Patent holdings for IPC class H01J 37/06

Total number of patents in this class: 358

10-year publication summary

34
28
32
32
45
25
15
24
25
14
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
5297
35
Hitachi High-Technologies Corporation
2004
20
ASML Netherlands B.V.
7371
19
NuFlare Technology, Inc.
840
18
KLA-Tencor Corporation
2544
17
Denka Company Limited
2565
15
FEI Company
944
9
KLA Corporation
1534
8
National Institute for Materials Science
1105
7
ULVAC, Inc.
1380
6
Taiwan Semiconductor Manufacturing Company, Ltd.
42549
5
Nikon Corporation
7159
5
Hamamatsu Photonics K.K.
4411
5
Advantest Corporation
1826
5
Carl Zeiss Microscopy GmbH
1202
5
Fermi Forward Discovery Group, LLC
98
5
Samsung Electronics Co., Ltd.
145630
4
38th Research Institute, China Electronics Technology Group Corporation
50
4
Denki Kagaku Kogyo Kabushiki Kaisha
628
4
Photo Electron Soul Inc.
32
4
Other owners 158