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2024
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Invention
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Gas purification apparatus and gas purification method. The present invention addresses the probl... |
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Invention
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Cylindrical heating part of exhaust gas treatment device. Provided is a cylindrical heating part ... |
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2023
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Invention
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Cylindrical heating part of exhaust gas treatment device. A cylindrical heating part 14 of an exh... |
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Invention
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Detoxification device and detoxification method for gas. A detoxification device (100) that detox... |
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Invention
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Heat-storage-type gas treatment device and gas purification method using same. This heat-storage-... |
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Invention
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Gas adsorption device–equipped storage cabinet system. This gas adsorption device–equipped storag... |
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2022
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Invention
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Cleaning method for dry vacuum pump and cleaning device for dry vacuum pump. The present inventio... |
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Invention
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Gas removal apparatus and gas treatment method. Provided are a gas removal apparatus and a gas tr... |
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Invention
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Electric heater and semiconductor exhaust gas treatment device using said heater. An electric hea... |
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Invention
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Method for treating exhaust gas containing nitrogen compound, and apparatus for said method. The ... |
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Invention
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Cylindrical heating unit and exhaust gas processing device comprising cylindrical heating unit. A... |
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2021
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Invention
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Gas purification device. A gas purification device according to the present invention comprises: ... |
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Invention
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Exhaust gas purification device. The present invention provides an exhaust gas purification devic... |
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Invention
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Gas processing furnace and exhaust gas processing device using same. The present invention is a g... |
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Invention
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Ethylene oxide gas removal method, and ethylene oxide gas removal system using same. An ethylene ... |
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Invention
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Treatment device for semiconductor manufacturing exhaust gas. The treatment device for semiconduc... |
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Invention
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Device for treating pfc-containing exhaust gas. The device for treating PFC-containing exhaust ga... |
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2020
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Invention
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Gas processing furnace and exhaust gas processing device in which same is used. A gas processing ... |
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Invention
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Gas processing furnace and exhaust gas processing device in which same is used. This gas processi... |
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Invention
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Electric heating device. The present invention is an electric heating device comprising: a radiat... |
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Invention
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Electric heating device. The present invention is an electric heating device comprising: a metal ... |
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2019
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Invention
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Exhaust-gas plasma detoxification method, and device for same. Provided is a plasma detoxificatio... |
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Invention
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Exhaust gas detoxification unit. According to the present invention, clogging of an exhaust gas p... |
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Invention
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Exhaust gas purifier and exhaust gas detoxifier in which same is used. The present invention prov... |
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Invention
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Heat storage material. Provided is a heat storage material which has a simple structure, which is... |
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2018
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Invention
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Plasma generation unit and exhaust gas detoxifying device using same. The present invention provi... |
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Invention
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Exhaust gas scrubbing device. Provided is a heat-storage-type exhaust gas scrubbing device that i... |
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Invention
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Exhaust gas introduction nozzle, water treatment device, and exhaust gas treatment device. In a w... |
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Invention
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Exhaust gas pressure-reducing detoxifying apparatus. The present invention provides an exhaust ga... |
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Invention
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Exhaust gas decompression detoxification method and device therefor. The present invention provid... |
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Invention
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Exhaust gas decompression and detoxification method, and device therefor. The present invention p... |
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2016
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Invention
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Dehumidification device. A dehumidification device according to the present invention has a physi... |
