class: 3283
10-year publication summary
|
244
|
240
|
229
|
267
|
221
|
277
|
363
|
306
|
371
|
303
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Tokyo Electron Limited | 12751 |
441 |
| Kokusai Electric Corporation | 2023 |
430 |
| Applied Materials, Inc. | 18706 |
396 |
| Lam Research Corporation | 5259 |
293 |
| ASM IP Holding B.V. | 2080 |
227 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 42863 |
77 |
| Aixtron SE | 319 |
51 |
| Samsung Electronics Co., Ltd. | 146534 |
37 |
| Novellus Systems, Inc. | 481 |
24 |
| Jusung Engineering Co., Ltd. | 444 |
21 |
| NuFlare Technology, Inc. | 845 |
19 |
| Entegris, Inc. | 1870 |
18 |
| Samsung Display Co., Ltd. | 34842 |
17 |
| Fujikin Incorporated | 692 |
14 |
| MKS Instruments, Inc. | 652 |
14 |
| Beijing Naura Microelectronics Equipment Co., Ltd. | 598 |
14 |
| Jiangsu Favored Nanotechnology Co., LTD | 162 |
14 |
| Beneq Oy | 249 |
13 |
| Picosun Oy | 146 |
12 |
| Kioxia Corporation | 10301 |
12 |
| Other owners | 1139 |