Patent holdings for IPC class H01J 37/10

Total number of patents in this class: 330

10-year publication summary

22
24
29
38
36
34
32
18
27
23
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
5468
41
ASML Netherlands B.V.
7585
39
Carl Zeiss Microscopy GmbH
1226
25
NuFlare Technology, Inc.
883
23
JEOL Ltd.
602
20
FEI Company
990
19
Carl Zeiss MultiSEM GmbH
150
19
KLA Corporation
1664
17
KLA-Tencor Corporation
2538
12
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
155
11
Applied Materials Israel, Ltd.
619
7
Hitachi High-Technologies Corporation
1996
6
Varian Semiconductor Equipment Associates, Inc.
1226
6
Taiwan Semiconductor Manufacturing Company, Ltd.
46161
6
Hitachi High-Tech Analysis Corporation
282
6
Technische Universiteit Delft
742
5
Purdue Research Foundation
3726
4
Mochii, Inc.
19
4
Samsung Electronics Co., Ltd.
149087
3
Ebara Corporation
2223
3
Other owners 54