Patent holdings for IPC class H01J 27/02

Total number of patents in this class: 489

10-year publication summary

36
40
31
24
21
33
20
32
14
8
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Varian Semiconductor Equipment Associates, Inc.
1231
58
Applied Materials, Inc.
18621
51
Axcelis Technologies, Inc.
409
21
ALIS Corporation
27
13
Global Plasma Solutions, Inc.
76
13
Canon Anelva Corporation
686
11
Sharp Corporation
10237
10
Tae Technologies, Inc.
241
9
FEI Company
943
8
Schlumberger Technology Corporation
10717
7
Nissin ION Equipment Co., Ltd.
82
6
Tel Manufacturing and Engineering of America, Inc.
140
6
Agilent Technologies, Inc.
2631
5
Thermo Fisher Scientific (Bremen) GmbH
583
5
Accion Systems, Inc.
19
5
Hitachi High-Tech Corporation
5310
5
PerkinElmer U.S. LLC
288
5
Tsinghua University
5922
4
HIL Applied Medical, Ltd.
15
4
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
159
4
Other owners 239