- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 27/20 - Ion sourcesIon guns using particle bombardment, e.g. ionisers
Patent holdings for IPC class H01J 27/20
Total number of patents in this class: 97
10-year publication summary
|
6
|
11
|
12
|
12
|
13
|
8
|
6
|
7
|
1
|
4
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Varian Semiconductor Equipment Associates, Inc. | 1231 |
11 |
| Applied Materials, Inc. | 18565 |
6 |
| Axcelis Technologies, Inc. | 408 |
4 |
| FEI Company | 944 |
4 |
| Markes International Limited | 12 |
4 |
| Isotopx Ltd | 15 |
4 |
| Schlumberger Technology Corporation | 10691 |
3 |
| INFICON, Inc. | 78 |
3 |
| Micromass UK Limited | 1119 |
3 |
| Nissin ION Equipment Co., Ltd. | 82 |
3 |
| Halliburton Energy Services, Inc. | 20871 |
2 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 42549 |
2 |
| Entegris, Inc. | 1867 |
2 |
| National University of Singapore | 2443 |
2 |
| Sumitomo Heavy Industries, Ltd. | 1926 |
2 |
| ULVAC, Inc. | 1380 |
2 |
| Balakin, Andrey Vladimirovich | 65 |
2 |
| Balakin, Pavel Vladimirovich | 65 |
2 |
| Toyota Motor Corporation | 31903 |
1 |
| Massachusetts Institute of Technology | 10041 |
1 |
| Other owners | 34 |