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2020
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Invention
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Electron gun device. An electron gun device according to the present invention emits an electron ... |
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2019
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Invention
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Electron gun. 66is held such that the vacuum partial pressure is less than or equal to 1×10-4666,... |
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2014
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Invention
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Tubular permanent magnet used in a multi-electron beam device. There provided a device for effect... |
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2012
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Invention
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Electron beam lithography device and lithographic method. A high-accuracy and high-speed lithogra... |
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2011
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Invention
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Electron lens and the electron beam device.
There provided a device for effectively drawing a fi... |
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Invention
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Electron lens and the electron beam device. A fine pattern is drawn effectively using a permanent... |
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Invention
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Electron gun and electron beam device. An electron gun cathode (104) is column shaped, and emits ... |
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Invention
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Electron gun and electron beam device. A cathode electron gun (104) is column shaped, and emits e... |
