- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/067 - Replacing parts of gunsMutual adjustment of electrodes
Patent holdings for IPC class H01J 37/067
Total number of patents in this class: 20
10-year publication summary
|
1
|
0
|
3
|
2
|
2
|
2
|
0
|
1
|
1
|
1
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Hitachi High-Technologies Corporation | 2004 |
2 |
| Varian Semiconductor Equipment Associates, Inc. | 1231 |
2 |
| Mapper Lithography IP B.V. | 134 |
2 |
| Aquasium Technology Limited | 17 |
2 |
| Mitsubishi Heavy Industries, Ltd. | 8715 |
1 |
| Axcelis Technologies, Inc. | 409 |
1 |
| Denka Company Limited | 2573 |
1 |
| FEI Company | 943 |
1 |
| JEOL Ltd. | 580 |
1 |
| KLA-Tencor Corporation | 2544 |
1 |
| Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V. | 1774 |
1 |
| Leybold GmbH | 292 |
1 |
| Ralf Edinger | 4 |
1 |
| Carl Zeiss MultiSEM GmbH | 134 |
1 |
| Hitachi High-Tech Corporation | 5310 |
1 |
| Thales Deutschland GmbH Electron Devices | 5 |
1 |
| Other owners | 0 |