- All sections
- G - Physics
- G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devicesmaterials therefororiginals thereforapparatus specially adapted therefor
- G03F 1/84 - Inspecting
Patent holdings for IPC class G03F 1/84
Total number of patents in this class: 637
10-year publication summary
|
47
|
48
|
49
|
67
|
53
|
60
|
44
|
45
|
52
|
44
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Carl Zeiss SMT GmbH | 2988 |
127 |
| ASML Netherlands B.V. | 7394 |
74 |
| KLA-Tencor Corporation | 2544 |
50 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 42863 |
47 |
| KLA Corporation | 1561 |
36 |
| Hoya Corporation | 2746 |
30 |
| Samsung Electronics Co., Ltd. | 146534 |
25 |
| NuFlare Technology, Inc. | 845 |
18 |
| ASML Holding N.V. | 504 |
17 |
| Shin-Etsu Chemical Co., Ltd. | 5663 |
13 |
| Carl Zeiss SMS Ltd. | 48 |
12 |
| LaserTec Corporation | 93 |
11 |
| Bruker Nano, Inc. | 340 |
8 |
| Nikon Corporation | 7173 |
7 |
| Kioxia Corporation | 10301 |
7 |
| Applied Materials Israel, Ltd. | 612 |
6 |
| Carl Zeiss AG | 887 |
6 |
| Changxin Memory Technologies, Inc. | 4926 |
6 |
| Samsung Display Co., Ltd. | 34842 |
5 |
| Corning Incorporated | 10268 |
5 |
| Other owners | 127 |