Patent holdings for IPC class H01J 37/10

Total number of patents in this class: 320

10-year publication summary

22
24
29
38
36
35
32
18
27
13
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
5310
41
ASML Netherlands B.V.
7385
39
Carl Zeiss Microscopy GmbH
1203
25
NuFlare Technology, Inc.
842
21
JEOL Ltd.
580
20
FEI Company
943
19
Carl Zeiss MultiSEM GmbH
134
18
KLA Corporation
1549
14
KLA-Tencor Corporation
2544
12
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
159
11
Applied Materials Israel, Ltd.
613
7
Hitachi High-Technologies Corporation
2004
6
Hitachi High-Tech Science Corporation
290
6
Varian Semiconductor Equipment Associates, Inc.
1231
6
Taiwan Semiconductor Manufacturing Company, Ltd.
42704
5
Technische Universiteit Delft
723
5
Purdue Research Foundation
3612
4
Ebara Corporation
2169
3
Hermes Microvision, Inc.
25
3
Mochii, Inc.
17
3
Other owners 52