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2025
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G/S
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Semiconductor processing machines; low pressure chemical vapor deposition machines; plasma chemic... |
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G/S
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Information or enquiries on business and marketing; business administration and office work; busi... |
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Invention
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Electronic element including light-receiving element and light-emitting element, and display devi... |
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Invention
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Gas injection apparatus, substrate processing apparatus, and thin film formation method. The pres... |
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Invention
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Raw material supply device, substrate processing device, and raw material supply method. The pres... |
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2024
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G/S
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Etching machines used for manufacturing light emitting diodes (LEDs); atomic layer deposition (AL... |
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Invention
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Method for forming aluminum nitride thin film and method for forming thin film including same. An... |
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Invention
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Method for forming gallium nitride film. The present invention relates to a method for forming a ... |
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Invention
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Substrate processing apparatus.
Provided is a substrate processing apparatus. The positions of a... |
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Invention
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Substrate processing apparatus and interlock method thereof.
Disclosed herein are a substrate pr... |
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Invention
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Retainer, heater, chamber for substrate processing apparatus, and substrate processing apparatus.... |
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Invention
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Thin film forming method, and transistor and capacitor manufactured using same. The present inven... |
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Invention
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Thin film forming method, electric/electronic device using same, and substrate processing apparat... |
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Invention
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Substrate processing apparatus and substrate processing method. The present invention relates to ... |
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Invention
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Thin film formation method. An embodiment of the present invention provides a method for forming ... |
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Invention
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Solar cell and method for manufacturing same. The present invention relates to a method for manuf... |
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Invention
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Method for forming thin film of perovskite compound and method for manufacturing solar cell by us... |
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Invention
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Method for forming graphene electrode and method for manufacturing solar cell using same. The pre... |
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Invention
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Method for forming silicon carbide film. A method for forming a silicon carbide film on a substra... |
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Invention
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Load lock chamber, substrate processing system, and substrate processing method. The present inve... |
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Invention
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Substrate processing method. The present invention relates to a substrate processing method and, ... |
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Invention
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Substrate processing method, substrate processing apparatus, and semiconductor device. The presen... |
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Invention
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Substrate processing apparatus.
The present invention relates to a substrate processing apparatu... |
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Invention
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Gas supply method of substrate processing apparatus.
The present inventive concept relates to a ... |
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Invention
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Thin film forming method and manufacturing method for electroluminescent display device using sam... |
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Invention
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Substrate processing apparatus, substrate processing system, and substrate processing method. A s... |
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Invention
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Substrate processing apparatus, and edge frame of substrate processing apparatus. The present inv... |
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Invention
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Canister and substrate treatment apparatus. The present invention relates to a canister and a sub... |
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Invention
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Chamber cleaning method. The present invention provides a method for cleaning a chamber for formi... |
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Invention
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Method for forming thin film. The present invention relates to a method for forming a thin film o... |
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Invention
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Titanium nitride thin film forming method and semiconductor device. The present invention relates... |
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Invention
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Method for forming copper film. 22) on the substrate; and (d) spraying a mixed gas comprising a h... |
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Invention
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Method for forming gallium-containing film. An embodiment of the present invention relates to a m... |
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Invention
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Method for forming graphene film. An embodiment of the present invention relates to a method for ... |
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Invention
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Method for forming carbon-containing film. An embodiment of the present invention relates to a me... |
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Invention
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Method for forming electrode. The present invention relates to a method for forming an electrode ... |
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Invention
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Method for forming electrode. A method for forming an electrode of a semiconductor device, accord... |
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Invention
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Organic light-emitting display device and method for manufacturing same. The present invention pr... |
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2023
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Invention
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Substrate processing apparatus.
The present inventive concept relates to a substrate processing ... |
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Invention
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Capacitor electrode forming method.
A method for forming a capacitor electrode in accordance wit... |
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Invention
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Thin film transistor and manufacturing method therefor.
Provided are a thin film transistor and ... |
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Invention
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Dielectric film, capacitor comprising same and manufacturing methods therefor.
The present inven... |
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Invention
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Substrate treatment method.
The present inventive concept relates to a method for treatment of a... |
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Invention
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Thin film manufacturing method and thin film.
The present inventive concept relates to a thin fi... |
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Invention
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Substrate processing device, and method for manufacturing metal oxide semiconductor.
A substrate... |
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2022
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Invention
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Apparatus for processing substrate.
The present inventive concept relates to an apparatus for pr... |
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Invention
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Method for manufacturing perovskite solar cell.
The present inventive concept comprises the step... |
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Invention
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Display device comprising antireflective layer.
The present inventive concept provides a display... |
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Invention
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Substrate processing device and method for cleaning substrate processing device.
A substrate pro... |
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Invention
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Solar cell and method for manufacturing same.
The present inventive concept provides a solar cel... |
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G/S
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Atomic layer deposition (ALD) machines used for manufacturing light emitting diodes (LEDs); etchi... |
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2020
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G/S
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semiconductor processing machines; low pressure chemical vapor deposition machines; plasma chemic... |
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2019
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G/S
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semiconductor wafer processing machines; low pressure chemical vapor deposition machines; plasma ... |
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2014
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G/S
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Semiconductor processing machines; low pressure chemical
vapor deposition machines; plasma chemi... |
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2011
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G/S
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[ Street lamps; safety lamps for underground use; germicidal lamps for purifying air; miners' lam... |
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2010
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G/S
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Semiconductor processing machines; semiconductor wafer processing machines; low pressure chemical... |
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2008
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G/S
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Semiconductor processing machines; Semiconductor wafer processing machines; Atomic layer depositi... |
