- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/304 - Controlling tubes by information coming from the objects, e.g. correction signals
Patent holdings for IPC class H01J 37/304
Total number of patents in this class: 576
10-year publication summary
|
62
|
25
|
36
|
49
|
41
|
38
|
41
|
52
|
43
|
29
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| NuFlare Technology, Inc. | 835 |
109 |
| Applied Materials, Inc. | 18501 |
49 |
| Axcelis Technologies, Inc. | 406 |
31 |
| Hitachi High-Tech Corporation | 5275 |
31 |
| FEI Company | 941 |
27 |
| ASML Netherlands B.V. | 7355 |
22 |
| Carl Zeiss Microscopy GmbH | 1202 |
21 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 113 |
20 |
| Hitachi High-Tech Science Corporation | 316 |
17 |
| Varian Semiconductor Equipment Associates, Inc. | 1232 |
17 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 42389 |
16 |
| Carl Zeiss SMT GmbH | 2964 |
15 |
| Arcam AB | 202 |
12 |
| Nikon Corporation | 7168 |
10 |
| Mapper Lithography IP B.V. | 135 |
10 |
| Fibics Incorporated | 26 |
8 |
| JEOL Ltd. | 577 |
7 |
| Applied Materials Israel, Ltd. | 608 |
6 |
| Advantest Corporation | 1830 |
5 |
| KLA Corporation | 1526 |
5 |
| Other owners | 138 |