- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/063 - Geometrical arrangement of electrodes for beam-forming
Patent holdings for IPC class H01J 37/063
Total number of patents in this class: 93
10-year publication summary
|
8
|
7
|
2
|
11
|
13
|
6
|
7
|
8
|
8
|
4
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| NuFlare Technology, Inc. | 842 |
8 |
| ASML Netherlands B.V. | 7385 |
5 |
| Canon Anelva Corporation | 686 |
5 |
| KLA Corporation | 1549 |
5 |
| ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | 159 |
4 |
| KLA-Tencor Corporation | 2544 |
4 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 113 |
4 |
| Hitachi High-Tech Corporation | 5310 |
4 |
| Denki Kagaku Kogyo Kabushiki Kaisha | 627 |
3 |
| Arcam AB | 202 |
2 |
| Axcelis Technologies, Inc. | 409 |
2 |
| IMS Nanofabrication GmbH | 59 |
2 |
| JEOL Ltd. | 580 |
2 |
| Mapper Lithography IP B.V. | 134 |
2 |
| National Institute for Materials Science | 1108 |
2 |
| NuFlare Technology America, Inc. | 23 |
2 |
| Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | 6107 |
2 |
| Samsung Electronics Co., Ltd. | 146092 |
1 |
| Hitachi High-Technologies Corporation | 2004 |
1 |
| Applied Materials, Inc. | 18621 |
1 |
| Other owners | 32 |