Patent holdings for IPC class H01J 3/26

Total number of patents in this class: 89

10-year publication summary

3
0
1
0
0
4
0
0
0
0
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
5241
9
NuFlare Technology, Inc.
836
8
ASML Netherlands B.V.
7312
4
FEI Company
937
4
JEOL Ltd.
572
4
Varian Semiconductor Equipment Associates, Inc.
1233
3
ION Beam Applications S.A.
187
3
Hitachi, Ltd.
15434
2
Applied Materials, Inc.
18406
2
Mitsubishi Electric Corporation
45811
2
Advanced ION Beam Technology, Inc.
71
2
Axcelis Technologies, Inc.
400
2
Carl Zeiss Microscopy GmbH
1200
2
IMS Nanofabrication GmbH
59
2
Integrated Dynamic Electron Solutions, Inc.
18
2
Hermes Microvision Incorporated B.V.
124
2
Canon Inc.
39442
1
Koninklijke Philips Electronics N.V.
10018
1
Applied Materials Israel, Ltd.
601
1
Taiwan Semiconductor Manufacturing Company, Ltd.
42118
1
Other owners 32