- All sections
- H - Electricity
- H01L - Semiconductor devices not covered by class
- H01L 21/66 - Testing or measuring during manufacture or treatment
Patent holdings for IPC class H01L 21/66
Total number of patents in this class: 13577
10-year publication summary
|
1000
|
1132
|
1155
|
1148
|
1129
|
993
|
1050
|
1001
|
970
|
769
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Taiwan Semiconductor Manufacturing Company, Ltd. | 43854 |
1108 |
| KLA-Tencor Corporation | 2543 |
733 |
| Applied Materials, Inc. | 18968 |
709 |
| Tokyo Electron Limited | 12994 |
623 |
| Samsung Electronics Co., Ltd. | 147983 |
522 |
| KLA Corporation | 1616 |
337 |
| Hitachi High-Technologies Corporation | 1997 |
259 |
| Hitachi High-Tech Corporation | 5404 |
218 |
| Changxin Memory Technologies, Inc. | 4928 |
187 |
| Lam Research Corporation | 5320 |
185 |
| International Business Machines Corporation | 61596 |
184 |
| ASML Netherlands B.V. | 7490 |
184 |
| Micron Technology, Inc. | 26255 |
172 |
| Renesas Electronics Corporation | 5969 |
146 |
| Texas Instruments Incorporated | 19456 |
141 |
| Samsung Display Co., Ltd. | 35468 |
139 |
| Shin-Etsu Handotai Co., Ltd. | 1285 |
139 |
| Infineon Technologies AG | 8257 |
133 |
| Kioxia Corporation | 10439 |
126 |
| Boe Technology Group Co., Ltd. | 41698 |
124 |
| Other owners | 7208 |