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2024
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Invention
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Magnetron forming method, magnetron, and magnetron sputtering device. Disclosed in the present ap... |
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Invention
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Cover device, process chamber and semiconductor process apparatus. Disclosed in the present appli... |
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Invention
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Flow homogenization fixing component, integrated gas-intake device and semiconductor process appa... |
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Invention
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Electron beam generator and ion beam etching device. An electron beam generator (100) and an ion ... |
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Invention
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Vertical heat treatment apparatus and conveying device therefor. A vertical heat treatment appara... |
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Invention
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Process chamber, upper electrode device thereof, and semiconductor process equipment. A process c... |
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Invention
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Electrode introduction device and semiconductor process apparatus. An electrode introduction devi... |
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Invention
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Testing device, and testing method for semiconductor cleaning apparatus. The present disclosure r... |
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Invention
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Cover opening mechanism for process chamber, and semiconductor process device. The present applic... |
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Invention
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Cleaning apparatus, cleaning method, and semiconductor process device. The present application re... |
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Invention
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Furnace door driving device and semiconductor heat treatment apparatus. A furnace door driving de... |
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Invention
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Air inlet apparatus and semiconductor processing device. The present application discloses an air... |
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Invention
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Semiconductor process device and calibration apparatus therefor. The present application provides... |
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Invention
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Process recipe synchronization method and apparatus, and semiconductor process device. Provided i... |
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Invention
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Centering device and centering method. Provided in the present application are a centering device... |
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Invention
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Auxiliary temperature-control device for semiconductor process chamber, and semiconductor process... |
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Invention
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Method for manufacturing semiconductor device, and semiconductor process apparatus. Disclosed in ... |
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Invention
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Upper lining ring, lower lining ring, gas-intake lining body and lining for vapor deposition proc... |
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Invention
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Gas intake control method, gas supply system and semiconductor process device. A gas intake contr... |
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Invention
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Semiconductor process apparatus and ignition chamber thereof. Provided in the present application... |
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Invention
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Etching method for sc-containing layer, semiconductor device and manufacturing method therefor, a... |
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Invention
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Annular lining apparatus, liner, process chamber, and semiconductor process device. The present a... |
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Invention
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Method for removing residual charges from electrostatic chuck, and semiconductor process device. ... |
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Invention
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Curve acquisition method, temperature control method, electronic apparatus, and semiconductor app... |
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Invention
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Piping diagram generation method, semiconductor process device, and computer-readable storage med... |
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Invention
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Semiconductor process apparatus and control method therefor. A semiconductor process apparatus an... |
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Invention
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Auxiliary heating apparatus and semiconductor heat treatment device. The present application prov... |
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Invention
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Crucible loading device and semiconductor apparatus. A crucible loading device and a semiconducto... |
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Invention
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Preparation method for seed crystal layer, metal interconnection process method and semiconductor... |
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Invention
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Ignition chamber of semiconductor process device, semiconductor process device and control method... |
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Invention
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Semiconductor process chamber. A semiconductor process chamber, wherein the disclosed semiconduct... |
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Invention
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Transfer chamber, semiconductor process device, and disassembly and assembly tool. The present ap... |
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Invention
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Etching method for silicon-containing organic dielectric layer, and semiconductor processing devi... |
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Invention
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Conductive slip ring and semiconductor process device. The present application discloses a conduc... |
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Invention
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Temperature compensation method, temperature compensation apparatus, and process chamber. The pre... |
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Invention
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Semiconductor process chamber and semiconductor process device. The present application relates t... |
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Invention
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Position calibration apparatus and semiconductor process device. Provided in the present applicat... |
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Invention
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Method for forming isolation trench, preparation method for semiconductor device, and process dev... |
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Invention
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Semiconductor heat treatment device, and temperature control method therefor. A semiconductor hea... |
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Invention
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Process chamber gas inlet apparatus, semiconductor device, mounting method, and dismounting metho... |
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Invention
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Semiconductor process chamber and semiconductor process device. A semiconductor process chamber a... |
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Invention
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Bearing device and semiconductor process apparatus. The present application provides a bearing de... |
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Invention
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Lower electrode feed-in device and semiconductor processing apparatus. A lower electrode feed-in ... |
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2023
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G/S
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Rebuilding machines that have been worn or partially destroyed; installation and repair of electr... |
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G/S
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Repair or maintenance of semiconductor manufacturing
machines and systems; repair of semiconduct... |
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Invention
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Water replenishment control method for semiconductor process device and semiconductor process dev... |
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Invention
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Vacuuming ststem, semiconductor process device and vacuuming method thereof.
A vacuuming system ... |
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Invention
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Furnace tube assembly and disassembly auxiliary device.
The present disclosure provides a furnac... |
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2022
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Invention
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Semiconductor process apparatus scheduling control method and semiconductor process apparatus.
A... |
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Invention
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Semiconductor apparatus and gas distributor of semiconductor apparatus.
A gas distributor of a s... |
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Invention
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Coil device for generating plasma and semiconductor equipment.
The present disclosure provides a... |
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Invention
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Plasma-enhanced atomic layer deposition apparatus and method thereof.
Embodiments of the present... |
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2016
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G/S
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Electron industry equipment, namely, industrial machines for use in generating energy; printed ci... |
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G/S
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Electron industry equipment; printed circuit board
processor; machinery for storage battery indu... |
