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2025
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G/S
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Exhaust gas treatment devices for machines for manufacturing
semiconductors. |
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G/S
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Exhaust gas treatment devices for machines for manufacturing semiconductors. |
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Invention
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Break-in processing apparatus and break-in processing method.
A break-in processing apparatus is... |
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Invention
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Plating apparatus and plating method.
A specific portion of a substrate is allowed to be shielde... |
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Invention
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Substrate cleaning method and substrate cleaning apparatus.
A substrate cleaning method, includi... |
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Invention
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Plating apparatus and plating method.
A plating apparatus that allows shielding a specific porti... |
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Invention
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Substrate polishing device, substrate treatment device, substrate polishing method, and program. ... |
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Invention
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Substrate processing system with intermediate unit. The present invention relates to a technology... |
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Invention
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Polishing apparatus, polishing method, and polishing head.
A polishing apparatus capable of remo... |
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Invention
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Substrate cleaning apparatus, substrate processing apparatus, substrate cleaning method, cleaning... |
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Invention
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Am apparatus.
One of the objects of the present application is to provide a technique capable of... |
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Invention
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Polishing head, polishing apparatus, and polishing method. The present invention pertains to a po... |
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Invention
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Temperature control system. A temperature control system (1) comprises: a plurality of first heat... |
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Invention
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Polishing device and polishing method. The present invention relates to a polishing device for po... |
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Invention
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Substrate suction member, top ring, substrate processing device, and method for manufacturing sub... |
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Invention
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Reaction method and reaction device. Provided is a reaction method by which it is possible to eff... |
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Invention
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Substrate processing device and substrate processing method. The present invention relates to a s... |
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Invention
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Chemical mechanical polishing process and chemical mechanical polishing composition.
A process o... |
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Invention
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Temperature control system. The present invention relates to a temperature control system that co... |
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Invention
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Fe-based alloy, and corrosive wear resistant and wear resistant fe-based alloy film. Provided are... |
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2024
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G/S
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Metalworking machines and tools; chemical processing machines and apparatus; semiconductor manufa... |
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Invention
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Support mechanism for roll cleaning member and cleaning device.
A support mechanism for a roll c... |
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Invention
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Chemical mechanical polishing system and chemical mechanical polishing method for workpiece.
A c... |
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Invention
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Method for operating semiconductor manufacturing apparatus.
Objects are to allow an operator to ... |
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Invention
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Semiconductor processing device and polishing device.
A semiconductor processing device accordin... |
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Invention
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Polishing apparatus and polishing method.
A polishing apparatus that are simple in structure and... |
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Invention
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Fluid machine and thermal cycling system. Provided is a fluid machine comprising: a rotation stru... |
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Invention
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Non-contact pad cleaning apparatus.
A non-contact pad cleaning apparatus capable of removing for... |
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Invention
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Apparatus for processing substrate, method of controlling apparatus for processing substrate, and... |
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G/S
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Semiconductor manufacturing machines; electroplating machines for manufacturing semiconductors; e... |
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G/S
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Semiconductor manufacturing machines; plating apparatus for
manufacturing semiconductors; electr... |
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G/S
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Semiconductor manufacturing machines; plating apparatus for manufacturing semiconductors; electri... |
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Invention
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Method for replacing wireless communication substrate mounted on rotary machine, program, server,... |
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Invention
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Substrate processing system, inspection module, and inspection method. The present invention rela... |
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Invention
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Video acquisition support apparatus, video acquisition support method, and storage medium storing... |
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Invention
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Magnetic bearing device and compressor. The present invention relates to a magnetic bearing devic... |
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Invention
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Motor, pump provided with motor, and method for detecting displacement of rotor in motor. The pre... |
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Invention
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Cleaning unit for cleaning filter part of drain pipe or the like. A cleaning unit 100 according t... |
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Invention
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Aquafarming device. This aquafarming device comprises: a tank for rearing aquatic organisms; a wa... |
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G/S
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Pumps, namely, volute pumps, axial-flow pumps, mixed-flow pumps, vortex pumps, gear pumps, submer... |
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G/S
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Metalworking machines and tools; construction machines and apparatus; loading-unloading machines ... |
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Invention
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Plating apparatus and plating method. The present invention suppresses or prevents the shape, mov... |
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Invention
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Plating device and method for partitioning plating tank into anode chamber and cathode chamber. T... |
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Invention
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Plating method. Provided is a technique capable of uniformizing the height of bumps. A plating me... |
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Invention
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Plating method. Provided is a technique capable of uniformizing the height of bumps. The present ... |
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Invention
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Plating device. The present invention makes it possible to determine with high precision the film... |
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Invention
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Substrate holder, plating device, and method for introducing liquid into substrate holder. The pr... |
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Invention
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Substrate holder and plating device. Provided is a substrate holder that can handle various types... |
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2023
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Invention
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Plating apparatus. In this plating apparatus that feeds electric power only to one facing edges o... |
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Invention
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Plating solution supply device, plating system, and maintenance method for plating solution suppl... |
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G/S
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Pump impellers |
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Invention
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Information processing apparatus, inference apparatus, machine-learning apparatus, information pr... |
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Invention
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Plating apparatus and cleaning method for cleaning substrate holder.
To remove cleaning liquid r... |
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2022
|
Invention
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Stator and canned motor.
The present application relates to a stator and a canned motor. A stato... |
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Invention
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Hydrogen production method and hydrogen production system.
A hydrogen production method that red... |
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Invention
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Substrate processing apparatus.
The present invention relates to a substrate processing apparatu... |
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G/S
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Acceleration sensors; digital humidity sensors; digital liquid level sensors; distance sensors; e... |
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G/S
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Vibration, temperature and current sensors, other than for medical use; measuring and testing mac... |
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G/S
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Sensors [measurement apparatus], other than for medical use;
measuring or testing machines and i... |
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2021
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G/S
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Chemicals for use in industry Metalworking machines and metalworking machine tools; Chemical proc... |
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G/S
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Chemicals for use in industry Removal of radiation rays, namely, radiation area decontamination s... |
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G/S
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Recorded computer programs for use in database management, use as a spread sheet, word processing... |
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G/S
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Computer programs; computer software; computer software,
recorded; electronic machines, apparatu... |
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G/S
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vibration sensors, not for medical use; temperature sensors, not for medical use; pressure sensor... |
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2020
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G/S
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Electroplating machines; chemical-mechanical polishing (CMP) machines for use in the manufacture ... |
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G/S
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Electroplating machines; chemical-mechanical polishing (CMP)
machines for use in the manufacture... |
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G/S
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Computer programs; Computer software; Computer software, recorded; Electronic machines, apparatus... |
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G/S
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Semiconductor manufacturing machines; device for securing semiconductor wafers to machines when b... |
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G/S
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Construction machines and apparatus, namely, dredging machines; Loading-unloading machines; Chemi... |
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G/S
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Ozone water generators. |
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G/S
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Rotary pumps, suction pumps, gear pumps, screw pumps, regenerative pumps, controlled volute pumps... |
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G/S
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Repair or maintenance of integrated circuits manufacturing machines and systems; repair or mainte... |
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G/S
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Repair or maintenance of integrated circuits manufacturing
machines and systems; repair or maint... |
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G/S
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Electric pumps |
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2019
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G/S
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Repair or maintenance of integrated circuits manufacturing machines and systems; Repair or mainte... |
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2018
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G/S
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Chemical mechanical polishing machines used for
semiconductor wafers. |
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G/S
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Pumps [machines]; feed pumps; sump pumps; vacuum pumps
[machines]; high pressure pumps; electric... |
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2017
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G/S
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Pumps [not for specified purposes]; feed pumps; drainage pumps; vacuum pumps [not for specified p... |
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G/S
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Dredging machines; conveyors and screw conveyors; chemical mechanical polishing systems for polis... |
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2016
|
G/S
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[ General building construction services; Construction consultancy; Operation and maintenance of ... |
