- All sections
- C - Chemistrymetallurgy
- C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/46 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
Patent holdings for IPC class C23C 16/46
Total number of patents in this class: 1679
10-year publication summary
131
|
149
|
142
|
141
|
133
|
125
|
160
|
151
|
171
|
91
|
2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
Owner |
All patents
|
This class
|
---|---|---|
Applied Materials, Inc. | 18589 |
238 |
Tokyo Electron Limited | 12694 |
192 |
Kokusai Electric Corporation | 2011 |
152 |
ASM IP Holding B.V. | 2071 |
75 |
Lam Research Corporation | 5225 |
63 |
Aixtron SE | 317 |
58 |
Taiwan Semiconductor Manufacturing Company, Ltd. | 42636 |
43 |
NuFlare Technology, Inc. | 841 |
22 |
Samsung Electronics Co., Ltd. | 145864 |
21 |
Veeco Instruments Inc. | 328 |
16 |
LPE S.p.A. | 73 |
14 |
Safran Ceramics | 407 |
14 |
Rtx Corporation | 9360 |
12 |
Hon Hai Precision Industry Co., Ltd. | 4037 |
11 |
Hitachi Kokusai Electric Inc. | 882 |
11 |
Shin-Etsu Chemical Co., Ltd. | 5651 |
11 |
Tsinghua University | 5919 |
11 |
Sumitomo Electric Industries, Ltd. | 15455 |
10 |
Eugene Technology Co., Ltd. | 173 |
10 |
Centre National de La Recherche Scientifique | 10421 |
9 |
Other owners | 686 |