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2024
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Invention
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A method and system for monitoring a degas chamber using a photoionization detector and a residua... |
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Invention
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Method and assembly for creating a molecular beam. An inlet assembly includes an inlet flange, a ... |
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Invention
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Method for predicting ion source failure. A method for predicting failure of a coated filament of... |
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Invention
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Method and system for injecting an internal standard into a portable gas analyzer system and an a... |
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Invention
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Sensor for monitoring lateral etching. A sensor for real-time monitoring of etching is presented.... |
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Invention
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Qcm sensor.
A quartz crystal microbalance (QCM) sensor, comprises a sensor housing and a crystal... |
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Invention
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Connector assembly. A connector assembly includes a housing including a terminal interface at the... |
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2023
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Invention
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Method for displaying concentration data of a substance and an associated apparatus. A method for... |
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Invention
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Throttling element particle detector. A particle detector includes at least one throttling elemen... |
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Invention
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Atmospheric pressure ionization coupled to an electron ionization mass spectrometer. An atmospher... |
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Invention
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Atmospheric pressure ionization coupled to an electron ionization mass spectrometer.
An atmosphe... |
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Invention
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Method of auto tuning one or more sensors. A method for automatically calibrating a sensor for a ... |
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2022
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Invention
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Ion source assembly with multiple elliptical filaments.
An electron bombardment ion source assem... |
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Invention
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Ion source assembly with multiple elliptical filaments. An electron bombardment ion source assemb... |
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Invention
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Quartz crystal microbalance (qcm) sensor having rapid registration response.
An improved Quartz ... |
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Invention
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Quartz crystal microbalance (qcm) sensor having rapid registration | response. A method for fabri... |
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Invention
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Upstream process monitoring for deposition and etch chambers.
A semiconductor fabrication system... |
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Invention
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Upstream process monitoring for deposition and etch chambers. A semiconductor fabrication system ... |
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Invention
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A system and method for mass flow measurement and control of process gases in a carrier stream us... |
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Invention
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Method of detecting radicals using mass spectrometry. A method for detecting radicals in process ... |
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Invention
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Unconsumed precursor monitoring. A monitoring device for monitoring a fabrication process in a fa... |
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Invention
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Method of optimizing equipment maintenance and associated system.
A method of maintenance optimi... |
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Invention
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Method of optimizing equipment maintenance and associated system. A method of maintenance optimiz... |
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Invention
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Time-of-flight mass spectrometer assembly with a secondary flange. A time-of-flight mass spectrom... |
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Invention
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System and method for deconvolution of real-time mass from the influence of temperature and press... |
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Invention
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Partial pressure gauge assembly for process contaminant detection using photoionization and assoc... |
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Invention
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Sealing system for components of a gas analyzer.
A sealing system includes a first seal, a seco... |
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Invention
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Sealing system for components of a gas analyzer. A sealing system includes a first seal, a second... |
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Invention
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Wide range electron impact ion source for a mass spectrometer. A wide-range ion source for a mass... |
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2021
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Invention
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Htcc antenna for generation of microplasma. A plasma generation device for generating a plasma co... |
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Invention
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Htcc antenna for generation of plasma. A plasma generation device for generating a plasma compris... |
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Invention
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Ion source assembly with multiple ionization volumes for use in a mass spectrometer. An ion sourc... |
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Invention
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Gas analyzer and membranes therefor. A gas analyzer and a method for performing mass spectrometry... |
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Invention
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System and method for monitoring semiconductor processes. A system and method for monitoring a se... |
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2020
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Invention
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Sensor package |
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Invention
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Chemical analysis device and method. Methods and systems for chemical analysis. For instance, a d... |
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Invention
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Monitoring thin film deposition. A system for monitoring thin film deposition is described. The s... |
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2019
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Invention
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A method for displaying concentration data of a substance and an associated apparatus. A method f... |
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1998
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G/S
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Vacuum process control apparatus for use in applying films and coatings in manufacturing, namely,... |
