- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/063 - Geometrical arrangement of electrodes for beam-forming
Patent holdings for IPC class H01J 37/063
Total number of patents in this class: 92
10-year publication summary
|
8
|
7
|
2
|
11
|
13
|
6
|
7
|
8
|
8
|
3
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| NuFlare Technology, Inc. | 832 |
8 |
| ASML Netherlands B.V. | 7286 |
5 |
| Canon Anelva Corporation | 686 |
5 |
| KLA Corporation | 1493 |
5 |
| ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | 157 |
4 |
| KLA-Tencor Corporation | 2546 |
4 |
| Hitachi High-Tech Corporation | 5211 |
4 |
| Denki Kagaku Kogyo Kabushiki Kaisha | 637 |
3 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 109 |
3 |
| Arcam AB | 202 |
2 |
| Axcelis Technologies, Inc. | 402 |
2 |
| IMS Nanofabrication GmbH | 59 |
2 |
| JEOL Ltd. | 570 |
2 |
| Mapper Lithography IP B.V. | 135 |
2 |
| National Institute for Materials Science | 1105 |
2 |
| NuFlare Technology America, Inc. | 23 |
2 |
| Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | 6131 |
2 |
| Samsung Electronics Co., Ltd. | 143021 |
1 |
| General Electric Company | 17066 |
1 |
| Hitachi High-Technologies Corporation | 2012 |
1 |
| Other owners | 32 |