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2024
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Invention
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Substrate processing apparatus including light receiving device and calibration method of light r... |
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Invention
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Semiconductor processing method.
A substrate processing method of easily forming an air gap incl... |
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Invention
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Method of manufacturing semiconductor device, and substrate treatment apparatus using ether-cat. ... |
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Invention
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Substrate processing method for filling one or more gaps on a surface of a substrate.
Provided i... |
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G/S
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Machines for the assembly and packaging of electronic chips; machines for manufacturing semicondu... |
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Invention
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Deposition of transition metal-comprising material.
The current disclosure relates to the manufa... |
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Invention
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Deposition of organic films.
Processes are provided herein for deposition of organic films. Orga... |
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Invention
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Apparatus and methods for performing an in-situ etch of reaction chambers with fluorine-based rad... |
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Invention
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Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposi... |
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Invention
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Gas-phase reactor system including a gas detector.
Methods of and systems for performing leak ch... |
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Invention
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Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribu... |
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Invention
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Selective deposition of material comprising silicon and oxygen using plasma.
Methods and vapor d... |
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Invention
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Method of depositing epitaxial material, structure formed using the method, and system for perfor... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus capable of removing signal inte... |
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Invention
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Method and apparatuses for temperature indexed ald.
Methods and apparatuses for deposition of th... |
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Invention
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Plasma modulation apparatus for substrate processing system.
A plasma modulation apparatus for u... |
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Invention
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Hydrogen barriers and related structures, systems, and methods.
Methods for forming hydrogen bar... |
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Invention
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Semiconductor processing assembly and method for transferring wafers.
A semiconductor processing... |
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Invention
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Method and system for filling a gap.
Disclosed are methods and systems for filing a gap. An exem... |
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Invention
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Substrate processing method.
Provided is a method of forming a conformal film on a recess of a s... |
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Invention
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Substrate transfer device, notch position correction method, substrate transfer method, and stora... |
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Invention
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Mixing blocks for fluid systems, fixtures and fixture arrangements including mixing blocks, and m... |
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Invention
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Wafer boat system.
A wafer boat system comprising: a carrier extending along a carrier axis and ... |
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Invention
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Methods and systems for preventive maintenance of semiconductor processing equipment.
Methods an... |
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Invention
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Germanium-doped charge trapping layer, related devices, related systems, and related methods.
As... |
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Invention
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Standard base components for forming inboard and outboard substrate handling chambers and their u... |
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Invention
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Method, system and apparatus for forming anisotropic layer.
A method, comprising supporting a su... |
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Invention
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Method for forming a pattern on a substrate.
A method for forming a pattern on a substrate discl... |
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Invention
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Method, system and apparatus for forming a metal sulfide layer.
A method, system and apparatus a... |
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Invention
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Selective deposition of inhibitor material and deposition assemblies.
The disclosure relates to ... |
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Invention
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Weight and/or layer thickness measuring equipment and substrate processing systems and methods in... |
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Invention
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Chamber arrangements, semiconductor processing systems including chamber arrangements and related... |
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Invention
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Precursor capsule, a vessel and a method.
The current disclosure relates to a precursor capsule ... |
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Invention
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Chemical etching of molybdenum films.
The present disclosure relates to methods for etching a mo... |
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Invention
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Methods for forming a doped hafnium zirconium oxide layer on a substrate.
The technology of the ... |
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Invention
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Methods and system for flow control testing.
Various embodiments of the present technology may p... |
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Invention
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Selective deposition.
A method, system and apparatus for selectively forming aluminum oxide on a... |
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Invention
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Metal and carbon containing layers, including methods and systems for their manufacture.
Aspects... |
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Invention
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Gas injector.
A gas injector and an apparatus constructed and arranged to process a plurality of... |
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Invention
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Methods of filling trenches on substrate surface.
A method of filling trenches on a surface of a... |
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Invention
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Motor arrangements, semiconductor processing systems having motor arrangements and related method... |
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Invention
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Semiconductor manufacturing apparatus and process.
In general, the various aspects of the techno... |
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Invention
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Selective deposition of organic polymer material and deposition assemblies.
The disclosure relat... |
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Invention
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Selective deposition of inhibitor material and a deposition assemblies.
The disclosure relates t... |
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Invention
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Substrate processing systems and methods using virtual machine architecture for operating substra... |
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Invention
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Substrate processing apparatus with flow control ring and method of using same.
A substrate proc... |
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Invention
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Methods for forming a metal silicate layer for controlling a threshold voltage of a metal-oxide-s... |
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Invention
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Methods and system for mitigating cvd foreline growth.
Various embodiments of the present techno... |
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Invention
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Methods and systems for electric field-assisted lithography.
Lithographical systems and methods.... |
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G/S
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Machines and machine tools for the assembly and packaging of electronic chips and structural part... |
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G/S
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Machines for manufacturing semiconductors, and structural parts and fittings therefor; semiconduc... |
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G/S
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Machines for the assembly and packaging of electronic semiconductor chips; machines for manufactu... |
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G/S
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Machines for the assembly and packaging of electronic
semiconductor chips; machines for manufact... |
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2023
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G/S
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Machines for assembling and packaging of electronic semiconductor chips; machines for manufacturi... |
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G/S
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Machines for manufacturing semiconductors, including parts
and fittings therefor; semiconductor ... |
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G/S
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Machines for manufacturing semiconductors, and structural parts therefor; semiconductor manufactu... |
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2022
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Invention
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Adjustment shaft |
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G/S
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Custom manufacturing of semiconductors; custom manufacturing of integrated circuits; custom manuf... |
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Invention
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Susceptor |
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2021
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G/S
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Chemical source material for the deposition of thin film layers upon semiconductor wafers and sub... |
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2020
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G/S
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Machines for the assembly and packaging of electronic chips;
machines for manufacturing semicond... |
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2017
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G/S
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Machines and machine tools, namely semiconductor wafer processing equipment, including thermal tr... |
