- All sections
- C - Chemistrymetallurgy
- C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 14/46 - Sputtering by ion beam produced by an external ion source
Patent holdings for IPC class C23C 14/46
Total number of patents in this class: 161
10-year publication summary
|
12
|
13
|
12
|
10
|
8
|
13
|
10
|
16
|
9
|
2
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Applied Materials, Inc. | 18334 |
16 |
| Fujikura Ltd. | 2911 |
6 |
| Hoya Corporation | 2735 |
5 |
| Veeco Instruments Inc. | 327 |
5 |
| The Boeing Company | 19960 |
4 |
| Canon Anelva Corporation | 686 |
4 |
| Plasma-therm NES LLC | 16 |
4 |
| Tel Manufacturing and Engineering of America, Inc. | 142 |
4 |
| Varian Semiconductor Equipment Associates, Inc. | 1235 |
3 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 41903 |
3 |
| Institute of Geological and Nuclear Sciences Limited | 13 |
3 |
| Samsung Display Co., Ltd. | 34061 |
2 |
| The Regents of the University of California | 19780 |
2 |
| Commissariat à l'énergie atomique et aux energies alternatives | 10787 |
2 |
| Weatherford Technology Holdings, LLC | 2009 |
2 |
| Lawrence Livermore National Security, LLC | 1919 |
2 |
| Carl Zeiss SMT GmbH | 2926 |
2 |
| Advanced Micro-fabrication Equipment, Inc. China | 103 |
2 |
| Beamalloy Reconstructive Medical Products, LLC | 2 |
2 |
| Board of Trustees of Michigan State University | 1178 |
2 |
| Other owners | 86 |