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2025
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Invention
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Wafer bearing chuck and semiconductor process chamber. Disclosed in the present application is a ... |
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Invention
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Semiconductor process apparatus. Provided in the present disclosure is a semiconductor process ap... |
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Invention
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Quick-drain valve structure and cleaning device. A quick-drain valve structure and a cleaning dev... |
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Invention
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Log processing method and apparatus, and storage medium. A log processing method and apparatus, a... |
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Invention
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Manipulator control method and semiconductor process device. A manipulator control method, compri... |
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Invention
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Semiconductor process chamber and control method applied to semiconductor process chamber. Provid... |
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Invention
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Semiconductor process chamber, unilateral footing elimination method, and semiconductor process a... |
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Invention
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Stage apparatus and semiconductor process device. The present application discloses a stage appar... |
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Invention
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Semiconductor process apparatus and exhaust gas treatment device thereof. Provided in the present... |
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Invention
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Spray structure for semiconductor process device, and semiconductor process device. The present a... |
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Invention
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Pulse voltage generation circuit and semiconductor process device. The present application provid... |
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Invention
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Semiconductor protection apparatus and semiconductor process device. The present application rela... |
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Invention
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Valve body structure and semiconductor process device. A valve body structure and a semiconductor... |
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Invention
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Support device, heater and semiconductor process apparatus. Disclosed in the present application ... |
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Invention
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Gas intake assembly, semiconductor process chamber and semiconductor process method. The present ... |
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Invention
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Electrical connection structure, lower electrode assembly and process chamber. Disclosed in the p... |
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Invention
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Electrostatic elimination apparatus and semiconductor process device. The present application rel... |
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Invention
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Lifting apparatus and semiconductor process device. A lifting apparatus and a semiconductor proce... |
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Invention
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Carrying device, process chamber and semiconductor process apparatus. Provided in the present app... |
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Invention
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Wafer etching or deposition method, model acquisition method and semiconductor processing apparat... |
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Invention
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Material route establishment method, material scheduling method, and semiconductor process device... |
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Invention
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Method for forming semiconductor structure, plasma generation apparatus, and semiconductor proces... |
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2024
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Invention
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Furnace body structure and semiconductor process device. A furnace body structure and a semicondu... |
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Invention
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Electrostatic chuck power circuit current detection apparatus and semiconductor process device. -... |
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Invention
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Lower electrode system, semiconductor process device and control method. The present application ... |
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Invention
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Edge gas intake device, semiconductor process chamber, and semiconductor process apparatus. Provi... |
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Invention
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Radio frequency power output circuit and semiconductor process device. The present application re... |
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Invention
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Parameter detection method, electronic device, and storage medium. The present application disclo... |
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Invention
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Load lock, semiconductor processing device and wafer alignment method. The present application pr... |
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Invention
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Flow equalizing assembly, gas intake device and semiconductor apparatus. Provided in the present ... |
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Invention
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Semiconductor process device. Provided is a semiconductor process device, comprising: a process c... |
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Invention
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Gas intake assembly, gas intake device and semiconductor process chamber. Provided in the present... |
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Invention
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Magnetron forming method, magnetron, and magnetron sputtering device. Disclosed in the present ap... |
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Invention
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Upper electrode structure, semiconductor process chamber, and semiconductor process device. An up... |
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Invention
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Process chamber and gas inlet assembly thereof. The present application relates to the field of s... |
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Invention
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Cover device, process chamber and semiconductor process apparatus. Disclosed in the present appli... |
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Invention
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Flow homogenization fixing component, integrated gas-intake device and semiconductor process appa... |
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Invention
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Semiconductor process chamber and lifting mechanism therefor. The present application relates to ... |
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Invention
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Electron beam generator and ion beam etching device. An electron beam generator (100) and an ion ... |
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Invention
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Vertical heat treatment apparatus and conveying device therefor. A vertical heat treatment appara... |
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Invention
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Process chamber, upper electrode device thereof, and semiconductor process equipment. A process c... |
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Invention
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Testing device, and testing method for semiconductor cleaning apparatus. The present disclosure r... |
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Invention
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Cover opening mechanism for process chamber, and semiconductor process device. The present applic... |
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Invention
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Cleaning apparatus, cleaning method, and semiconductor process device. The present application re... |
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Invention
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Furnace door driving device and semiconductor heat treatment apparatus. A furnace door driving de... |
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Invention
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Centering device and centering method. Provided in the present application are a centering device... |
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Invention
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Method for removing residual charges from electrostatic chuck, and semiconductor process device. ... |
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2023
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P/S
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Rebuilding machines that have been worn or partially destroyed; installation and repair of electr... |
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P/S
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Repair or maintenance of semiconductor manufacturing
machines and systems; repair of semiconduct... |
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Invention
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Vaporization system and semiconductor process equipment.
The present disclosure provides a vapor... |
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Invention
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Vacuuming ststem, semiconductor process device and vacuuming method thereof.
A vacuuming system ... |
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2022
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Invention
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Multi-layer focus ring for plasma semiconductor processing.
The present disclosure relates to pl... |
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2016
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P/S
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Electron industry equipment, namely, industrial machines for use in generating energy; printed ci... |
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P/S
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Electron industry equipment; printed circuit board
processor; machinery for storage battery indu... |
