Patent holdings for IPC class H01J 37/065

Total number of patents in this class: 142

10-year publication summary

9
10
14
9
8
10
11
9
11
11
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
ASML Netherlands B.V.
7573
25
Hitachi High-Tech Corporation
5455
10
NuFlare Technology, Inc.
881
8
KLA-Tencor Corporation
2539
6
Hitachi High-Technologies Corporation
1996
5
Advantest Corporation
1768
4
Mapper Lithography IP B.V.
132
4
Nikon Metrology, NV
66
3
Hamamatsu Photonics K.K.
4485
3
38th Research Institute, China Electronics Technology Group Corporation
52
3
Denka Company Limited
2650
3
Denki Kagaku Kogyo Kabushiki Kaisha
619
3
Paton Turbine Technologies LLC
3
3
Freemelt AB
38
3
Applied Physics Technologies, Inc.
14
2
Arcam AB
202
2
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
155
2
Param Corporation
8
2
Titanium Metals Corporation
81
2
ULVAC, Inc.
1374
2
Other owners 47