Patent holdings for IPC class H01J 37/073

Total number of patents in this class: 360

10-year publication summary

20
15
28
36
31
29
39
38
25
20
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
5455
49
Photo Electron Soul Inc.
34
29
Hitachi High-Technologies Corporation
1996
20
KLA-Tencor Corporation
2539
19
KLA Corporation
1655
18
ASML Netherlands B.V.
7573
16
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
155
11
National Institute for Materials Science
1100
9
National Institute of Advanced Industrial Science and Technology
3793
8
NuFlare Technology, Inc.
881
8
Nikon Corporation
7304
6
Denki Kagaku Kogyo Kabushiki Kaisha
619
6
FEI Company
981
6
Centre National de La Recherche Scientifique
10666
5
Applied Materials, Inc.
19204
5
38th Research Institute, China Electronics Technology Group Corporation
52
5
Commissariat à l'énergie atomique et aux energies alternatives
10946
4
Hamamatsu Photonics K.K.
4485
4
Board of Trustees of Michigan State University
1200
4
Denka Company Limited
2650
4
Other owners 124