- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/08 - Ion sourcesIon guns
Patent holdings for IPC class H01J 37/08
Total number of patents in this class: 1224
10-year publication summary
|
80
|
79
|
87
|
91
|
98
|
79
|
78
|
95
|
76
|
52
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 18621 |
160 |
| Varian Semiconductor Equipment Associates, Inc. | 1231 |
136 |
| Axcelis Technologies, Inc. | 409 |
100 |
| Hitachi High-Tech Corporation | 5310 |
57 |
| FEI Company | 943 |
38 |
| Hitachi High-Technologies Corporation | 2004 |
33 |
| Entegris, Inc. | 1868 |
33 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 42704 |
30 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 113 |
24 |
| Hitachi High-Tech Science Corporation | 290 |
22 |
| Canon Anelva Corporation | 686 |
18 |
| Nissin ION Equipment Co., Ltd. | 82 |
17 |
| Praxair Technology, Inc. | 1298 |
14 |
| Shine Technologies, LLC | 138 |
13 |
| Massachusetts Institute of Technology | 10057 |
11 |
| Carl Zeiss Microscopy, LLC | 27 |
11 |
| Samsung Electronics Co., Ltd. | 146092 |
10 |
| Advanced ION Beam Technology, Inc. | 71 |
10 |
| ULVAC, Inc. | 1380 |
10 |
| Tel Manufacturing and Engineering of America, Inc. | 140 |
10 |
| Other owners | 467 |