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2025
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G/S
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Development, design and testing of semiconductors, semiconductor machines and apparatus, and semi... |
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G/S
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Chemical source material for the deposition of thin film layers upon semiconductor wafers and sub... |
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G/S
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Machines for the assembly and packaging of electronic chips; machines for manufacturing semicondu... |
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Invention
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Methods for depositing gap-filling fluids and related systems and devices.
Methods and systems f... |
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Invention
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Filter system for a reactor system.
A filter system of a reactor system may comprise a filter ve... |
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Invention
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Method of forming a structure including carbon material, structure formed using the method, and s... |
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Invention
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Structure including siocn layer and method of forming same.
A method for forming a layer compris... |
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Invention
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Methods for depositing gap filling fluids and related systems and devices.
Methods and systems f... |
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Invention
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Exhaust component cleaning method and substrate processing apparatus including exhaust component.... |
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Invention
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Alignment fixture for a reactor system.
An alignment fixture for a reactor system may comprise a... |
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Invention
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Substrate supporting plate, thin film deposition apparatus including the same, and thin film depo... |
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Invention
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Methods and systems for depositing a layer.
Plasma-assisted methods for depositing materials and... |
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Invention
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Methods and systems for depositing metalloid layer.
The present disclosure relates to methods an... |
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Invention
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Methods and systems for etching.
Methods and related systems for etching are disclosed for etchi... |
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Invention
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Method and system for depositing a metal-containing layer.
The present disclosure relates to met... |
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Invention
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Remote doping of a semiconductor structure, related devices, related systems, and related methods... |
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Invention
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Substrate processing method.
Provided is a method of filling a gap without seam or void within a... |
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Invention
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Susceptor manufacturing method and the manufactured susceptor using the same.
A method of provid... |
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Invention
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Substrate handling system.
A substrate handling system is disclosed. The substrate handling syst... |
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Invention
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Reactor casing assembly.
The present invention relates to a casing assembly of a reactor for the... |
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Invention
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Substarate processing apparatus with vuv intensity control.
A substrate processing apparatus may... |
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Invention
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Selective film deposition.
A method for selective deposition of a molybdenum film, comprising su... |
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Invention
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Brackets, bracket assemblies, machinery arrangements and semiconductor processing systems includi... |
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Invention
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Substrate lift assembly, system including the assembly, and methods of using same.
A substrate l... |
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Invention
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Method of filling a gap.
A method of filling a gap provided to a substrate, comprises: providing... |
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Invention
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Methods and apparatuses for filling a gap.
The present disclosure relates to methods and systems... |
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Invention
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Method and apparatus for area-selective deposition.
The current disclosure relates to methods an... |
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Invention
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Method and device for etching a substrate and method and apparatus for processing a substrate.
T... |
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Invention
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Gas manifold and assembly and system including same.
Apparatus for providing gas to a reaction c... |
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Invention
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Vanadium containing layers and methods and systems for depositing said layers.
The present discl... |
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Invention
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Structures comprising dipole-lined conductive wires and related systems and methods.
Methods and... |
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2024
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Invention
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Method, system and apparatus for forming a threshold voltage shifting layer.
A method comprising... |
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Invention
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Methods of forming indium molybdenum oxide layers and associated indium molybdenum oxide layers. ... |
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Invention
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3 pillar boat in a load lock chamber and methods of making pillar boat in load locks for semicond... |
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Invention
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Methods and assemblies for selective deposition of metal-containing material.
The current disclo... |
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Invention
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Chamber arrangements including backpressure controllers, semiconductor processing systems includi... |
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Invention
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Systems and methods for removal of residue coating deposited on metallic parts during processing.... |
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Invention
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Transfer chambers, associated semiconductor processing systems, and methods for preventing moistu... |
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Invention
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Methods of forming interconnect structures including low dielectric constant layers and associate... |
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Invention
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Methods and apparatus for insulating gas lines.
Various embodiments of the present technology ma... |
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Invention
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Apparatus for a substrate support with multi-zone control.
Various embodiments of the present te... |
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Invention
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Temperature control module for a furnace reactor and method of controlling temperature of a furna... |
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Invention
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Apparatus for thermal control of a wafer.
An apparatus with a wafer temperature control capabili... |
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Invention
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Methods and systems for forming a layer comprising silicon and composition and synthesis of silic... |
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Invention
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Area selective deposition.
A method, system and apparatus for selective deposition on a substrat... |
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Invention
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Compositions, methods, and systems for forming silicon containing films. The present disclosure r... |
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Invention
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Methods and systems for forming a layer comprising silicon. Disclosed are methods and systems for... |
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Invention
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Structures and methods of forming structures.
The disclosure relates to methods of forming a str... |
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Invention
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Methods and apparatus for gas distribution.
Various embodiments of the present technology may pr... |
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Invention
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Methods of forming a bilayer hardmask and associated deposition methods using a bilayer hardmask.... |
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Invention
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Substrate transfer arm and apparatus using the same.
Provided is a substrate transfer arm, more ... |
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G/S
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Machines and machine tools for the assembly and packaging of electronic chips and structural part... |
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G/S
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Machines for manufacturing semiconductors, and structural parts and fittings therefor; semiconduc... |
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G/S
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Machines for the assembly and packaging of electronic semiconductor chips; machines for manufactu... |
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G/S
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Machines for the assembly and packaging of electronic
semiconductor chips; machines for manufact... |
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2023
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G/S
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Machines for assembling and packaging of electronic semiconductor chips; machines for manufacturi... |
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G/S
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Machines for manufacturing semiconductors, including parts
and fittings therefor; semiconductor ... |
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G/S
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Machines for manufacturing semiconductors, and structural parts therefor; semiconductor manufactu... |
