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2026
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; semiconductor wafer... |
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2025
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Invention
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System of processing substrate, transfer method, transfer program, and holder.
A system of proce... |
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Invention
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Valve device and leak detection method.
A valve device includes: a body formed with an inflow pa... |
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Invention
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Film forming method.
A film forming method of forming a graphene film includes a loading process... |
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Invention
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Substrate processing apparatus and substrate processing method.
A processing apparatus configure... |
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Invention
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Prober, method for controlling prober, inspection system, and method for controlling inspection s... |
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Invention
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Method for forming thermal spraying film and method for producing thermal spraying material. The ... |
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Invention
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Computer program, information processing method, and information processing device. Provided are ... |
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Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
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Invention
|
Information processing method, computer program, and information processing apparatus.
An inform... |
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Invention
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Temperature control method and inspection system. Provided are a temperature control method and a... |
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Invention
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Information processing method, information processing device, and computer program. Provided are ... |
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Invention
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Computer program, information processing method, learning data generation method, learning model ... |
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Invention
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Computer program, information processing method, learning model generation method, and informatio... |
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Invention
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Substrate processing system and conveyance method. A substrate processing system according to the... |
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Invention
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Plasma processing apparatus.
A plasma processing apparatus comprises a processing chamber, a mic... |
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Invention
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Substrate conveyance module and method for operating substrate conveyance module. A substrate con... |
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Invention
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Substrate processing device. A substrate processing device according to one aspect of the present... |
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Invention
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Screw holding device and screw fastening device. This screw holding device comprises a bit part, ... |
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Invention
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Plasma processing device and plasma control method. A plasma processing device comprises a proces... |
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Invention
|
Plasma processing device and etching method. Provided is a plasma processing device in one illust... |
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Invention
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Substrate processing apparatus. A substrate processing apparatus comprising a chamber, a shutter,... |
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Invention
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Etching method and plasma processing device. In one exemplary embodiment, an etching method inclu... |
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Invention
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Information processing method, experiment method, and computer program. Provided are an informati... |
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Invention
|
Computer program, information processing method, and information processing device. The purpose o... |
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Invention
|
Teaching method for substrate transfer device and substrate processing apparatus.
There is a tea... |
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Invention
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Substrate processing device, information processing method, and computer program. Provided are a ... |
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Invention
|
Substrate processing system. This substrate processing system comprises: a vacuum transfer chambe... |
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Invention
|
Substrate processing device and control method.
A substrate processing device includes: a proces... |
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Invention
|
Plasma processing device. The present invention provides a technique for improving efficiency of ... |
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Invention
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In-situ wafer monitoring with dynamic backside gas feedback control as wafer bow countermeasure. ... |
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Invention
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Method and apparatus for forming metal silicide layer on substrate.
A method for forming a metal... |
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P/S
|
Semiconductor manufacturing machines and parts therefor; flat panel display manufacturing machine... |
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|
P/S
|
Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
|
|
Invention
|
Methods for determining a temperature achieved by a heating process. A method for determining a t... |
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|
Invention
|
Methods for determining a temperature achieved by a heating process.
A method for determining a ... |
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Invention
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Step ramp grading yield enhancement for hybrid bonding. Step ramp grading yield enhancement for h... |
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|
Invention
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Low-temperature etching of carbon-containing layers. A method for etching a layer includes loadin... |
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Invention
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Method for processing substrate. A method for processing a substrate includes providing the subst... |
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|
Invention
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Patterning semiconductor materials using surface modification techniques. A method includes formi... |
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Invention
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Methods for wet atomic layer etching of tungsten using halogenation. Various embodiments of metho... |
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Invention
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Plasma-enhanced chemical vapor deposition method. A method for processing a substrate includes ha... |
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|
P/S
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Installation, maintenance and repair of semiconductor manufacturing machines; installation, maint... |
|
|
P/S
|
Installation, maintenance and repair of semiconductor
manufacturing machines; installation, main... |
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|
Invention
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Methods for wet atomic layer etching of titanium nitride using halogenation.
Various embodiments... |
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2024
|
P/S
|
Semiconductor manufacturing machines and their component parts and fittings |
|
|
P/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
|
|
Invention
|
Mask modification method.
A method for processing a substrate includes receiving the substrate o... |
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|
Invention
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Method for patterning substrate using metal oxide resist.
A method includes forming a metal-cont... |
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|
Invention
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Methods for forming low-resistivity interconnect structures comprising ruthenium.
Various embodi... |
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|
Invention
|
Step ramp grading yield enhancement for hybrid bonding.
Step ramp grading yield enhancement for ... |
|
|
Invention
|
Low-temperature etching of carbon-containing layers.
A method for etching a layer includes loadi... |
|
|
Invention
|
Method for processing substrate.
A method for processing a substrate includes providing the subs... |
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Invention
|
Electrical energy produced by rotating magnets.
A substrate processing apparatus includes a subs... |
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P/S
|
Semiconductor manufacturing machines used for coating and deposition processes, and their compone... |
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|
P/S
|
Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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P/S
|
Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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2023
|
Invention
|
Abnormality management method, management device, and storage medium.
An abnormality management ... |
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P/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines, nam... |
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P/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
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2022
|
P/S
|
Semiconductor manufacturing machines and their component
parts and fittings. |
|
2021
|
P/S
|
Semiconductor manufacturing machines and their component parts and fittings; machines for mainten... |
|
|
P/S
|
Semiconductor manufacturing machines and their component
parts and fittings; machines for mainte... |
