Patent holdings for IPC class H01J 37/141

Total number of patents in this class: 280

10-year publication summary

14
20
17
32
30
19
19
21
24
15
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
5455
43
NuFlare Technology, Inc.
881
28
ASML Netherlands B.V.
7573
27
Hitachi High-Technologies Corporation
1996
23
JEOL Ltd.
602
10
Carl Zeiss Microscopy GmbH
1225
9
FEI Company
981
9
Matsusada Precision, Inc.
34
7
Carl Zeiss MultiSEM GmbH
149
6
Varian Semiconductor Equipment Associates, Inc.
1226
5
Advantest Corporation
1768
5
KLA-Tencor Corporation
2539
5
Hermes Microvision Incorporated B.V.
123
5
KLA Corporation
1655
5
Hitachi, Ltd.
15679
4
Applied Materials Israel, Ltd.
620
3
Nikon Corporation
7304
3
Axcelis Technologies, Inc.
427
3
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
155
3
IMS Nanofabrication GmbH
60
3
Other owners 74