- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/311 - Etching the insulating layers
Patent holdings for IPC class H01L 21/311
Total number of patents in this class: 12999
10-year publication summary
|
1270
|
1281
|
1425
|
1467
|
1057
|
907
|
829
|
793
|
812
|
217
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Taiwan Semiconductor Manufacturing Company, Ltd. | 47211 |
2474 |
| Tokyo Electron Limited | 13513 |
1218 |
| Applied Materials, Inc. | 19999 |
782 |
| Samsung Electronics Co., Ltd. | 153573 |
631 |
| International Business Machines Corporation | 62182 |
509 |
| Lam Research Corporation | 5520 |
499 |
| Micron Technology, Inc. | 27266 |
325 |
| Kioxia Corporation | 10706 |
302 |
| GLOBALFOUNDRIES U.S. Inc. | 6398 |
288 |
| United Microelectronics Corp. | 4440 |
283 |
| Semiconductor Manufacturing International (Shanghai) Corporation | 1743 |
211 |
| Intel Corporation | 46638 |
198 |
| Nanya Technology Corporation | 2849 |
173 |
| ASM IP Holding B.V. | 2282 |
163 |
| Tokyo Electron U.S. Holdings, Inc | 872 |
157 |
| SK Hynix Inc. | 12134 |
155 |
| Semiconductor Manufacturing International (Beijing) Corporation | 1033 |
138 |
| Adeia Semiconductor Solutions LLC | 757 |
126 |
| Texas Instruments Incorporated | 19615 |
115 |
| Yangtze Memory Technologies Co., Ltd. | 3144 |
105 |
| Other owners | 4147 |