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2024
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Invention
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Substrate supporting apparatus and method of controlling substrate supporting apparatus.
Exempla... |
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P/S
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Pumps, namely, volute pumps, axial-flow pumps, mixed-flow pumps, vortex pumps, gear pumps, submer... |
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Invention
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Substrate processing system and decompression structure.
A substrate processing system capable o... |
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Invention
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Polishing apparatus and transparent-liquid filling method.
A polishing apparatus is disclosed. T... |
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Invention
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Polishing method, polishing apparatus, and non-transitory computer-readable recording medium.
A ... |
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Invention
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Substrate processing apparatus.
The present disclosure provides a substrate processing apparatus... |
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Invention
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Liquid-transporting apparatus. The present invention pertains to a liquid-transporting apparatus.... |
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Invention
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Container and pump system. Hollow containers (3, 4) are provided above a hollow column (2) provid... |
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Invention
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Substrate cleaning device and substrate polishing device.
A substrate cleaning device for cleani... |
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Invention
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Polishing apparatus and polishing method.
The disclosure provides a polishing apparatus capable ... |
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Invention
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Substrate holding device and method for detecting wear in substrate holding device.
A substrate ... |
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Invention
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Eddy current sensor, eddy current sensor assembly, and polishing apparatus.
Provided is an eddy ... |
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Invention
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Polishing head and polishing system.
A polishing head capable of accurately controlling a thickn... |
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Invention
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Polishing apparatus and polishing method.
A polishing apparatus capable of accurately controllin... |
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Invention
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Cleaning and transfer equipment, wafer treatment equipment, transfer equipment, and cleaning and ... |
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Invention
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Polishing method and polishing apparatus.
A polishing method is disclosed, in which a substrate ... |
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Invention
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Pump device and pump system. A pump device (3) is provided with a motor casing (5) having corrosi... |
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Invention
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Polishing method, computer-readable storage medium storing program for operating computer, and po... |
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Invention
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Method of detecting a wrong workpiece which is not an object to be polished, and optical film-thi... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus that can quickly transport a po... |
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Invention
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Shaping nozzle. Provided is a technique capable of easily controlling the shape of a three-dimens... |
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Invention
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Polishing method, polishing apparatus, and computer-readable storage medium storing temperature r... |
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Invention
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Film thickness measurement device, film thickness measurement method and substrate polishing devi... |
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Invention
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Information processing device, inference device, and machine learning device.
An information pro... |
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Invention
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Work management device, work management system, inference device, machine learning device, work m... |
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P/S
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Metalworking machines and tools; construction machines and apparatus; loading-unloading machines ... |
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Invention
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Method for forming protective film on outer peripheral part including bevel part of substrate. Th... |
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Invention
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Method of processing substrate and apparatus for processing substrate.
One object is to suppress... |
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Invention
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Observation device of beam processing device. The present invention provides a technology that ma... |
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2023
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P/S
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Pump impellers |
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Invention
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Plating device. Provided is a technology which enables reduction in influence of electric field s... |
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Invention
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Plating apparatus and plating method. Provided is a technology which is capable of improving the ... |
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2022
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Invention
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Impeller for pumps |
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Invention
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Load adjusting system and load adjusting method.
A load adjusting system includes: a bevel grind... |
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Invention
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Substrate processing method and substrate processing apparatus.
The present invention relates to... |
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Invention
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Substrate suction member, elastic seal assembly, top ring, and substrate processing apparatus.
A... |
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Invention
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Fluid machine system, information processing device, and information processing method.
There ar... |
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Invention
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Polishing apparatus and polishing method.
The present invention relates to a polishing apparatus... |
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Invention
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Member of battery unit for vibration sensor |
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Invention
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Motor |
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Invention
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Purge apparatus and purge method.
A purge apparatus is provided. The purge apparatus is capable ... |
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Invention
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Power feeding apparatus and power feeding method for submersible pump.
The present invention rel... |
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Invention
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Integrally-transportable purge container and method of using the integrally-transportable purge c... |
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Invention
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Plating method and plating apparatus.
A plating method is a plating method for performing a plat... |
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Invention
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Substrate processing apparatus and substrate processing method.
The present invention relates to... |
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Invention
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Substrate processing method and substrate processing apparatus.
The present application relates ... |
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Invention
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Information processing apparatus, inference apparatus, machine-learning apparatus, information pr... |
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Invention
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Substrate cleaning device, substrate processing device, and maintenance method for substrate clea... |
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Invention
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Plating apparatus.
Provided is a technique that allows suppressing a film thickness on an outer ... |
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Invention
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Motor pump.
The present invention relates to a motor pump. The motor pump (MP) includes a first ... |
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Invention
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Impeller and pump.
The present application relates an impeller and a pump. The impeller includes... |
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P/S
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Sensors [measurement apparatus], other than for medical use; measuring or testing machines and in... |
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P/S
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Vibration, temperature and current sensors, other than for medical use; measuring and testing mac... |
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P/S
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Sensors [measurement apparatus], other than for medical use;
measuring or testing machines and i... |
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2021
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P/S
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Chemicals for use in industry Metalworking machines and metalworking machine tools; Chemical proc... |
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P/S
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Chemicals for use in industry Removal of radiation rays, namely, radiation area decontamination s... |
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P/S
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Recorded computer programs for use in database management, use as a spread sheet, word processing... |
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P/S
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Computer programs; computer software; computer software,
recorded; electronic machines, apparatu... |
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P/S
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vibration sensors, not for medical use; temperature sensors, not for medical use; pressure sensor... |
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2020
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P/S
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Electroplating machines; chemical-mechanical polishing (CMP) machines for use in the manufacture ... |
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P/S
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Electroplating machines; chemical-mechanical polishing (CMP)
machines for use in the manufacture... |
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P/S
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Computer programs; Computer software; Computer software, recorded; Electronic machines, apparatus... |
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P/S
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Semiconductor manufacturing machines; device for securing semiconductor wafers to machines when b... |
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P/S
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Construction machines and apparatus, namely, dredging machines; Loading-unloading machines; Chemi... |
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P/S
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Ozone water generators. |
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P/S
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Rotary pumps, suction pumps, gear pumps, screw pumps, regenerative pumps, controlled volute pumps... |
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P/S
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Repair or maintenance of integrated circuits manufacturing machines and systems; repair or mainte... |
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P/S
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Repair or maintenance of integrated circuits manufacturing
machines and systems; repair or maint... |
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P/S
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Electric pumps |
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2019
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P/S
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Repair or maintenance of integrated circuits manufacturing machines and systems; Repair or mainte... |
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2018
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P/S
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Chemical mechanical polishing machines used for
semiconductor wafers. |
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P/S
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Pumps [machines]; feed pumps; sump pumps; vacuum pumps
[machines]; high pressure pumps; electric... |
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2017
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P/S
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Pumps [not for specified purposes]; feed pumps; drainage pumps; vacuum pumps [not for specified p... |
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P/S
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Dredging machines; conveyors and screw conveyors; chemical mechanical polishing systems for polis... |
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2016
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P/S
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[ General building construction services; Construction consultancy; Operation and maintenance of ... |
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P/S
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Metalworking machines and tools; construction machines and
apparatus; loading-unloading machines... |
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2015
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P/S
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Pump impellers. |
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P/S
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pump impellers. |
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2013
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P/S
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Chemical-mechanical polishing machines used for semiconductor wafers |
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P/S
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Chemical-mechanical polishing machines used for
semiconductor wafers. |
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2006
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P/S
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Chemicals, namely, chemical agents, namely, synthetic organic polymer coagulants, adsorbents, nam... |
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P/S
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[ Chemicals for use in industry and science; plant growth regulating preparations; fertilizers; c... |
