|
2024
|
Invention
|
Substrate scanning apparatus with pendulum and rotatable substrate holder.
A method of scanning ... |
|
|
G/S
|
Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
|
|
G/S
|
Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
|
|
Invention
|
Optical elements patterning. A method for processing a substrate with a gas cluster ion beam (GCI... |
|
2023
|
Invention
|
Wet processing of microelectronic substrates with controlled mixing of fluids proximal to substra... |
|
|
Invention
|
Radiatively-cooled substrate holder. A method of cooling a substrate during processing includes p... |
|
|
Invention
|
Optical elements patterning.
A method for processing a substrate with a gas cluster ion beam (GC... |
|
|
Invention
|
Wafer scanning apparatus and method for focused beam processing. A method of scanning a wafer inc... |
|
2022
|
Invention
|
Translating and rotating chuck for processing microelectronic substrates in a process chamber.
C... |
|
|
Invention
|
Substrate scanning apparatus with pendulum and rotatable substrate holder. A method of scanning a... |
|
|
Invention
|
Radiatively-cooled substrate holder.
A method of cooling a substrate during processing includes ... |
|
|
Invention
|
Pattern enhancement using a gas cluster ion beam. A method of processing a substrate includes loa... |
|
|
Invention
|
Automated fault detection in microfabrication. A method including: collecting first processing to... |
|
|
Invention
|
Pressure control strategies to provide uniform treatment streams in the manufacture of microelect... |
|
2021
|
Invention
|
System and method for monitoring treatment of microelectronic substrates with fluid sprays such a... |
|
|
Invention
|
Automated fault detection in microfabrication.
A method including: collecting first processing t... |
|
|
Invention
|
Tuning gas cluster ion beam systems. A method for processing a substrate that includes: applying,... |
|
|
Invention
|
Wafer scanning apparatus and method for focused beam processing. A scanning system includes a sca... |
|
2020
|
Invention
|
Systems and methods for rotating and translating a substrate in a process chamber. Disclosed here... |
|
|
G/S
|
Semiconductor manufacturing machines and their component
parts and fittings. |
|
|
G/S
|
Semiconductor manufacturing machines and their component parts and fittings |
|
|
Invention
|
Systems and methods for treating substrates with cryogenic fluid mixtures.
Disclosed herein are ... |
|
|
Invention
|
Method of smoothing and planarizing of altic surfaces.
Techniques herein provide effective smoot... |
|
2019
|
Invention
|
Method for achieving stiction-free high-aspect-ratio microstructures after wet chemical processin... |
|
|
Invention
|
Treatment systems with repositionable nozzle useful in the manufacture of microelectronic devices... |
|
|
Invention
|
Compensated location specific processing apparatus and method. An apparatus and method for proces... |
|
|
Invention
|
Magnetic integrated lift pin system for a chemical processing chamber. The present invention prov... |
|
|
Invention
|
Microelectronic treatment system having treatment spray with controllable beam size. This inventi... |
|
2018
|
Invention
|
Hybrid corrective processing system and method. A system and method for performing corrective pro... |
|
|
Invention
|
Systems and methods for treating substrates with cryogenic fluid mixtures. Disclosed herein are s... |
|
|
G/S
|
Microelectronics and semiconductor manufacturing machines
for cleaning, etching, stripping, proc... |
|
|
G/S
|
Microelectronics and semiconductor manufacturing machines for cleaning, etching, stripping, proce... |
|
2017
|
Invention
|
Wafer edge lift pin design for manufacturing a semiconductor device. A wafer edge lift pin of an ... |
|
|
Invention
|
Translating and rotating chuck for processing microelectronic substrates in a process chamber. Cl... |
|
|
Invention
|
Magnetically levitated and rotated chuck for processing microelectronic substrates in a process c... |
|
|
Invention
|
Apparatus for spraying cryogenic fluids. Disclosed herein are systems and methods for treating th... |
|
2016
|
Invention
|
Method for high throughput using beam scan size and beam position in gas cluster ion beam process... |
|
|
Invention
|
Method of surface profile correction using gas cluster ion beam. A method for correcting a surfac... |
|
|
Invention
|
Apparatus and method for scanning an object through a fluid stream. An apparatus for treating the... |
|
|
Invention
|
Methodologies for rinsing tool surfaces in tools used to process microelectronic workpieces. Rins... |
|
2015
|
Invention
|
Systems and methods for metering a dose volume of fluid used to treat microelectronic substrates.... |
|
|
Invention
|
Sidewall spacer patterning method using gas cluster ion beam. A method for patterning a substrate... |
|
2014
|
Invention
|
Detection of lost wafer from spinning chuck. The disclosure relates to systems and methods for de... |
|
2007
|
G/S
|
MICROELECTRONICS AND SEMICONDUCTOR MANUFACTURING MACHINES FOR CLEANING, ETCHING, STRIPPING, PROCE... |
|
1996
|
G/S
|
electronically controlled spray apparatus for processing silicon wafers by acid etching and cleaning |
|
1989
|
G/S
|
Electronically controlled spray apapratus for processing silicon wafers by acid etching and clean... |
|
1988
|
G/S
|
ELECTRONICALLY CONTROLLED SPRAY APPARATUS FOR PROCESSING SILICON WAFERS BY ACID ETCHING AND CLEANING |
